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Class Information
Number: 438/384
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Resistor > Deposited thin film resistor
Description: Process wherein the resistor is formed by the deposition of resistive material upon the semiconductor substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/385 Altering resistivity of conductor 332

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
5166088 Method of manufacturing semiconductor device contact vias in layers comprising silicon nitride and glass Nov. 24, 1992
5164338 Method of manufacturing a polycrystalline semiconductor resistance layer of silicon on a silicon body and silicon pressure sensor having such a resistance layer Nov. 17, 1992
5151376 Method of making polycrystalline silicon resistors for integrated circuits Sep. 29, 1992
5141597 Thin polysilicon resistors Aug. 25, 1992
5120572 Method of fabricating electrical components in high density substrates Jun. 9, 1992
5108945 Process for fabricating polysilicon resistors and interconnects Apr. 28, 1992
5093700 Single gate structure with oxide layer therein Mar. 3, 1992
5084420 Resistor with side wall contact Jan. 28, 1992
5069748 Method for forming refractory resistors with etch stop for superconductor integrated circuits Dec. 3, 1991
5068201 Method for forming a high valued resistive load element and low resistance interconnect for integrated circuits Nov. 26, 1991
5063655 Method to integrate drive/control devices and ink jet on demand devices in a single printhead chip Nov. 12, 1991
5043295 Method of forming an IC chip with self-aligned thin film resistors Aug. 27, 1991
5041191 Diffusion barrier for thin film hybrid circuits Aug. 20, 1991
5030588 Method of making semiconductor device with film resistor Jul. 9, 1991
5024972 Deposition of a conductive layer for contacts Jun. 18, 1991
5024966 Method of forming a silicon-based semiconductor optical device mount Jun. 18, 1991
5013678 Method of making an integrated circuit comprising load resistors arranged on the field oxide zones which separate the active transistor zones May. 7, 1991
4975386 Process enhancement using molybdenum plugs in fabricating integrated circuits Dec. 4, 1990
4968645 Method for manufacturing MOS/CMOS monolithic integrated circuits including silicide and polysilicon patterning Nov. 6, 1990
4950620 Process for making integrated circuit with doped silicon dioxide load elements Aug. 21, 1990
4950619 Method for the fabrication of a high resistance load resistor utilizing side wall polysilicon spacers Aug. 21, 1990
4948747 Method of making an integrated circuit resistor Aug. 14, 1990
4891332 Method of manufacturing a semiconductor device comprising a circuit element formed of carbon doped polycrystalline silicon Jan. 2, 1990
4876176 Method for fabricating quasi-monolithic integrated circuits Oct. 24, 1989
4859633 Process for fabricating monolithic microwave diodes Aug. 22, 1989
4843027 Method of fabricating a high value semiconductor resistor Jun. 27, 1989
4828629 Process of fabricating silicon oxide and gettering films on polycrystalline silicon resistance element May. 9, 1989
4796081 Low resistance metal contact for silicon devices Jan. 3, 1989
4786612 Plasma enhanced chemical vapor deposited vertical silicon nitride resistor Nov. 22, 1988
4760369 Thin film resistor and method Jul. 26, 1988
4755480 Method of making a silicon nitride resistor using plasma enhanced chemical vapor deposition Jul. 5, 1988
4732873 Method of fabrication of non-linear control elements for a flat electrooptical display screen Mar. 22, 1988
4727045 Plugged poly silicon resistor load for static random access memory cells Feb. 23, 1988
4719477 Integrated thermal ink jet printhead and method of manufacture Jan. 12, 1988
4708747 Dielectric for laser trimming Nov. 24, 1987
4704188 Wet chemical etching of crxsiynz Nov. 3, 1987
4702937 Method for manufacturing a semiconductor device Oct. 27, 1987
4701241 Method of making a resistor Oct. 20, 1987
4693925 Integrated circuit structure having intermediate metal silicide layer Sep. 15, 1987
4690728 Pattern delineation of vertical load resistor Sep. 1, 1987
4682402 Semiconductor device comprising polycrystalline silicon resistor element Jul. 28, 1987
4669180 Method of forming emitter coupled logic bipolar memory cell using polysilicon Schottky diodes for coupling Jun. 2, 1987
4638400 Refractory metal capacitor structures, particularly for analog integrated circuit devices Jan. 20, 1987
T106201 Master image chip organization technique or method Mar. 4, 1986
4475964 Method of manufacturing a semiconductor device Oct. 9, 1984
4464212 Method for making high sheet resistivity resistors Aug. 7, 1984
4455739 Process protection for individual device gates on large area MIS devices Jun. 26, 1984
4446613 Integrated circuit resistor and method of fabrication May. 8, 1984
4445266 MOSFET Fabrication process for reducing overlap capacitance and lowering interconnect impedance May. 1, 1984
4413403 Method of producing semiconductor devices Nov. 8, 1983

1 2 3 4 5 6 7 8 9

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