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Class Information
Number: 438/386
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor
Description: Process for making a capacitor located in a groove in a semiconductive substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/387 Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.) 452
438/389 Including doping of trench surfaces 165
438/388 With epitaxial layer formed over the trench 89

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
7112505 Method of selectively etching HSG layer in deep trench capacitor fabrication Sep. 26, 2006
7112504 Method of forming metal-insulator-metal (MIM) capacitors at copper process Sep. 26, 2006
7112503 Enhanced surface area capacitor fabrication methods Sep. 26, 2006
7109125 Selective fabrication of high capacitance density areas in a low dielectric constant material Sep. 19, 2006
7109097 Process sequence for doped silicon fill of deep trenches Sep. 19, 2006
7105404 Method for fabricating a semiconductor structure Sep. 12, 2006
7105416 Method for controlling the top width of a trench Sep. 12, 2006
7101755 Gate conductor isolation and method for manufacturing same Sep. 5, 2006
7101767 Methods of forming capacitors Sep. 5, 2006
7102204 Integrated SOI fingered decoupling capacitor Sep. 5, 2006
7101768 Self-aligned selective hemispherical grain deposition process and structure for enhanced capacitance trench capacitor Sep. 5, 2006
7098102 Shallow trench isolation structure and dynamic random access memory, and fabricating methods thereof Aug. 29, 2006
7094660 Method of manufacturing trench capacitor utilizing stabilizing member to support adjacent storage electrodes Aug. 22, 2006
7094697 Method for preparing a deep trench and an etching mixture for the same Aug. 22, 2006
7094658 3-stage method for forming deep trench structure and deep trench capacitor Aug. 22, 2006
7094659 Method of forming deep trench capacitors Aug. 22, 2006
7091537 Ferroelectric memory device and method of manufacturing the same Aug. 15, 2006
7087485 Method of fabricating an oxide collar for a trench capacitor Aug. 8, 2006
7084027 Method for producing an integrated circuit Aug. 1, 2006
7081383 Method for fabricating memory cells and memory cell array Jul. 25, 2006
7078289 Method for fabricating a deep trench capacitor of DRAM device Jul. 18, 2006
7078307 Method for manufacturing single-sided buried strap in semiconductor devices Jul. 18, 2006
7074689 Method for fabricating a trench capacitor having an insulation collar, which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory Jul. 11, 2006
7071508 Capacitor constructions, semiconductor constructions, and methods of forming electrical contacts and semiconductor constructions Jul. 4, 2006
7071070 Method of fabricating capacitor Jul. 4, 2006
7071054 Methods of fabricating MIM capacitors in semiconductor devices Jul. 4, 2006
7064365 Ferroelectric capacitors including a seed conductive film Jun. 20, 2006
7060553 Formation of capacitor having a Fin structure Jun. 13, 2006
7056802 Method for fabricating a trench capacitor with an insulation collar which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory ce Jun. 6, 2006
7049203 Semiconductor device having a capacitor and method of fabricating same May. 23, 2006
7049246 Method for selective fabrication of high capacitance density areas in a low dielectric constant material May. 23, 2006
7041567 Isolation structure for trench capacitors and fabrication method thereof May. 9, 2006
7041553 Process for forming a buried plate May. 9, 2006
7041565 Method for fabricating a capacitor in a semiconductor device May. 9, 2006
7033934 Method of production of semiconductor package Apr. 25, 2006
7033876 Trench MIS device having implanted drain-drift region and thick bottom oxide and process for manufacturing the same Apr. 25, 2006
7033886 Partial vertical memory cell and method of fabricating the same Apr. 25, 2006
7033883 Placement method for decoupling capacitors Apr. 25, 2006
7026210 Method for forming a bottle-shaped trench Apr. 11, 2006
7022579 Method for filling via with metal Apr. 4, 2006
7022565 Method of fabricating a trench capacitor of a mixed mode integrated circuit Apr. 4, 2006
7019351 Transistor devices, and methods of forming transistor devices and circuit devices Mar. 28, 2006
7018903 Method of forming semiconductor device with capacitor Mar. 28, 2006
7008837 Method of manufacturing capacitor by performing multi-stepped wet treatment on surface of electrode Mar. 7, 2006
6992368 Production of metal insulator metal (MIM) structures using anodizing process Jan. 31, 2006
6987042 Method of forming a collar using selective SiGe/Amorphous Si Etch Jan. 17, 2006
6984568 Semiconductor memory device having multi-layered storage node contact plug and method for fabricating the same Jan. 10, 2006
6984534 Method and device for detecting whether the alignment of bit line contacts and active areas in DRAM devices is normal Jan. 10, 2006
6982198 Semiconductor device and its manufacturing method Jan. 3, 2006
6979613 Method for fabricating a trench capacitor of DRAM Dec. 27, 2005

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