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Class Information
Number: 438/387
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8691656 Methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM Apr. 8, 2014
8664075 High capacitance trench capacitor Mar. 4, 2014
8652926 Methods of forming capacitors Feb. 18, 2014
8627258 Adjusting capacitance of capacitors without affecting die area Jan. 7, 2014
8627259 Capacitance modification without affecting die area Jan. 7, 2014
8617980 Semiconductor device including capacitor Dec. 31, 2013
8609504 3D via capacitor with a floating conductive plate for improved reliability Dec. 17, 2013
8586444 Creating deep trenches on underlying substrate Nov. 19, 2013
8563391 Method for forming MIM capacitor in a copper damascene interconnect Oct. 22, 2013
8563403 Three dimensional integrated circuit integration using alignment via/dielectric bonding first and through via formation last Oct. 22, 2013
8558345 Integrated decoupling capacitor employing conductive through-substrate vias Oct. 15, 2013
8518773 Method of fabricating semiconductor capacitor Aug. 27, 2013
8518791 Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) with simultaneous formation of sidewall ferroelectric capacitors Aug. 27, 2013
8518792 Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) having a ferroelectric capacitor aligned with a three dimensional transistor structure Aug. 27, 2013
8502294 Semiconductor process and semiconductor structure for memory array with buried digit lines (BDL) Aug. 6, 2013
8497182 Sidewall thin film electrode with self-aligned top electrode and programmable resistance memory Jul. 30, 2013
8492816 Deep trench decoupling capacitor Jul. 23, 2013
8486800 Trench capacitor and method for producing the same Jul. 16, 2013
8470668 Method for forming pillar type capacitor of semiconductor device Jun. 25, 2013
8445367 Methods of manufacturing semiconductor devices May. 21, 2013
8405135 3D via capacitor with a floating conductive plate for improved reliability Mar. 26, 2013
8372710 Vertical transistors Feb. 12, 2013
8361861 Semiconductor device and method of manufacturing the same Jan. 29, 2013
8343844 Method for manufacturing capacitor of semiconductor device and capacitor of semiconductor device manufactured thereby Jan. 1, 2013
8329551 Semiconductor device substrate with embedded stress region, and related fabrication methods Dec. 11, 2012
8318577 Method of making a semiconductor device as a capacitor Nov. 27, 2012
8304829 Trench-based power semiconductor devices with increased breakdown voltage characteristics Nov. 6, 2012
8288240 Method of making an MIM capacitor and MIM capacitor structure formed thereby Oct. 16, 2012
8288241 Semiconductor device, method of manufacturing the same and adsorption site blocking atomic layer deposition method Oct. 16, 2012
8283197 Method for fabricating pixel structure Oct. 9, 2012
8263457 Methods of forming a plurality of capacitors Sep. 11, 2012
8255858 Method for adjusting capacitance of capacitors without affecting die area Aug. 28, 2012
8247304 Method of manufacturing semiconductor device having capacitor under bit line structure Aug. 21, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8208241 Crystallographically orientated tantalum pentoxide and methods of making same Jun. 26, 2012
8198126 Method for producing solid electrolytic capacitor Jun. 12, 2012
8187947 Capacitor structure in trench structures of semiconductor devices and semiconductor devices comprising capacitor structures of this type and methods for fabricating the same May. 29, 2012
8178405 Resistor random access memory cell device May. 15, 2012
8143135 Embedded series deep trench capacitors and methods of manufacture Mar. 27, 2012
8129240 Methods of forming a plurality of capacitors Mar. 6, 2012
8124545 Methods of etching oxide, reducing roughness, and forming capacitor constructions Feb. 28, 2012
8124476 Semiconductor device and method of manufacturing the same Feb. 28, 2012
8124471 Method of post-mold grinding a semiconductor package Feb. 28, 2012
8105913 Method of fabricating a capacitor of a semiconductor device Jan. 31, 2012
8088668 Method for manufacturing capacitor lower electrodes of semiconductor memory Jan. 3, 2012
8049263 Semiconductor device including metal-insulator-metal capacitor and method of manufacturing same Nov. 1, 2011
8048756 Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing Nov. 1, 2011
8044467 Semiconductor device and method of fabricating the same Oct. 25, 2011
8030168 Methods of forming DRAM memory cells Oct. 4, 2011
8008161 Capacitor assemblies Aug. 30, 2011

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