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Class Information
Number: 438/387
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615460 |
Hard mask technique in forming a plug |
Nov. 10, 2009 |
| 7608881 |
Thin-film device and method of manufacturing same |
Oct. 27, 2009 |
| 7595250 |
Semiconductor device and method of manufacturing the same |
Sep. 29, 2009 |
| 7582525 |
Method for fabricating capacitor of semiconductor memory device using amorphous carbon |
Sep. 1, 2009 |
| 7575971 |
Semiconductor device having a capacitor with a stepped cylindrical structure and method of manufacturing the same |
Aug. 18, 2009 |
| 7572695 |
Hafnium titanium oxide films |
Aug. 11, 2009 |
| 7572710 |
Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects |
Aug. 11, 2009 |
| 7566614 |
Capacitor of semiconductor device and method of fabricating the same |
Jul. 28, 2009 |
| 7563670 |
Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by same |
Jul. 21, 2009 |
| 7560334 |
Method and system for incorporating high voltage devices in an EEPROM |
Jul. 14, 2009 |
| 7560799 |
Spacer patterned, high dielectric constant capacitor |
Jul. 14, 2009 |
| 7557012 |
Method for forming surface strap |
Jul. 7, 2009 |
| 7531419 |
Semiconductor device and a method of manufacturing the same |
May. 12, 2009 |
| 7524724 |
Method of forming titanium nitride layer and method of fabricating capacitor using the same |
Apr. 28, 2009 |
| 7521359 |
Interconnect structure encased with high and low k interlevel dielectrics |
Apr. 21, 2009 |
| 7504299 |
Folded node trench capacitor |
Mar. 17, 2009 |
| 7491619 |
Methods of fabricating semiconductor devices |
Feb. 17, 2009 |
| 7488665 |
Structurally-stabilized capacitors and method of making of same |
Feb. 10, 2009 |
| 7482239 |
Methods of forming integrated circuitry |
Jan. 27, 2009 |
| 7482240 |
Method for manufacturing semiconductor device |
Jan. 27, 2009 |
| 7468108 |
Metal layer forming methods and capacitor electrode forming methods |
Dec. 23, 2008 |
| 7459361 |
Semiconductor device with ferroelectric capacitor and fabrication method thereof |
Dec. 2, 2008 |
| 7445987 |
Offset vertical device |
Nov. 4, 2008 |
| 7439150 |
Method of manufacturing a semiconductor device |
Oct. 21, 2008 |
| 7439151 |
Method and structure for integrating MIM capacitors within dual damascene processing techniques |
Oct. 21, 2008 |
| 7416952 |
Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer |
Aug. 26, 2008 |
| 7416953 |
Vertical MIM capacitors and method of fabricating the same |
Aug. 26, 2008 |
| 7410863 |
Methods of forming and using memory cell structures |
Aug. 12, 2008 |
| 7410864 |
Trench and a trench capacitor and method for forming the same |
Aug. 12, 2008 |
| 7404829 |
Electrode-separator combination for improved assembly of layered electrolytic capacitors |
Jul. 29, 2008 |
| 7393741 |
Methods of forming pluralities of capacitors |
Jul. 1, 2008 |
| 7381613 |
Self-aligned MIM capacitor process for embedded DRAM |
Jun. 3, 2008 |
| 7382012 |
Reducing parasitic capacitance of MIM capacitor in integrated circuits by reducing effective dielectric constant of dielectric layer |
Jun. 3, 2008 |
| 7364965 |
Semiconductor device and method of fabrication |
Apr. 29, 2008 |
| 7364979 |
Capcitor with single crystal tantalum oxide layer and method for fabricating the same |
Apr. 29, 2008 |
| 7361549 |
Method for fabricating memory cells for a memory device |
Apr. 22, 2008 |
| 7354822 |
Method of forming a MOSFET with dual work function materials |
Apr. 8, 2008 |
| 7348234 |
Methods of forming capacitor constructions |
Mar. 25, 2008 |
| 7338878 |
Method for forming capacitor in semiconductor device |
Mar. 4, 2008 |
| 7332390 |
Semiconductor memory device and fabrication thereof |
Feb. 19, 2008 |
| 7332401 |
Method of fabricating an electrode structure for use in an integrated circuit |
Feb. 19, 2008 |
| 7326626 |
Capacitor and method for manufacturing the same |
Feb. 5, 2008 |
| 7320912 |
Trench capacitors with buried isolation layer formed by an oxidation process and methods for manufacturing the same |
Jan. 22, 2008 |
| 7312115 |
Fabrication method for a semiconductor structure having integrated capacitors |
Dec. 25, 2007 |
| 7312114 |
Manufacturing method for a trench capacitor having an isolation collar electrically connected with a substrate on a single side via a buried contact for use in a semiconductor memory cell |
Dec. 25, 2007 |
| 7306988 |
Memory cell and method of making the memory cell |
Dec. 11, 2007 |
| 7307303 |
Semiconductor device and method for manufacturing same |
Dec. 11, 2007 |
| 7297591 |
Method for manufacturing capacitor of semiconductor device |
Nov. 20, 2007 |
| 7294544 |
Method of making a metal-insulator-metal capacitor in the CMOS process |
Nov. 13, 2007 |
| 7279380 |
Method of forming a chalcogenide memory cell having an ultrasmall cross-sectional area and a chalcogenide memory cell produced by the method |
Oct. 9, 2007 |
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