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Class Information
Number: 438/387
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
7022580 Semiconductor device and method for manufacturing the same Apr. 4, 2006
6977405 Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it Dec. 20, 2005
6972266 Top oxide nitride liner integration scheme for vertical DRAM Dec. 6, 2005
6967136 Method and structure for improved trench processing Nov. 22, 2005
6967138 Process for manufacturing a substrate with embedded capacitor Nov. 22, 2005
6964926 Method of forming geometric deep trench capacitors Nov. 15, 2005
6962845 Method for manufacturing semiconductor capacitor having double dielectric layer therein Nov. 8, 2005
6962847 Method for forming a self-aligned buried strap in a vertical memory cell Nov. 8, 2005
6960503 Method for fabricating a trench capacitor Nov. 1, 2005
6955962 Deep trench capacitor having increased surface area Oct. 18, 2005
6953724 Self-limited metal recess for deep trench metal fill Oct. 11, 2005
6946345 Self-aligned buried strap process using doped HDP oxide Sep. 20, 2005
6946344 Method for forming trench capacitor Sep. 20, 2005
6930372 Storage capacitor of planar display and fabrication method of same Aug. 16, 2005
6927123 Method for forming a self-aligned buried strap in a vertical memory cell Aug. 9, 2005
6927143 Capacitor of an integrated circuit device and method of manufacturing the same Aug. 9, 2005
6924206 Method of manufacturing a semiconductor capacitive element in a semiconductor device Aug. 2, 2005
6919256 Method of manufacturing semiconductor device having MIM capacitor Jul. 19, 2005
6900107 Devices containing platinum-iridium films and methods of preparing such films and devices May. 31, 2005
6897108 Process for planarizing array top oxide in vertical MOSFET DRAM arrays May. 24, 2005
6887730 Storage capacitor structure May. 3, 2005
6887768 Method and structure for composite trench fill May. 3, 2005
6884677 Recessed gate electrode MOS transistors having a substantially uniform channel length across a width of the recessed gate electrode and methods of forming same Apr. 26, 2005
6881643 Semiconductor device producing method and semiconductor device Apr. 19, 2005
6878600 Method for fabricating trench capacitors and semiconductor device with trench capacitors Apr. 12, 2005
6878602 Dielectric cure for reducing oxygen vacancies Apr. 12, 2005
6875667 Method for forming capacitor Apr. 5, 2005
6872620 Trench capacitors with reduced polysilicon stress Mar. 29, 2005
6861329 Method of manufacturing capacitor in semiconductor devices Mar. 1, 2005
6861330 Structures and methods for enhancing capacitors in integrated circuits Mar. 1, 2005
6849467 MOCVD of TiO2 thin film for use as FeRAM H2 passivation layer Feb. 1, 2005
6841443 Method for fabricating a deep trench capacitor for dynamic memory cells Jan. 11, 2005
6838352 Damascene trench capacitor for mixed-signal/RF IC applications Jan. 4, 2005
6838340 Method of manufacturing semiconductor device having MIM capacitor element Jan. 4, 2005
6838338 Integrated capacitor bottom electrode for use with conformal dielectric Jan. 4, 2005
6838333 Semiconductor memory device and method of producing the same Jan. 4, 2005
6838331 Method and system for dynamically operating memory in a power-saving error correction mode Jan. 4, 2005
6830968 Simplified top oxide late process Dec. 14, 2004
6828188 Semiconductor device with high- and low-density regions of transistor elements on single semiconductor substrate, and method of manufacturing such semiconductor device Dec. 7, 2004
6828191 Trench capacitor with an insulation collar and method for producing a trench capacitor Dec. 7, 2004
6825091 Semiconductor memory device and method of manufacturing same Nov. 30, 2004
6825093 Process window enhancement for deep trench spacer conservation Nov. 30, 2004
6825129 Method for manufacturing memory device Nov. 30, 2004
6825081 Cell nitride nucleation on insulative layers and reduced corner leakage of container capacitors Nov. 30, 2004
6821837 Stack-film trench capacitor and method for manufacturing the same Nov. 23, 2004
6821861 Method for fabricating an electrode arrangement for charge storage Nov. 23, 2004
6818501 Method of making a self-aligned recessed container cell capacitor Nov. 16, 2004
6815307 Method for fabricating a deep trench capacitor Nov. 9, 2004
6812109 Integrated decoupling capacitors Nov. 2, 2004
6812110 Methods of forming capacitor constructions, and methods of forming constructions comprising dielectric materials Nov. 2, 2004

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