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Class Information
Number: 438/386
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor
Description: Process for making a capacitor located in a groove in a semiconductive substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615443 |
Method of forming finFET device |
Nov. 10, 2009 |
| 7611958 |
Method of making a semiconductor element |
Nov. 3, 2009 |
| 7608881 |
Thin-film device and method of manufacturing same |
Oct. 27, 2009 |
| 7601604 |
Method for fabricating conducting plates for a high-Q MIM capacitor |
Oct. 13, 2009 |
| 7598138 |
Semiconductor device manufacturing method |
Oct. 6, 2009 |
| 7594937 |
Porous anode body for solid electrolytic capacitor, production method thereof and solid electrolytic capacitor |
Sep. 29, 2009 |
| 7592218 |
Methods of forming vertical transistors |
Sep. 22, 2009 |
| 7592272 |
Manufacturing method of semiconductor integrated circuit |
Sep. 22, 2009 |
| 7592233 |
Method for forming a memory device with a recessed gate |
Sep. 22, 2009 |
| 7592216 |
Fabrication process of a semiconductor device having a capacitor |
Sep. 22, 2009 |
| 7585723 |
Method for fabricating capacitor |
Sep. 8, 2009 |
| 7585741 |
Methods of forming capacitors |
Sep. 8, 2009 |
| 7582525 |
Method for fabricating capacitor of semiconductor memory device using amorphous carbon |
Sep. 1, 2009 |
| 7582519 |
Method of forming a trench structure having one or more diodes embedded therein adjacent a PN junction |
Sep. 1, 2009 |
| 7575971 |
Semiconductor device having a capacitor with a stepped cylindrical structure and method of manufacturing the same |
Aug. 18, 2009 |
| 7572710 |
Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects |
Aug. 11, 2009 |
| 7569451 |
Method of fabricating an isolation shallow trench |
Aug. 4, 2009 |
| 7566614 |
Capacitor of semiconductor device and method of fabricating the same |
Jul. 28, 2009 |
| 7566628 |
Process for making a resistive memory cell with separately patterned electrodes |
Jul. 28, 2009 |
| 7563669 |
Integrated circuit with a trench capacitor structure and method of manufacture |
Jul. 21, 2009 |
| 7563671 |
Method for forming trench capacitor and memory cell |
Jul. 21, 2009 |
| 7563686 |
Method for forming a memory device with a recessed gate |
Jul. 21, 2009 |
| 7560336 |
DRAM layout with vertical FETs and method of formation |
Jul. 14, 2009 |
| 7560356 |
Fabrication method of trench capacitor |
Jul. 14, 2009 |
| 7553737 |
Method for fabricating recessed-gate MOS transistor device |
Jun. 30, 2009 |
| 7553736 |
Increasing dielectric constant in local regions for the formation of capacitors |
Jun. 30, 2009 |
| 7550345 |
Methods of forming hafnium-containing materials |
Jun. 23, 2009 |
| 7547607 |
Methods of fabricating integrated circuit capacitors using a dry etching process |
Jun. 16, 2009 |
| 7547937 |
Semiconductor memory device and method for manufacturing the same |
Jun. 16, 2009 |
| 7534692 |
Process for producing an integrated circuit comprising a capacitor |
May. 19, 2009 |
| 7528035 |
Vertical trench memory cell with insulating ring |
May. 5, 2009 |
| 7510930 |
Method for fabricating recessed gate MOS transistor device |
Mar. 31, 2009 |
| 7494890 |
Trench capacitor and method for manufacturing the same |
Feb. 24, 2009 |
| 7494891 |
Trench capacitor with void-free conductor fill |
Feb. 24, 2009 |
| 7488642 |
Process for forming a buried plate |
Feb. 10, 2009 |
| 7488664 |
Capacitor structure for two-transistor DRAM memory cell and method of forming same |
Feb. 10, 2009 |
| 7485909 |
Semiconductor device and method of manufacturing the same |
Feb. 3, 2009 |
| 7482240 |
Method for manufacturing semiconductor device |
Jan. 27, 2009 |
| 7482239 |
Methods of forming integrated circuitry |
Jan. 27, 2009 |
| 7482220 |
Semiconductor device having deep trench charge compensation regions and method |
Jan. 27, 2009 |
| 7470585 |
Integrated circuit and fabrication process |
Dec. 30, 2008 |
| 7468306 |
Method of manufacturing a semiconductor device |
Dec. 23, 2008 |
| 7465640 |
Dynamic random access memory cell and method for fabricating the same |
Dec. 16, 2008 |
| 7456067 |
Method with high gapfill capability for semiconductor devices |
Nov. 25, 2008 |
| 7452782 |
Image TFT array of a direct X-ray image sensor and method of fabricating the same |
Nov. 18, 2008 |
| 7449382 |
Memory device and fabrication method thereof |
Nov. 11, 2008 |
| 7445987 |
Offset vertical device |
Nov. 4, 2008 |
| 7445988 |
Trench memory |
Nov. 4, 2008 |
| 7439126 |
Method for manufacturing semiconductor memory |
Oct. 21, 2008 |
| 7439128 |
Method of creating deep trench capacitor using a P+ metal electrode |
Oct. 21, 2008 |
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