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Class Information
Number: 438/391
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Including doping of trench surfaces > Including isolation means formed in trench
Description: Process for making a trench capacitor having structure functioning as electrical isolation formed in the trench bottom.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8709905 Cooking oven with energy saving mode and method Apr. 29, 2014
8685830 Method of filling shallow trenches Apr. 1, 2014
8679938 Shallow trench isolation for device including deep trench capacitors Mar. 25, 2014
8652925 Method of fabricating isolated capacitors and structure thereof Feb. 18, 2014
8642423 Polysilicon/metal contact resistance in deep trench Feb. 4, 2014
8637378 Semiconductor component and methods for producing a semiconductor component Jan. 28, 2014
8552523 Semiconductor device and method for manufacturing Oct. 8, 2013
8546234 Semiconductor process Oct. 1, 2013
8492820 Integrated circuit and a method using integrated process steps to form deep trench isolation structures and deep trench capacitor structures for the integrated circuit Jul. 23, 2013
8486818 Semiconductor devices including buried gate electrodes and isolation layers and methods of forming semiconductor devices including buried gate electrodes and isolation layers using self aligne Jul. 16, 2013
8470684 Suppression of diffusion in epitaxial buried plate for deep trenches Jun. 25, 2013
8461012 Device with ground plane for high frequency signal transmission and method therefor Jun. 11, 2013
8404542 Semiconductor device having transistor with vertical gate electrode and method of fabricating the same Mar. 26, 2013
8404583 Conformality of oxide layers along sidewalls of deep vias Mar. 26, 2013
8372710 Vertical transistors Feb. 12, 2013
8367497 Method to reduce trench capacitor leakage for random access memory device Feb. 5, 2013
8343844 Method for manufacturing capacitor of semiconductor device and capacitor of semiconductor device manufactured thereby Jan. 1, 2013
8298952 Isolation structure and formation method thereof Oct. 30, 2012
8298908 Structure and method for forming isolation and buried plate for trench capacitor Oct. 30, 2012
8247303 Semiconductor device and method of manufacturing the same Aug. 21, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8234595 Method of designing a mask layout Jul. 31, 2012
8232149 SOI device having an increasing charge storage capacity of transistor bodies and method for manufacturing the same Jul. 31, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012
8193067 Integrated circuit and a method using integrated process steps to form deep trench isolation structures and deep trench capacitor structures for the integrated circuit Jun. 5, 2012
8143659 Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor Mar. 27, 2012
8120140 Isolation structure and formation method thereof Feb. 21, 2012
8048739 Method of manufacturing flash memory device Nov. 1, 2011
8034684 Semiconductor device with improved overlay margin and method of manufacturing the same Oct. 11, 2011
7981783 Semiconductor device and method for fabricating the same Jul. 19, 2011
7982284 Semiconductor component including an isolation structure and a contact to the substrate Jul. 19, 2011
7923363 SONOS memory device with optimized shallow trench isolation Apr. 12, 2011
7919385 Semiconductor device and method of forming the same Apr. 5, 2011
7897473 Method of manufacturing a dual contact trench capacitor Mar. 1, 2011
7897479 Managing integrated circuit stress using dummy diffusion regions Mar. 1, 2011
7880212 Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer Feb. 1, 2011
7858485 Structure and method for manufacturing trench capacitance Dec. 28, 2010
7859026 Vertical semiconductor device Dec. 28, 2010
7846792 Method for manufacturing semiconductor device and semiconductor device manufacturing system Dec. 7, 2010
7811881 Methods for forming semiconductor structures with buried isolation collars and semiconductor structures formed by these methods Oct. 12, 2010
7799632 Method of forming an isolation structure by performing multiple high-density plasma depositions Sep. 21, 2010
7732279 Semiconductor device with improved overlay margin and method of manufacturing the same Jun. 8, 2010
7709342 Capacitor and method of manufacturing the same May. 4, 2010
7704836 Method of fabricating super trench MOSFET including buried source electrode Apr. 27, 2010
7701002 Semiconductor device having buried gate electrode and method of fabricating the same Apr. 20, 2010
7682922 Post STI trench capacitor Mar. 23, 2010
7638390 Manufacturing method of static random access memory Dec. 29, 2009
7608878 Semiconductor device manufactured with a double shallow trench isolation process Oct. 27, 2009
7557415 Trench isolation type semiconductor device and related method of manufacture Jul. 7, 2009
7557012 Method for forming surface strap Jul. 7, 2009

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