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Class Information
Number: 438/391
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Including doping of trench surfaces > Including isolation means formed in trench
Description: Process for making a trench capacitor having structure functioning as electrical isolation formed in the trench bottom.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608878 |
Semiconductor device manufactured with a double shallow trench isolation process |
Oct. 27, 2009 |
| 7557012 |
Method for forming surface strap |
Jul. 7, 2009 |
| 7557415 |
Trench isolation type semiconductor device and related method of manufacture |
Jul. 7, 2009 |
| 7553723 |
Manufacturing method of a memory device |
Jun. 30, 2009 |
| 7514317 |
Strained semiconductor device and method of making same |
Apr. 7, 2009 |
| 7491604 |
Trench memory with monolithic conducting material and methods for forming same |
Feb. 17, 2009 |
| 7416937 |
Semiconductor device and method for fabricating the same |
Aug. 26, 2008 |
| 7416952 |
Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer |
Aug. 26, 2008 |
| 7410862 |
Trench capacitor and method for fabricating the same |
Aug. 12, 2008 |
| 7402889 |
Semiconductor device and method for manufacturing the same |
Jul. 22, 2008 |
| 7393750 |
Method for manufacturing a semiconductor device |
Jul. 1, 2008 |
| 7390717 |
Trench power MOSFET fabrication using inside/outside spacers |
Jun. 24, 2008 |
| 7358145 |
Method of fabricating shallow trench isolation structure |
Apr. 15, 2008 |
| 7354812 |
Multiple-depth STI trenches in integrated circuit fabrication |
Apr. 8, 2008 |
| 7344949 |
Non-volatile memory device and method of fabricating the same |
Mar. 18, 2008 |
| 7344953 |
Process for vertically patterning substrates in semiconductor process technology by means of inconformal deposition |
Mar. 18, 2008 |
| 7303953 |
Production of an integrated capacitor |
Dec. 4, 2007 |
| 7273790 |
Method for fabricating trench capacitor with insulation collar electrically connected to substrate through buried contact, in particular, for a semiconductor memory cell |
Sep. 25, 2007 |
| 7268028 |
Well isolation trenches (WIT) for CMOS devices |
Sep. 11, 2007 |
| 7262090 |
Random access memory (RAM) capacitor in shallow trench isolation with improved electrical isolation to overlying gate electrodes |
Aug. 28, 2007 |
| 7262089 |
Methods of forming semiconductor structures |
Aug. 28, 2007 |
| 7229887 |
Method to selectively remove one side of a conductive bottom electrode of a phase-change memory cell and structure obtained thereby |
Jun. 12, 2007 |
| 7223651 |
Dram memory cell with a trench capacitor and method for production thereof |
May. 29, 2007 |
| 7223669 |
Structure and method for collar self-aligned to buried plate |
May. 29, 2007 |
| 7214957 |
PRAMS having phase-change layer pattern with electrode contact area and methods of forming the same |
May. 8, 2007 |
| 7163857 |
Buried strap contact for a storage capacitor and method for fabricating it |
Jan. 16, 2007 |
| 7157328 |
Selective etching to increase trench surface area |
Jan. 2, 2007 |
| 7153737 |
Self-aligned, silicided, trench-based, DRAM/EDRAM processes with improved retention |
Dec. 26, 2006 |
| 7153738 |
Method for making a trench memory cell |
Dec. 26, 2006 |
| 7153781 |
Method to etch poly Si gate stacks with raised STI structure |
Dec. 26, 2006 |
| 7122439 |
Method of fabricating a bottle trench and a bottle trench capacitor |
Oct. 17, 2006 |
| 7098102 |
Shallow trench isolation structure and dynamic random access memory, and fabricating methods thereof |
Aug. 29, 2006 |
| 7081385 |
Nanotube semiconductor devices and methods for making the same |
Jul. 25, 2006 |
| 7081384 |
Method of forming a silicon dioxide layer |
Jul. 25, 2006 |
| 7078290 |
Method for forming a top oxide with nitride liner |
Jul. 18, 2006 |
| 7078291 |
Method for fabricating a deep trench capacitor |
Jul. 18, 2006 |
| 7049202 |
Method of manufacturing semiconductor device |
May. 23, 2006 |
| 7033896 |
Field effect transistor with a high breakdown voltage and method of manufacturing the same |
Apr. 25, 2006 |
| 7015090 |
Method of manufacturing a semiconductor device having trenches for isolation and capacitor formation trenches |
Mar. 21, 2006 |
| 6984556 |
Method of forming an isolation layer and method of manufacturing a trench capacitor |
Jan. 10, 2006 |
| 6979613 |
Method for fabricating a trench capacitor of DRAM |
Dec. 27, 2005 |
| 6962847 |
Method for forming a self-aligned buried strap in a vertical memory cell |
Nov. 8, 2005 |
| 6955957 |
Method of forming a floating gate in a flash memory device |
Oct. 18, 2005 |
| 6953725 |
Method for fabricating memory device having a deep trench capacitor |
Oct. 11, 2005 |
| 6946344 |
Method for forming trench capacitor |
Sep. 20, 2005 |
| 6933192 |
Method for fabricating a trench having a buried dielectric collar |
Aug. 23, 2005 |
| 6919255 |
Semiconductor trench structure |
Jul. 19, 2005 |
| 6884687 |
SEMICONDUCTOR PROCESSING METHODS OF FORMING INTEGRATED CIRCUITRY, FORMING CONDUCTIVE LINES, FORMING A CONDUCTIVE GRID, FORMING A CONDUCTIVE NETWORK, FORMING AN ELECTRICAL INTERCONNECTION TO A |
Apr. 26, 2005 |
| 6881620 |
Method of fabricating deep trench capacitor |
Apr. 19, 2005 |
| 6875653 |
DRAM cell structure with buried surrounding capacitor and process for manufacturing the same |
Apr. 5, 2005 |
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