Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Patents

Resources

Home

Browse by:

Browse by Category: Main > Engineering

Class Information
Number: 438/386
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor
Description: Process for making a capacitor located in a groove in a semiconductive substrate.

Sub-classes under this class:

Class Number	Class Name	Patents
438/387	Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)	432
438/389	Including doping of trench surfaces	160
438/388	With epitaxial layer formed over the trench	86

Patents under this class:

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Patent Number	Title Of Patent	Date Issued
8158502	Method of manufacturing a semiconductor device including a silicon pillar	Apr. 17, 2012
8159015	Method and structure for forming capacitors and memory devices on semiconductor-on-insulator (SOI) substrates	Apr. 17, 2012
8159050	Single crystal silicon structures	Apr. 17, 2012
8154064	Semiconductor constructions	Apr. 10, 2012
8143135	Embedded series deep trench capacitors and methods of manufacture	Mar. 27, 2012
8143659	Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor	Mar. 27, 2012
8133779	Method of fabricating a semiconductor device	Mar. 13, 2012
8129200	Nonvolatile ferroelectric memory device and method for manufacturing the same	Mar. 6, 2012
8125050	Semiconductor device having a mim capacitor and method of manufacturing the same	Feb. 28, 2012
8114733	Semiconductor device for preventing the leaning of storage nodes and method for manufacturing the same	Feb. 14, 2012
8110862	Semiconductor structure including trench capacitor and trench resistor	Feb. 7, 2012
8110476	Memory cell that includes a carbon-based memory element and methods of forming the same	Feb. 7, 2012
8110475	Method for forming a memory device with C-shaped deep trench capacitors	Feb. 7, 2012
8110474	Method of making micromodules including integrated thin film inductors	Feb. 7, 2012
8110464	SOI protection for buried plate implant and DT bottle ETCH	Feb. 7, 2012
8105913	Method of fabricating a capacitor of a semiconductor device	Jan. 31, 2012
8101494	Structure, design structure and method of manufacturing a structure having VIAS and high density capacitors	Jan. 24, 2012
8097521	Electronic device comprising an integrated circuit and a capacitance element	Jan. 17, 2012
8088676	Metal-induced crystallization of amorphous silicon, polycrystalline silicon thin films produced thereby and thin film transistors produced therefrom	Jan. 3, 2012
8088667	Method of fabricating vertical capacitors in through-substrate vias	Jan. 3, 2012
8071439	Method for manufacturing semiconductor device	Dec. 6, 2011
8072024	Nonvolatile semiconductor memory device and method for manufacturing same	Dec. 6, 2011
8058952	MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator	Nov. 15, 2011
8043925	Method of forming capacitor of semiconductor memory device	Oct. 25, 2011
8034681	Method of forming flash memory device having inter-gate plug	Oct. 11, 2011
8026147	Method of fabricating a semiconductor microstructure	Sep. 27, 2011
8021945	Bottle-shaped trench capacitor with enhanced capacitance	Sep. 20, 2011
8021941	Bias-controlled deep trench substrate noise isolation integrated circuit device structures	Sep. 20, 2011
8017491	Method for fabricating capacitor	Sep. 13, 2011
8017985	Concentric or nested container capacitor structure for integrated circuits	Sep. 13, 2011
8008159	Semiconductor device and semiconductor device manufacturing method	Aug. 30, 2011
8008748	Deep trench varactors	Aug. 30, 2011
7998808	Semiconductor device fabrication using spacers	Aug. 16, 2011
7994002	Method and apparatus for trench and via profile modification	Aug. 9, 2011
7981756	Common plate capacitor array connections, and processes of making same	Jul. 19, 2011
7982284	Semiconductor component including an isolation structure and a contact to the substrate	Jul. 19, 2011
7982558	Integrated single-crystal MEMS device	Jul. 19, 2011
7977172	Dynamic random access memory (DRAM) cells and methods for fabricating the same	Jul. 12, 2011
7973388	Semiconductor structures including square cuts in single crystal silicon	Jul. 5, 2011
7960241	Manufacturing method for double-side capacitor of stack DRAM	Jun. 14, 2011
7955945	Weak-link capacitor	Jun. 7, 2011
7943477	Method of patterning noble metals for semiconductor devices by electropolishing	May. 17, 2011
7943474	EDRAM including metal plates	May. 17, 2011
7943473	Minimum cost method for forming high density passive capacitors for replacement of discrete board capacitors using a minimum cost 3D wafer-to-wafer modular integration scheme	May. 17, 2011
7939390	Gap capacitors for monitoring stress in solder balls in flip chip technology	May. 10, 2011
7939415	Method for forming a substrate contact for advanced SOI devices based on a deep trench capacitor configuration	May. 10, 2011
7939872	Multi-dielectric films for semiconductor devices and methods of fabricating multi-dielectric films	May. 10, 2011
7932549	Carbon nanotube conductor for trench capacitors	Apr. 26, 2011
7932147	Flash memory device and manufacturing method of the same	Apr. 26, 2011
7923325	Deep trench device with single sided connecting structure and fabrication method thereof	Apr. 12, 2011