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Class Information
Number: 438/388
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > With epitaxial layer formed over the trench
Description: Process for making a trench capacitor including a step of forming an epitaxial semiconductive layer over the trench region.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8673729 finFET eDRAM strap connection structure Mar. 18, 2014
RE44236 Method for manufacturing semiconductor device May. 21, 2013
8444791 Method for manufacturing ceramic capacitor May. 21, 2013
8372710 Vertical transistors Feb. 12, 2013
8304321 Capacitor to be incorporated in wiring substrate, method for manufacturing the capacitor, and wiring substrate Nov. 6, 2012
8269307 Shallow trench isolation structure and method for forming the same Sep. 18, 2012
7947569 Method for producing a semiconductor including a foreign material layer May. 24, 2011
7919385 Semiconductor device and method of forming the same Apr. 5, 2011
7863130 Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit Jan. 4, 2011
7811907 Method for manufacturing semiconductor device and epitaxial growth equipment Oct. 12, 2010
7763542 Semiconductor memory device and method of fabricating the same Jul. 27, 2010
7709313 High performance capacitors in planar back gates CMOS May. 4, 2010
7638828 Embedded capacitor Dec. 29, 2009
7601603 Method for manufacturing semiconductor device Oct. 13, 2009
7560392 Electrical components for microelectronic devices and methods of forming the same Jul. 14, 2009
7488642 Process for forming a buried plate Feb. 10, 2009
7470585 Integrated circuit and fabrication process Dec. 30, 2008
7439135 Self-aligned body contact for a semiconductor-on-insulator trench device and method of fabricating same Oct. 21, 2008
7410864 Trench and a trench capacitor and method for forming the same Aug. 12, 2008
7402487 Process for fabricating a semiconductor device having deep trench structures Jul. 22, 2008
7390717 Trench power MOSFET fabrication using inside/outside spacers Jun. 24, 2008
7344953 Process for vertically patterning substrates in semiconductor process technology by means of inconformal deposition Mar. 18, 2008
7320912 Trench capacitors with buried isolation layer formed by an oxidation process and methods for manufacturing the same Jan. 22, 2008
7223651 Dram memory cell with a trench capacitor and method for production thereof May. 29, 2007
7205193 Semiconductor device and method for fabricating the same Apr. 17, 2007
7157328 Selective etching to increase trench surface area Jan. 2, 2007
7122439 Method of fabricating a bottle trench and a bottle trench capacitor Oct. 17, 2006
7112461 Fabrication process for integrated circuit having photodiode device Sep. 26, 2006
7101768 Self-aligned selective hemispherical grain deposition process and structure for enhanced capacitance trench capacitor Sep. 5, 2006
7094659 Method of forming deep trench capacitors Aug. 22, 2006
7067372 Method for fabricating a memory cell having a trench Jun. 27, 2006
7026248 Method for manufacturing semiconductor device with semiconductor region inserted into trench Apr. 11, 2006
6989561 Trench capacitor structure Jan. 24, 2006
6989311 Method for fabricating a trench contact to a deep trench capacitor having a polysilicon filling Jan. 24, 2006
6955962 Deep trench capacitor having increased surface area Oct. 18, 2005
6953725 Method for fabricating memory device having a deep trench capacitor Oct. 11, 2005
6919255 Semiconductor trench structure Jul. 19, 2005
6900519 Diffused extrinsic base and method for fabrication May. 31, 2005
6887768 Method and structure for composite trench fill May. 3, 2005
6878594 Semiconductor device having an insulation film with reduced water content Apr. 12, 2005
6828192 Semiconductor memory cell and method for fabricating the memory cell Dec. 7, 2004
6825094 Method for increasing capacitance of deep trench capacitors Nov. 30, 2004
6821837 Stack-film trench capacitor and method for manufacturing the same Nov. 23, 2004
6809005 Method to fill deep trench structures with void-free polysilicon or silicon Oct. 26, 2004
6790697 Optical semiconductor device and method of fabricating the same Sep. 14, 2004
6784017 Method of creating a high performance organic semiconductor device Aug. 31, 2004
6727157 Method for forming a shallow trench isolation using air gap Apr. 27, 2004
6713361 Method of manufacturing a bipolar junction transistor including undercutting regions adjacent to the emitter region to enlarge the emitter region Mar. 30, 2004
6677197 High aspect ratio PBL SiN barrier formation Jan. 13, 2004
6653161 Method and apparatus for forming a capacitive structure including single crystal silicon Nov. 25, 2003

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