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Class Information
Number: 438/386
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor
Description: Process for making a capacitor located in a groove in a semiconductive substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/387 Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.) 452
438/389 Including doping of trench surfaces 165
438/388 With epitaxial layer formed over the trench 89


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
8703552 Method and structure for forming capacitors and memory devices on semiconductor-on-insulator (SOI) substrates Apr. 22, 2014
8685828 Method of forming a capacitor Apr. 1, 2014
8679937 Method for fabricating a capacitor and capacitor structure thereof Mar. 25, 2014
8679938 Shallow trench isolation for device including deep trench capacitors Mar. 25, 2014
8679939 Manufacturable high-k DRAM MIM capacitor structure Mar. 25, 2014
8673729 finFET eDRAM strap connection structure Mar. 18, 2014
8669135 System and method for fabricating a 3D image sensor structure Mar. 11, 2014
8664075 High capacitance trench capacitor Mar. 4, 2014
8658512 Method for forming MEMS variable capacitors Feb. 25, 2014
8653596 Integrated circuit including DRAM and SRAM/logic Feb. 18, 2014
8652924 Methods of fabricating a storage node in a semiconductor device and methods of fabricating a capacitor using the same Feb. 18, 2014
8652926 Methods of forming capacitors Feb. 18, 2014
8642423 Polysilicon/metal contact resistance in deep trench Feb. 4, 2014
8642440 Capacitor with deep trench ion implantation Feb. 4, 2014
8643097 Trench-gate metal oxide semiconductor device and fabricating method thereof Feb. 4, 2014
8637377 Capacitors and methods with praseodymium oxide insulators Jan. 28, 2014
8637378 Semiconductor component and methods for producing a semiconductor component Jan. 28, 2014
8637355 Actuating transistor including single layer reentrant profile Jan. 28, 2014
8629017 Structure and method to form EDRAM on SOI substrate Jan. 14, 2014
8618603 Nonvolatile semiconductor memory device and method for manufacturing same Dec. 31, 2013
8609504 3D via capacitor with a floating conductive plate for improved reliability Dec. 17, 2013
8587048 Capacitor for semiconductor device and manufacturing method of capacitor for semiconductor device Nov. 19, 2013
8587047 Capacitor formation for a pumping circuit Nov. 19, 2013
8569816 Isolated capacitors within shallow trench isolation Oct. 29, 2013
8557673 Manufacturing method for high capacitance capacitor structure Oct. 15, 2013
8558345 Integrated decoupling capacitor employing conductive through-substrate vias Oct. 15, 2013
8552515 Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) device structure employing reduced processing steps Oct. 8, 2013
8546243 Dual contact trench resistor and capacitor in shallow trench isolation (STI) and methods of manufacture Oct. 1, 2013
8546233 Method for producing an integrated circuit arrangement with capacitor in an interconnect layer Oct. 1, 2013
8536015 Memory cell that includes a carbon-based memory element and methods of forming the same Sep. 17, 2013
8536678 Through substrate via with embedded decoupling capacitor Sep. 17, 2013
8519463 Semiconductor constructions containing tubular capacitor storage nodes, and retaining structures along portions of the tubular capacitor storage nodes Aug. 27, 2013
8502293 Capacitor with recessed plate portion for dynamic random access memory (DRAM) and method to form the same Aug. 6, 2013
8501575 Method of forming multilayer capacitors in a printed circuit substrate Aug. 6, 2013
8501561 Method for producing a semiconductor component arrangement comprising a trench transistor Aug. 6, 2013
8492816 Deep trench decoupling capacitor Jul. 23, 2013
8492817 Highly scalable trench capacitor Jul. 23, 2013
8493709 Method of forming capacitor structure Jul. 23, 2013
8486800 Trench capacitor and method for producing the same Jul. 16, 2013
8482009 Silicon-on-insulator substrate with built-in substrate junction Jul. 9, 2013
8476688 Semiconductor device and method for manufacturing the same,which prevents leaning of a storage node when forming a capacitor having a plurality of storage nodes of "L" or "+" shape support pat Jul. 2, 2013
8471363 Semiconductor device and method of manufacturing the same Jun. 25, 2013
8471322 Semiconductor device and manufacturing method thereof Jun. 25, 2013
8470668 Method for forming pillar type capacitor of semiconductor device Jun. 25, 2013
8466046 Method for fabricating a porous semiconductor body region Jun. 18, 2013
8455327 Trench capacitor with spacer-less fabrication process Jun. 4, 2013
8450214 Methods of etching single crystal silicon May. 28, 2013
8445323 Semiconductor package with semiconductor core structure and method of forming same May. 21, 2013
8445355 Metal-insulator-metal capacitors with high capacitance density May. 21, 2013
8441097 Methods to form memory devices having a capacitor with a recessed electrode May. 14, 2013

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