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Class Information
Number: 438/389
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Including doping of trench surfaces
Description: Process for making a trench capacitor having a step of introducing electrically active dopant species into a surface (i.e., sidewall or bottom) of the trench in which the capacitor is located.

Sub-classes under this class:

Class Number Class Name Patents
438/392 Doping by outdiffusion from a dopant source layer (e.g., doped oxide) 116
438/391 Including isolation means formed in trench 177
438/390 Multiple doping steps 69

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8647945 Method of forming substrate contact for semiconductor on insulator (SOI) substrate Feb. 11, 2014
8642423 Polysilicon/metal contact resistance in deep trench Feb. 4, 2014
8563446 Technique to create a buried plate in embedded dynamic random access memory device Oct. 22, 2013
8519484 Semiconductor devices having dual trench, methods of fabricating the same, and electronic system having the same Aug. 27, 2013
8513704 Method for manufacturing a photodiode and corresponding photodiode and electromagnetic radiation detector Aug. 20, 2013
8372710 Vertical transistors Feb. 12, 2013
8350323 Semiconductor device Jan. 8, 2013
8299573 Trench capacitor Oct. 30, 2012
8247303 Semiconductor device and method of manufacturing the same Aug. 21, 2012
8236648 Trench MOS transistor and method of manufacturing the same Aug. 7, 2012
8236710 Technique to create a buried plate in embedded dynamic random access memory device Aug. 7, 2012
8232162 Forming implanted plates for high aspect ratio trenches using staged sacrificial layer removal Jul. 31, 2012
8226836 Mirror and mirror layer for optical modulator and method Jul. 24, 2012
8227847 Ultra high density capacity comprising pillar-shaped capacitors formed on both sides of a substrate Jul. 24, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012
8198169 Deep trench capacitor in a SOI substrate having a laterally protruding buried strap Jun. 12, 2012
8168494 Trench MOS transistor and method of manufacturing the same May. 1, 2012
8143659 Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor Mar. 27, 2012
8129238 Semiconductor devices having dual trench, methods of fabricating the same, and electronic system having the same Mar. 6, 2012
8008160 Method and structure for forming trench DRAM with asymmetric strap Aug. 30, 2011
7932147 Flash memory device and manufacturing method of the same Apr. 26, 2011
7923815 DRAM having deep trench capacitors with lightly doped buried plates Apr. 12, 2011
7919385 Semiconductor device and method of forming the same Apr. 5, 2011
7910486 Method for forming nanotube semiconductor devices Mar. 22, 2011
7883984 Method of manufacturing flash memory device Feb. 8, 2011
7863130 Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit Jan. 4, 2011
7763520 Capacitor device with a layer structure disposed in a meander-shaped manner Jul. 27, 2010
7749856 Method of fabricating storage node with supported structure of stacked capacitor Jul. 6, 2010
7709313 High performance capacitors in planar back gates CMOS May. 4, 2010
7709341 Methods of shaping vertical single crystal silicon walls and resulting structures May. 4, 2010
7682922 Post STI trench capacitor Mar. 23, 2010
7662694 Capacitor having adjustable capacitance, and printed wiring board having the same Feb. 16, 2010
7560356 Fabrication method of trench capacitor Jul. 14, 2009
7553723 Manufacturing method of a memory device Jun. 30, 2009
7550352 MOS transistor having a recessed gate electrode and fabrication method thereof Jun. 23, 2009
7550359 Methods involving silicon-on-insulator trench memory with implanted plate Jun. 23, 2009
7504299 Folded node trench capacitor Mar. 17, 2009
7439151 Method and structure for integrating MIM capacitors within dual damascene processing techniques Oct. 21, 2008
7439150 Method of manufacturing a semiconductor device Oct. 21, 2008
7410891 Method of manufacturing a superjunction device Aug. 12, 2008
7410862 Trench capacitor and method for fabricating the same Aug. 12, 2008
7390713 Method for forming trench memory cell structures for DRAMS Jun. 24, 2008
7326612 Method for fabricating a semiconductor structure Feb. 5, 2008
7294554 Method to eliminate arsenic contamination in trench capacitors Nov. 13, 2007
7223651 Dram memory cell with a trench capacitor and method for production thereof May. 29, 2007
7223669 Structure and method for collar self-aligned to buried plate May. 29, 2007
7199006 Planarization method of manufacturing a superjunction device Apr. 3, 2007
7157328 Selective etching to increase trench surface area Jan. 2, 2007
7153737 Self-aligned, silicided, trench-based, DRAM/EDRAM processes with improved retention Dec. 26, 2006
7148117 Methods for forming shallow trench isolation structures in semiconductor devices Dec. 12, 2006

1 2 3 4

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