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Class Information
Number: 438/384
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Resistor > Deposited thin film resistor
Description: Process wherein the resistor is formed by the deposition of resistive material upon the semiconductor substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/385 Altering resistivity of conductor 332


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8012844 Method of manufacturing an integrated circuit Sep. 6, 2011
7981759 Local oxidation of silicon planarization for polysilicon layers under thin film structures Jul. 19, 2011
7977201 Methods for forming back-end-of-line resistive semiconductor structures Jul. 12, 2011
7964469 Method of manufacturing semiconductor device having resistor formed of a polycrystalline silicon film Jun. 21, 2011
7951664 Methods of manufacturing resistors and structures thereof May. 31, 2011
7871890 Methods of fabricating semiconductor devices having resistors Jan. 18, 2011
7858484 Semiconductor device and method for producing the same Dec. 28, 2010
7855121 Method of forming organic thin film and method of manufacturing semiconductor device using the same Dec. 21, 2010
7843037 High level integration phase change memory device having an increased diode junction area and method for manufacturing the same Nov. 30, 2010
7829428 Method for eliminating a mask layer during thin film resistor manufacturing Nov. 9, 2010
7803687 Method for forming a thin film resistor Sep. 28, 2010
7803654 Variable resistance non-volatile memory cells and methods of fabricating same Sep. 28, 2010
7767102 Systems and methods for harvesting and integrating nanowires Aug. 3, 2010
7767506 Mask and manufacturing method of a semiconductor device and a thin film transistor array panel using the mask Aug. 3, 2010
7759212 System-in-package having integrated passive devices and method therefor Jul. 20, 2010
7718502 Semiconductor apparatus including a thin-metal-film resistor element and a method of manufacturing the same May. 18, 2010
7704848 Method for designing semiconductor device and semiconductor device Apr. 27, 2010
7704871 Integration of thin film resistors having different TCRs into single die Apr. 27, 2010
7691717 Polysilicon containing resistor with enhanced sheet resistance precision and method for fabrication thereof Apr. 6, 2010
7669313 Method for fabricating a thin film resistor semiconductor structure Mar. 2, 2010
7642170 Phase change memory cell with roundless micro-trenches Jan. 5, 2010
7566607 Semiconductor device and fabrication process thereof Jul. 28, 2009
7563666 Semiconductor structures including vertical diode structures and methods of making the same Jul. 21, 2009
7544579 System and method for faceting the corners of a resistor protect layer to reduce vertical step height Jun. 9, 2009
7541253 Method of forming an integrated resistor Jun. 2, 2009
7538397 Semiconductor device and method for fabricating the same May. 26, 2009
7525832 Memory device and semiconductor integrated circuit Apr. 28, 2009
7479869 Metal resistor and resistor material Jan. 20, 2009
7465639 Method for fabricating an SOI device Dec. 16, 2008
7462921 Integrated circuit device, method of manufacturing the same and method of forming vanadium oxide film Dec. 9, 2008
7456076 Techniques for forming passive devices during semiconductor back-end processing Nov. 25, 2008
7449352 Mask and manufacturing method of a semiconductor device and a thin film transistor array panel using the mask Nov. 11, 2008
7442603 Self-aligned structure and method for confining a melting point in a resistor random access memory Oct. 28, 2008
7439146 Field plated resistor with enhanced routing area thereover Oct. 21, 2008
7439147 Resistor of semiconductor device and method for fabricating the same Oct. 21, 2008
7427550 Methods of fabricating passive element without planarizing Sep. 23, 2008
7419881 Phase changeable memory device and method of formation thereof Sep. 2, 2008
7416951 Thin film resistors integrated at two different metal interconnect levels of single die Aug. 26, 2008
7410879 System and method for providing a dual via architecture for thin film resistors Aug. 12, 2008
7394145 Methods of fabricating passive element without planarizing and related semiconductor device Jul. 1, 2008
7384855 Resistor integration structure and technique for noise elimination Jun. 10, 2008
7375001 Semiconductor device and method therefore May. 20, 2008
7358135 Method of forming resistor of flash memory device Apr. 15, 2008
7351639 Increasing an electrical resistance of a resistor by oxidation or nitridization Apr. 1, 2008
7348653 Resistive memory cell, method for forming the same and resistive memory array using the same Mar. 25, 2008
7345573 Integration of thin film resistors having different TCRs into single die Mar. 18, 2008
7332403 System and method for providing a buried thin film resistor having end caps defined by a dielectric mask Feb. 19, 2008
7326589 Method for producing a TFA image sensor and one such TFA image sensor Feb. 5, 2008
7326624 Method of making thin-film chip resistor Feb. 5, 2008
7323762 Semiconductor package substrate with embedded resistors and method for fabricating the same Jan. 29, 2008

1 2 3 4 5 6 7 8 9










 
 
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