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Class Information
Number: 438/387
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6897108 |
Process for planarizing array top oxide in vertical MOSFET DRAM arrays |
May. 24, 2005 |
| 6887768 |
Method and structure for composite trench fill |
May. 3, 2005 |
| 6887730 |
Storage capacitor structure |
May. 3, 2005 |
| 6884677 |
Recessed gate electrode MOS transistors having a substantially uniform channel length across a width of the recessed gate electrode and methods of forming same |
Apr. 26, 2005 |
| 6881643 |
Semiconductor device producing method and semiconductor device |
Apr. 19, 2005 |
| 6878602 |
Dielectric cure for reducing oxygen vacancies |
Apr. 12, 2005 |
| 6878600 |
Method for fabricating trench capacitors and semiconductor device with trench capacitors |
Apr. 12, 2005 |
| 6875667 |
Method for forming capacitor |
Apr. 5, 2005 |
| 6872620 |
Trench capacitors with reduced polysilicon stress |
Mar. 29, 2005 |
| 6861330 |
Structures and methods for enhancing capacitors in integrated circuits |
Mar. 1, 2005 |
| 6861329 |
Method of manufacturing capacitor in semiconductor devices |
Mar. 1, 2005 |
| 6849467 |
MOCVD of TiO2 thin film for use as FeRAM H2 passivation layer |
Feb. 1, 2005 |
| 6841443 |
Method for fabricating a deep trench capacitor for dynamic memory cells |
Jan. 11, 2005 |
| 6838338 |
Integrated capacitor bottom electrode for use with conformal dielectric |
Jan. 4, 2005 |
| 6838352 |
Damascene trench capacitor for mixed-signal/RF IC applications |
Jan. 4, 2005 |
| 6838340 |
Method of manufacturing semiconductor device having MIM capacitor element |
Jan. 4, 2005 |
| 6838333 |
Semiconductor memory device and method of producing the same |
Jan. 4, 2005 |
| 6838331 |
Method and system for dynamically operating memory in a power-saving error correction mode |
Jan. 4, 2005 |
| 6830968 |
Simplified top oxide late process |
Dec. 14, 2004 |
| 6828191 |
Trench capacitor with an insulation collar and method for producing a trench capacitor |
Dec. 7, 2004 |
| 6828188 |
Semiconductor device with high- and low-density regions of transistor elements on single semiconductor substrate, and method of manufacturing such semiconductor device |
Dec. 7, 2004 |
| 6825093 |
Process window enhancement for deep trench spacer conservation |
Nov. 30, 2004 |
| 6825081 |
Cell nitride nucleation on insulative layers and reduced corner leakage of container capacitors |
Nov. 30, 2004 |
| 6825091 |
Semiconductor memory device and method of manufacturing same |
Nov. 30, 2004 |
| 6825129 |
Method for manufacturing memory device |
Nov. 30, 2004 |
| 6821861 |
Method for fabricating an electrode arrangement for charge storage |
Nov. 23, 2004 |
| 6821837 |
Stack-film trench capacitor and method for manufacturing the same |
Nov. 23, 2004 |
| 6818501 |
Method of making a self-aligned recessed container cell capacitor |
Nov. 16, 2004 |
| 6815307 |
Method for fabricating a deep trench capacitor |
Nov. 9, 2004 |
| 6812110 |
Methods of forming capacitor constructions, and methods of forming constructions comprising dielectric materials |
Nov. 2, 2004 |
| 6812109 |
Integrated decoupling capacitors |
Nov. 2, 2004 |
| 6808992 |
Method and system for tailoring core and periphery cells in a nonvolatile memory |
Oct. 26, 2004 |
| 6809001 |
Semiconductor device and method for producing a semiconductor device |
Oct. 26, 2004 |
| 6800889 |
Semiconductor device and fabrication method thereof |
Oct. 5, 2004 |
| 6800536 |
Semiconductor device having an insulated gate and a fabrication process thereof |
Oct. 5, 2004 |
| 6790724 |
Low leakage one transistor static random access memory |
Sep. 14, 2004 |
| 6787428 |
Aluminum-filled self-aligned trench for stacked capacitor structure and methods |
Sep. 7, 2004 |
| 6787411 |
Method of manufacturing semiconductor memory device and semiconductor memory device |
Sep. 7, 2004 |
| 6774005 |
Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide |
Aug. 10, 2004 |
| 6767788 |
Semiconductor device having a metal insulator metal capacitor |
Jul. 27, 2004 |
| 6765255 |
Semiconductor device having metal-insulator-metal capacitor and fabrication method thereof |
Jul. 20, 2004 |
| 6762110 |
Method of manufacturing semiconductor device having capacitor |
Jul. 13, 2004 |
| 6759304 |
DRAM memory integration method |
Jul. 6, 2004 |
| 6756282 |
Semiconductor device and method of fabricating the same |
Jun. 29, 2004 |
| 6753566 |
Semiconductor device with an oxygen diffusion barrier layer formed from a composite nitride |
Jun. 22, 2004 |
| 6750098 |
Integrated semiconductor memory and fabrication method |
Jun. 15, 2004 |
| 6750499 |
Self-aligned trench-type dram structure and its contactless dram arrays |
Jun. 15, 2004 |
| 6750112 |
Method of forming a bitline and a bitline contact, and dynamic memory cell including a bitline and bitline made contact according to the method |
Jun. 15, 2004 |
| 6746878 |
Semiconductor device and method of manufacturing the same |
Jun. 8, 2004 |
| 6737316 |
Method of forming a deep trench DRAM cell |
May. 18, 2004 |
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