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Class Information
Number: 438/387
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
7244649 Method of manufacturing a capacitor having improved capacitance and method of manufacturing a semiconductor device including the capacitor Jul. 17, 2007
7229879 Metal-insulator-metal (MIM) capacitor structure formed with dual damascene structure Jun. 12, 2007
7229887 Method to selectively remove one side of a conductive bottom electrode of a phase-change memory cell and structure obtained thereby Jun. 12, 2007
7223651 Dram memory cell with a trench capacitor and method for production thereof May. 29, 2007
7214602 Method of forming a conductive structure May. 8, 2007
7214582 Semiconductor substrate and semiconductor circuit formed therein and fabrication methods May. 8, 2007
7211493 Variable capacitor structure and method of manufacture May. 1, 2007
7208370 Method for fabricating a vertical transistor in a trench, and vertical transistor Apr. 24, 2007
7199005 Methods of forming pluralities of capacitors Apr. 3, 2007
7189613 Method and structure for metal-insulator-metal capacitor based memory device Mar. 13, 2007
7186625 High density MIMCAP with a unit repeatable structure Mar. 6, 2007
7183170 Manufacturing method of semiconductor device Feb. 27, 2007
7183143 Method for forming nitrided tunnel oxide layer Feb. 27, 2007
7176100 Capacitor and its manufacturing method, and semiconductor device Feb. 13, 2007
7169680 Method for fabricating a metal-insulator-metal capacitor Jan. 30, 2007
7161205 Semiconductor memory device with cylindrical storage electrode and method of manufacturing the same Jan. 9, 2007
7157328 Selective etching to increase trench surface area Jan. 2, 2007
7153737 Self-aligned, silicided, trench-based, DRAM/EDRAM processes with improved retention Dec. 26, 2006
7148117 Methods for forming shallow trench isolation structures in semiconductor devices Dec. 12, 2006
7141482 Method of making a memory cell Nov. 28, 2006
7132300 Method for forming ferroelectric film and semiconductor device Nov. 7, 2006
7132324 SOI device with different crystallographic orientations Nov. 7, 2006
7129535 Capacitor constructions Oct. 31, 2006
7129133 Method and structure of memory element plug with conductive Ta removed from sidewall at region of memory element film Oct. 31, 2006
7129131 Method for fabricating capacitor of semiconductor device Oct. 31, 2006
7122439 Method of fabricating a bottle trench and a bottle trench capacitor Oct. 17, 2006
7122437 Deep trench capacitor with buried plate electrode and isolation collar Oct. 17, 2006
7123465 Decoupling capacitor for an integrated circuit and method of manufacturing thereof Oct. 17, 2006
7118985 Method of forming a metal-insulator-metal capacitor in an interconnect cavity Oct. 10, 2006
7118984 Method for fabricating semiconductor component Oct. 10, 2006
7112506 Method for forming capacitor of semiconductor device Sep. 26, 2006
7112504 Method of forming metal-insulator-metal (MIM) capacitors at copper process Sep. 26, 2006
7105065 Metal layer forming methods and capacitor electrode forming methods Sep. 12, 2006
7098102 Shallow trench isolation structure and dynamic random access memory, and fabricating methods thereof Aug. 29, 2006
7094658 3-stage method for forming deep trench structure and deep trench capacitor Aug. 22, 2006
7084027 Method for producing an integrated circuit Aug. 1, 2006
7078308 Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate Jul. 18, 2006
7078311 Substrate-embedded capacitor, production method thereof, and circuit board Jul. 18, 2006
7074668 Capacitor of semiconductor device and method for forming the same Jul. 11, 2006
7071054 Methods of fabricating MIM capacitors in semiconductor devices Jul. 4, 2006
7067385 Support for vertically oriented capacitors during the formation of a semiconductor device Jun. 27, 2006
7064029 Semiconductor memory device and method of producing the same Jun. 20, 2006
7056787 Method of manufacturing semiconductor device Jun. 6, 2006
7057285 Aluminum interconnects with metal silicide diffusion barriers Jun. 6, 2006
7056802 Method for fabricating a trench capacitor with an insulation collar which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory ce Jun. 6, 2006
7056788 Method for fabricating a semiconductor device Jun. 6, 2006
7041568 Method for the production of a self-adjusted structure on a semiconductor wafer May. 9, 2006
7037772 Method of manufacturing an integrated circuit including capacitor with high permittivity capacitor dielectric May. 2, 2006
7022579 Method for filling via with metal Apr. 4, 2006
7022565 Method of fabricating a trench capacitor of a mixed mode integrated circuit Apr. 4, 2006

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