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Class Information
Number: 438/386
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor
Description: Process for making a capacitor located in a groove in a semiconductive substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/387 Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.) 452
438/389 Including doping of trench surfaces 165
438/388 With epitaxial layer formed over the trench 89


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
8436698 MEMS-based tunable filter May. 7, 2013
8431463 Capacitor contact formed concurrently with bond pad metallization Apr. 30, 2013
8426321 Weak-link capacitor Apr. 23, 2013
8409962 Manufacturing method of copper interconnection structure with MIM capacitor Apr. 2, 2013
8405135 3D via capacitor with a floating conductive plate for improved reliability Mar. 26, 2013
8405136 Semiconductor devices including capacitor support pads Mar. 26, 2013
8389373 Methods of manufacturing a hybrid electrical contact Mar. 5, 2013
8372724 Device and manufacturing method thereof Feb. 12, 2013
8361879 Stress-inducing structures, methods, and materials Jan. 29, 2013
8361875 Deep trench capacitor on backside of a semiconductor substrate Jan. 29, 2013
8350311 Semiconductor device Jan. 8, 2013
8343844 Method for manufacturing capacitor of semiconductor device and capacitor of semiconductor device manufactured thereby Jan. 1, 2013
8338871 Field effect transistor with electric field and space-charge control contact Dec. 25, 2012
8318577 Method of making a semiconductor device as a capacitor Nov. 27, 2012
8318576 Decoupling capacitors recessed in shallow trench isolation Nov. 27, 2012
8318575 Compressive polycrystalline silicon film and method of manufacture thereof Nov. 27, 2012
8318574 SOI trench DRAM structure with backside strap Nov. 27, 2012
8304829 Trench-based power semiconductor devices with increased breakdown voltage characteristics Nov. 6, 2012
8298906 Trench decoupling capacitor formed by RIE lag of through silicon via (TSV) etch Oct. 30, 2012
8298907 Structure and method of forming enhanced array device isolation for implanted plate eDRAM Oct. 30, 2012
8299573 Trench capacitor Oct. 30, 2012
8294246 Semiconductor structures including square cuts in single crystal silicon and method of forming same Oct. 23, 2012
8294240 Through silicon via with embedded decoupling capacitor Oct. 23, 2012
8268684 Method and apparatus for trench and via profile modification Sep. 18, 2012
8269265 Trench capacitor for high voltage processes and method of manufacturing the same Sep. 18, 2012
8263474 Reduced defect silicon or silicon germanium deposition in micro-features Sep. 11, 2012
8263876 Conductive substrate structure with conductive channels formed by using a two-sided cut approach and a method for manufacturing the same Sep. 11, 2012
8258040 Semiconductor device and method for manufacturing the same Sep. 4, 2012
8258039 Semiconductor device and manufacturing method thereof Sep. 4, 2012
8247304 Method of manufacturing semiconductor device having capacitor under bit line structure Aug. 21, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8247303 Semiconductor device and method of manufacturing the same Aug. 21, 2012
8241981 Method of fabricating a deep trench (DT) metal-insulator-metal (MIM) capacitor Aug. 14, 2012
8236644 Trench structure and method of forming the trench structure Aug. 7, 2012
8232162 Forming implanted plates for high aspect ratio trenches using staged sacrificial layer removal Jul. 31, 2012
8232163 Lateral epitaxial grown SOI in deep trench structures and methods of manufacture Jul. 31, 2012
8227847 Ultra high density capacity comprising pillar-shaped capacitors formed on both sides of a substrate Jul. 24, 2012
8222103 Semiconductor device with embedded low-K metallization Jul. 17, 2012
8208241 Crystallographically orientated tantalum pentoxide and methods of making same Jun. 26, 2012
8198126 Method for producing solid electrolytic capacitor Jun. 12, 2012
8198169 Deep trench capacitor in a SOI substrate having a laterally protruding buried strap Jun. 12, 2012
8188528 Structure and method to form EDRAM on SOI substrate May. 29, 2012
8187972 Through-substrate vias with polymer fill and method of fabricating same May. 29, 2012
8187947 Capacitor structure in trench structures of semiconductor devices and semiconductor devices comprising capacitor structures of this type and methods for fabricating the same May. 29, 2012
8178405 Resistor random access memory cell device May. 15, 2012
8169074 Semiconductor devices including first and second silicon interconnection regions May. 1, 2012
8168507 Structure and method of forming enhanced array device isolation for implanted plate EDRAM May. 1, 2012
8168496 Single die output power stage using trench-gate low-side and LDMOS high-side MOSFETS, structure and method May. 1, 2012
8158485 Integrated circuit device having openings in a layered structure Apr. 17, 2012
8158502 Method of manufacturing a semiconductor device including a silicon pillar Apr. 17, 2012

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