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Class Information
Number: 438/390
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Including doping of trench surfaces > Multiple doping steps
Description: Process for making a trench capacitor utilizing plural doping steps.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8492221 Method for fabricating power semiconductor device with super junction structure Jul. 23, 2013
8461012 Device with ground plane for high frequency signal transmission and method therefor Jun. 11, 2013
8372710 Vertical transistors Feb. 12, 2013
8329534 Method of forming contacts for a memory device Dec. 11, 2012
8143659 Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor Mar. 27, 2012
8133781 Method of forming a buried plate by ion implantation Mar. 13, 2012
7964914 Semiconductor device and method for fabricating the same including a gate insulation layer and conductive layer surrounding a pillar pattern Jun. 21, 2011
7906402 Compensation techniques for substrate heating processes Mar. 15, 2011
7863130 Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit Jan. 4, 2011
7859026 Vertical semiconductor device Dec. 28, 2010
7851317 Method for fabricating high voltage drift in semiconductor device Dec. 14, 2010
7741176 Method for fabricating a cylindrical capacitor including implanting impurities into the upper sections of the lower electrode to prevent the formation of hemispherical grain silicon on the upp Jun. 22, 2010
7479417 Method for manufacturing contact structure of pixel electrode of liquid crystal display device Jan. 20, 2009
7419883 Method for fabricating a semiconductor structure having selective dopant regions Sep. 2, 2008
7416952 Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer Aug. 26, 2008
7345355 Complementary junction-narrowing implants for ultra-shallow junctions Mar. 18, 2008
7335538 Method for manufacturing bottom substrate of liquid crystal display device Feb. 26, 2008
7166890 Superjunction device with improved ruggedness Jan. 23, 2007
7157328 Selective etching to increase trench surface area Jan. 2, 2007
7094658 3-stage method for forming deep trench structure and deep trench capacitor Aug. 22, 2006
7049202 Method of manufacturing semiconductor device May. 23, 2006
7033885 Deep trench structure manufacturing process Apr. 25, 2006
6989312 Method for fabricating semiconductor optical device Jan. 24, 2006
6962847 Method for forming a self-aligned buried strap in a vertical memory cell Nov. 8, 2005
6953725 Method for fabricating memory device having a deep trench capacitor Oct. 11, 2005
6946344 Method for forming trench capacitor Sep. 20, 2005
6927430 Shared bit line cross-point memory array incorporating P/N junctions Aug. 9, 2005
6927123 Method for forming a self-aligned buried strap in a vertical memory cell Aug. 9, 2005
6927124 Method of manufacturing semiconductor device Aug. 9, 2005
6887768 Method and structure for composite trench fill May. 3, 2005
6878603 Process for manufacturing a DMOS transistor Apr. 12, 2005
6828191 Trench capacitor with an insulation collar and method for producing a trench capacitor Dec. 7, 2004
6825058 Methods of fabricating trench isolated cross-point memory array Nov. 30, 2004
6808997 Complementary junction-narrowing implants for ultra-shallow junctions Oct. 26, 2004
6602749 Capacitor under bitline (CUB) memory cell structure with reduced parasitic capacitance Aug. 5, 2003
6500707 Method for manufacturing a trench capacitor of a memory cell of a semiconductor memory Dec. 31, 2002
6444575 Method for forming a bitline contact via within a memory cell structure Sep. 3, 2002
6399435 Method for producing a DRAM cell with a trench capacitor Jun. 4, 2002
6372573 Self-aligned trench capacitor capping process for high density DRAM cells Apr. 16, 2002
6362040 Reduction of orientation dependent oxidation for vertical sidewalls of semiconductor substrates Mar. 26, 2002
6352866 Method for improving the sidewall stoichiometry of thin film capacitors Mar. 5, 2002
6284593 Method for shallow trench isolated, contacted well, vertical MOSFET DRAM Sep. 4, 2001
6261894 Method for forming dual workfunction high-performance support MOSFETs in EDRAM arrays Jul. 17, 2001
6245612 Method for making the bottom electrode of a capacitor Jun. 12, 2001
RE37228 Method of fabricating semiconductor device Jun. 12, 2001
6232171 Technique of bottle-shaped deep trench formation May. 15, 2001
6211006 Method of forming a trench-type capacitor Apr. 3, 2001
6207494 Isolation collar nitride liner for DRAM process improvement Mar. 27, 2001
6190971 Formation of 5F2 cell with partially vertical transistor and gate conductor aligned buried strap with raised shallow trench isolation region Feb. 20, 2001
6180451 Method of forming capacitor with a HSG layer Jan. 30, 2001

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