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Class Information
Number: 438/384
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Resistor > Deposited thin film resistor
Description: Process wherein the resistor is formed by the deposition of resistive material upon the semiconductor substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/385 Altering resistivity of conductor 332

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
6017828 Method for preventing backside polysilicon peeling in a 4T+2R SRAM process Jan. 25, 2000
6010938 Method for making a load resistor on a semiconductor chip Jan. 4, 2000
5994180 Method of making SRAM having part of load resistance layer functions as power supply line Nov. 30, 1999
5989970 Method for fabricating semiconductor device having thin-film resistor Nov. 23, 1999
5981328 Method of forming a high load resistance type static random access memory cell Nov. 9, 1999
5977610 Integrated circuit having resistor formed over multiple tubs of semiconductor material Nov. 2, 1999
5976944 Integrated circuit with thin film resistors and a method for co-patterning thin film resistors with different compositions Nov. 2, 1999
5972759 Method of making an integrated butt contact having a protective spacer Oct. 26, 1999
5970338 Method of producing an EEPROM semiconductor structure Oct. 19, 1999
5970357 Method and structure for manufacturing high-resistance polysilicon loads in a semiconductor process Oct. 19, 1999
5956592 Method of manufacturing a semiconductor device having polysilicon resistors with a specific resistance ratio resistant to manufacturing processes Sep. 21, 1999
5943566 Method of fabricating a static random access memory Aug. 24, 1999
5940712 Method of forming a resistor and integrated circuitry having a resistor construction Aug. 17, 1999
5899724 Method for fabricating a titanium resistor May. 4, 1999
5885862 Poly-load resistor for SRAM cell Mar. 23, 1999
5877059 Method for forming an integrated circuit resistor comprising amorphous silicon Mar. 2, 1999
5872030 Method of improving beta ratio in SRAM and device manufactured thereby Feb. 16, 1999
5851895 Method of making RC element Dec. 22, 1998
5849623 Method of forming thin film resistors on organic surfaces Dec. 15, 1998
5834356 Method of making high resistive structures in salicided process semiconductor devices Nov. 10, 1998
5821150 Method of forming a resistor and integrated circuitry having a resistor construction Oct. 13, 1998
5770495 Method of fabricating semiconductor device including high temperature heat treatment Jun. 23, 1998
5759887 Semiconductor device and a method of manufacturing a semiconductor device Jun. 2, 1998
5744846 SRAM cell employing substantially vertically elongated pull-up resistors and methods of making, and resistor constructions and methods of making Apr. 28, 1998
5728598 Method of manufacturing a SRAM cell having a low stand-by current Mar. 17, 1998
5723384 Method for manufacturing a capacitor in a semiconductor device using selective tungsten nitride thin film Mar. 3, 1998
5710070 Application of titanium nitride and tungsten nitride thin film resistor for thermal ink jet technology Jan. 20, 1998
5705441 Ion implant silicon nitride mask for a silicide free contact region in a self aligned silicide process Jan. 6, 1998
5688699 Microbolometer Nov. 18, 1997
5686338 Process for fabricating high-resistance load resistors using dummy polysilicon in four-transistor SRAM devices Nov. 11, 1997
5683930 SRAM cell employing substantially vertically elongated pull-up resistors and methods of making, and resistor constructions and methods of making Nov. 4, 1997
5683939 Diamond insulator devices and method of fabrication Nov. 4, 1997
5665629 Four transistor SRAM process Sep. 9, 1997
5658808 Method of fabricating polycrystalline silicon thin-film transistor having symmetrical lateral resistors Aug. 19, 1997
5656330 Resistive element having a resistivity which is thermally stable against heat treatment, and method and apparatus for producing same Aug. 12, 1997
5656524 Method of forming a polysilicon resistor using an oxide, nitride stack Aug. 12, 1997
5654244 Process for producing semiconductor strain-sensitive sensor Aug. 5, 1997
5652174 Unified stacked contact process for static random access memory (SRAM) having polysilicon load resistors Jul. 29, 1997
5635418 Method of making a resistor Jun. 3, 1997
5622887 Process for fabricating BiCMOS devices including passive devices Apr. 22, 1997
5618749 Method of forming a semiconductor device having a capacitor and a resistor Apr. 8, 1997
5605859 Method of making insulator structure for polysilicon resistors Feb. 25, 1997
5602052 Method of forming dummy island capacitor Feb. 11, 1997
5597759 Method of fabricating a semiconductor integrated circuit device having a capacitor and a resistor Jan. 28, 1997
5589418 Method of forming a polysilicon buried contact Dec. 31, 1996
5585301 Method for forming high resistance resistors for limiting cathode current in field emission displays Dec. 17, 1996
5585302 Formation of polysilicon resistors in the tungsten strapped source/drain/gate process Dec. 17, 1996
5567644 Method of making a resistor Oct. 22, 1996
5547896 Direct etch for thin film resistor using a hard mask Aug. 20, 1996
5547881 Method of forming a resistor for ESD protection in a self aligned silicide process Aug. 20, 1996

1 2 3 4 5 6 7 8 9

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