| |
 |
|
Class Information
Number: 438/387
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6306724 |
Method of forming a trench isolation structure in a stack trench capacitor fabrication process |
Oct. 23, 2001 |
| 6303456 |
Method for making a finger capacitor with tuneable dielectric constant |
Oct. 16, 2001 |
| 6303429 |
Structure of a capacitor section of a dynamic random-access memory |
Oct. 16, 2001 |
| 6284593 |
Method for shallow trench isolated, contacted well, vertical MOSFET DRAM |
Sep. 4, 2001 |
| 6284618 |
Method of making a semiconductor device having a conductor pattern side face provided with a separate conductive sidewall |
Sep. 4, 2001 |
| 6281068 |
Method for buried plate formation in deep trench capacitors |
Aug. 28, 2001 |
| 6281091 |
Container capacitor structure and method of formation thereof |
Aug. 28, 2001 |
| 6268244 |
Method of fabricating capacitors of a memory cell array |
Jul. 31, 2001 |
| 6261894 |
Method for forming dual workfunction high-performance support MOSFETs in EDRAM arrays |
Jul. 17, 2001 |
| 6258192 |
Multi-thickness, multi-layer green sheet processing |
Jul. 10, 2001 |
| 6251722 |
Method of fabricating a trench capacitor |
Jun. 26, 2001 |
| 6245612 |
Method for making the bottom electrode of a capacitor |
Jun. 12, 2001 |
| 6232171 |
Technique of bottle-shaped deep trench formation |
May. 15, 2001 |
| 6232170 |
Method of fabricating trench for SOI merged logic DRAM |
May. 15, 2001 |
| 6225157 |
Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer |
May. 1, 2001 |
| 6218255 |
Method of making a capacitor |
Apr. 17, 2001 |
| 6211033 |
Integrated capacitor bottom electrode for use with conformal dielectric |
Apr. 3, 2001 |
| 6207494 |
Isolation collar nitride liner for DRAM process improvement |
Mar. 27, 2001 |
| 6204115 |
Manufacture of high-density pillar memory cell arrangement |
Mar. 20, 2001 |
| 6190971 |
Formation of 5F2 cell with partially vertical transistor and gate conductor aligned buried strap with raised shallow trench isolation region |
Feb. 20, 2001 |
| 6177289 |
Lateral trench optical detectors |
Jan. 23, 2001 |
| 6165837 |
Semiconductor integrated memory manufacturing method and device |
Dec. 26, 2000 |
| 6165863 |
Aluminum-filled self-aligned trench for stacked capacitor structure and methods |
Dec. 26, 2000 |
| 6159818 |
Method of forming a container capacitor structure |
Dec. 12, 2000 |
| 6153491 |
Overhanging separator for self-defining discontinuous film |
Nov. 28, 2000 |
| 6150211 |
Methods of forming storage capacitors in integrated circuitry memory cells and integrated circuitry |
Nov. 21, 2000 |
| 6140199 |
Method and arrangement of a buried capacitor, and a buried capacitor arranged according to said method |
Oct. 31, 2000 |
| 6140175 |
Self-aligned deep trench DRAM array device |
Oct. 31, 2000 |
| 6136659 |
Production process for a capacitor electrode formed of a platinum metal |
Oct. 24, 2000 |
| 6100132 |
Method of deforming a trench by a thermal treatment |
Aug. 8, 2000 |
| 6093614 |
Memory cell structure and fabrication |
Jul. 25, 2000 |
| 6083790 |
Method for making y-shaped multi-fin stacked capacitors for dynamic random access memory cells |
Jul. 4, 2000 |
| 6080618 |
Controllability of a buried device layer |
Jun. 27, 2000 |
| 6064085 |
DRAM cell with a multiple fin-shaped structure capacitor |
May. 16, 2000 |
| 6048762 |
Method of fabricating embedded dynamic random access memory |
Apr. 11, 2000 |
| 6040214 |
Method for making field effect transistors having sub-lithographic gates with vertical side walls |
Mar. 21, 2000 |
| 6037235 |
Hydrogen anneal for curing defects of silicon/nitride interfaces of semiconductor devices |
Mar. 14, 2000 |
| 6037234 |
Method of fabricating capacitor |
Mar. 14, 2000 |
| 6027969 |
Capacitor structure for a dynamic random access memory cell |
Feb. 22, 2000 |
| 5976928 |
Chemical mechanical polishing of FeRAM capacitors |
Nov. 2, 1999 |
| 5973346 |
Low-profile shallow trench double polysilicon capacitor |
Oct. 26, 1999 |
| 5963814 |
Method of forming recessed container cells by wet etching conductive layer and dissimilar layer formed over conductive layer |
Oct. 5, 1999 |
| 5959325 |
Method for forming cornered images on a substrate and photomask formed thereby |
Sep. 28, 1999 |
| 5926717 |
Method of making an integrated circuit with oxidizable trench liner |
Jul. 20, 1999 |
| 5920785 |
Dram cell and array to store two-bit data having merged stack capacitor and trench capacitor |
Jul. 6, 1999 |
| 5912044 |
Method for forming thin film capacitors |
Jun. 15, 1999 |
| 5903024 |
Stacked and trench type DRAM capacitor |
May. 11, 1999 |
| 5854119 |
Robust method of forming a cylinder capacitor for DRAM circuits |
Dec. 29, 1998 |
| 5798545 |
Semiconductor storage device |
Aug. 25, 1998 |
| 5792686 |
Method of forming a bit-line and a capacitor structure in an integrated circuit |
Aug. 11, 1998 |
|
|
|
