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Class Information
Number: 438/387
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
7608881 Thin-film device and method of manufacturing same Oct. 27, 2009
7595250 Semiconductor device and method of manufacturing the same Sep. 29, 2009
7582525 Method for fabricating capacitor of semiconductor memory device using amorphous carbon Sep. 1, 2009
7575971 Semiconductor device having a capacitor with a stepped cylindrical structure and method of manufacturing the same Aug. 18, 2009
7572695 Hafnium titanium oxide films Aug. 11, 2009
7572710 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects Aug. 11, 2009
7566614 Capacitor of semiconductor device and method of fabricating the same Jul. 28, 2009
7563670 Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by same Jul. 21, 2009
7560334 Method and system for incorporating high voltage devices in an EEPROM Jul. 14, 2009
7560799 Spacer patterned, high dielectric constant capacitor Jul. 14, 2009
7557012 Method for forming surface strap Jul. 7, 2009
7531419 Semiconductor device and a method of manufacturing the same May. 12, 2009
7524724 Method of forming titanium nitride layer and method of fabricating capacitor using the same Apr. 28, 2009
7521359 Interconnect structure encased with high and low k interlevel dielectrics Apr. 21, 2009
7504299 Folded node trench capacitor Mar. 17, 2009
7491619 Methods of fabricating semiconductor devices Feb. 17, 2009
7488665 Structurally-stabilized capacitors and method of making of same Feb. 10, 2009
7482239 Methods of forming integrated circuitry Jan. 27, 2009
7482240 Method for manufacturing semiconductor device Jan. 27, 2009
7468108 Metal layer forming methods and capacitor electrode forming methods Dec. 23, 2008
7459361 Semiconductor device with ferroelectric capacitor and fabrication method thereof Dec. 2, 2008
7445987 Offset vertical device Nov. 4, 2008
7439150 Method of manufacturing a semiconductor device Oct. 21, 2008
7439151 Method and structure for integrating MIM capacitors within dual damascene processing techniques Oct. 21, 2008
7416953 Vertical MIM capacitors and method of fabricating the same Aug. 26, 2008
7416952 Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer Aug. 26, 2008
7410864 Trench and a trench capacitor and method for forming the same Aug. 12, 2008
7410863 Methods of forming and using memory cell structures Aug. 12, 2008
7404829 Electrode-separator combination for improved assembly of layered electrolytic capacitors Jul. 29, 2008
7393741 Methods of forming pluralities of capacitors Jul. 1, 2008
7382012 Reducing parasitic capacitance of MIM capacitor in integrated circuits by reducing effective dielectric constant of dielectric layer Jun. 3, 2008
7381613 Self-aligned MIM capacitor process for embedded DRAM Jun. 3, 2008
7364965 Semiconductor device and method of fabrication Apr. 29, 2008
7364979 Capcitor with single crystal tantalum oxide layer and method for fabricating the same Apr. 29, 2008
7361549 Method for fabricating memory cells for a memory device Apr. 22, 2008
7354822 Method of forming a MOSFET with dual work function materials Apr. 8, 2008
7348234 Methods of forming capacitor constructions Mar. 25, 2008
7338878 Method for forming capacitor in semiconductor device Mar. 4, 2008
7332401 Method of fabricating an electrode structure for use in an integrated circuit Feb. 19, 2008
7332390 Semiconductor memory device and fabrication thereof Feb. 19, 2008
7326626 Capacitor and method for manufacturing the same Feb. 5, 2008
7320912 Trench capacitors with buried isolation layer formed by an oxidation process and methods for manufacturing the same Jan. 22, 2008
7312114 Manufacturing method for a trench capacitor having an isolation collar electrically connected with a substrate on a single side via a buried contact for use in a semiconductor memory cell Dec. 25, 2007
7312115 Fabrication method for a semiconductor structure having integrated capacitors Dec. 25, 2007
7307303 Semiconductor device and method for manufacturing same Dec. 11, 2007
7306988 Memory cell and method of making the memory cell Dec. 11, 2007
7297591 Method for manufacturing capacitor of semiconductor device Nov. 20, 2007
7294544 Method of making a metal-insulator-metal capacitor in the CMOS process Nov. 13, 2007
7279380 Method of forming a chalcogenide memory cell having an ultrasmall cross-sectional area and a chalcogenide memory cell produced by the method Oct. 9, 2007
7268028 Well isolation trenches (WIT) for CMOS devices Sep. 11, 2007

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