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Class Information
Number: 438/384
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Resistor > Deposited thin film resistor
Description: Process wherein the resistor is formed by the deposition of resistive material upon the semiconductor substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/385 Altering resistivity of conductor 332

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
6825092 Semiconductor device having passive elements and method of making same Nov. 30, 2004
6825091 Semiconductor memory device and method of manufacturing same Nov. 30, 2004
6821343 Semiconductor device, manufacturing method therefor, and semiconductor manufacturing apparatus Nov. 23, 2004
6767785 Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry Jul. 27, 2004
6764910 Structure of semiconductor device and method for manufacturing the same Jul. 20, 2004
6759283 Thin film transistor and method of fabricating the same Jul. 6, 2004
6750091 Diode formation method Jun. 15, 2004
6737326 Method of integrating a thin film resistor in a multi-level metal tungsten-plug interconnect May. 18, 2004
6737327 Method for forming an interated resister having aligned body and contact May. 18, 2004
6734076 Method for thin film resistor integration in dual damascene structure May. 11, 2004
6734075 CMOS device having high-density resistance elements May. 11, 2004
6730573 MIM and metal resistor formation at CU beol using only one extra mask May. 4, 2004
6727113 Method for making pyroelectric sensors comprising a thin pyroelectric film requiring an electric polarization Apr. 27, 2004
6709944 Techniques for fabricating a resistor on a flexible base material Mar. 23, 2004
6703666 Thin film resistor device and a method of manufacture therefor Mar. 9, 2004
6690082 High dopant concentration diffused resistor and method of manufacture therefor Feb. 10, 2004
6667217 Method of fabricating a damascene copper inductor structure using a sub-0.18 um CMOS process Dec. 23, 2003
6660620 Method of forming noble metal pattern Dec. 9, 2003
6653713 Thin film resistor with stress compensation Nov. 25, 2003
6649463 Regulating resistor network, semiconductor device including the resistor network, and method for fabricating the device Nov. 18, 2003
6645875 Method of processing metal and method of manufacturing semiconductor device using the metal Nov. 11, 2003
6642604 Semiconductor device with resistor layer having heat radiation path to semiconductor substrate Nov. 4, 2003
6613625 Method of manufacturing a semiconductor device Sep. 2, 2003
6607962 Globally planarized backend compatible thin film resistor contact/interconnect process Aug. 19, 2003
6583019 Perimeter anchored thick film pad Jun. 24, 2003
6566218 Boride-based substrate for growing semiconducting layers thereon and a semiconductor device using the same May. 20, 2003
6548366 Method of two-step annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile Apr. 15, 2003
6534374 Single damascene method for RF IC passive component integration in copper interconnect process Mar. 18, 2003
6532568 Apparatus and method for conditioning polysilicon circuit elements Mar. 11, 2003
6528834 Container capacitor structure and method of formation thereof Mar. 4, 2003
6524925 Method of forming a thin-film resistor in a semiconductor wafer Feb. 25, 2003
6524924 Semiconductor device and process of producing the same Feb. 25, 2003
6500724 Method of making semiconductor device having passive elements including forming capacitor electrode and resistor from same layer of material Dec. 31, 2002
6492672 Semiconductor device Dec. 10, 2002
6492240 Method for forming improved high resistance resistor by treating the surface of polysilicon layer Dec. 10, 2002
6489213 Method for manufacturing semiconductor device containing a silicon-rich layer Dec. 3, 2002
6485999 Wiring arrangements having electrically conductive cross connections and method for producing same Nov. 26, 2002
6479363 Semiconductor integrated circuit and method for testing the same Nov. 12, 2002
6475872 Polysilicon thin film transistor and method of manufacturing the same Nov. 5, 2002
6475873 Method of forming laser trimmable thin-film resistors in a fully planarized integrated circuit technology Nov. 5, 2002
6468872 Method of fabricating a thin film transistor Oct. 22, 2002
6458670 Method of manufacturing a circuit substrate Oct. 1, 2002
6458669 Method of manufacturing an integrated circuit Oct. 1, 2002
6441461 Thin film resistor with stress compensation Aug. 27, 2002
6432766 Method of fabricating a SRAM device Aug. 13, 2002
6426268 Thin film resistor fabrication method Jul. 30, 2002
6423606 Semiconductor processing methods, methods of forming a resistor and methods of forming a diode Jul. 23, 2002
6424339 Touch screen assembly Jul. 23, 2002
6420226 Method of defining a buried stack capacitor structure for a one transistor RAM cell Jul. 16, 2002
6417062 Method of forming ruthenium oxide films Jul. 9, 2002

1 2 3 4 5 6 7 8 9

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