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Class Information
Number: 438/384
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Resistor > Deposited thin film resistor
Description: Process wherein the resistor is formed by the deposition of resistive material upon the semiconductor substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/385 Altering resistivity of conductor 332

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8709882 Method to dynamically tune precision resistance Apr. 29, 2014
8703548 Method of forming top electrode for capacitor and interconnection in integrated passive device (IPD) Apr. 22, 2014
8685827 Method of forming polysilicon resistor during replacement metal gate process and semiconductor device having same Apr. 1, 2014
8679932 System and method for manufacturing thin film resistors using a trench and chemical mechanical polishing Mar. 25, 2014
8673727 Flexible non-volatile memory Mar. 18, 2014
8659122 Semiconductor device and manufacturing method thereof Feb. 25, 2014
8659085 Lateral connection for a via-less thin film resistor Feb. 25, 2014
8652922 Compact thermally controlled thin film resistors utilizing substrate contacts and methods of manufacture Feb. 18, 2014
8642439 Semiconductor device and method of formation Feb. 4, 2014
8603886 Intermediate epitaxial structure and method for fabricating an epitaxial structure Dec. 10, 2013
8597979 Panel-level package fabrication of 3D active semiconductor and passive circuit components Dec. 3, 2013
8586443 Method of fabricating phase change memory device capable of reducing disturbance Nov. 19, 2013
8581225 Variable resistance nonvolatile memory device and method of manufacturing the same Nov. 12, 2013
8581364 Resistance memory devices and methods of forming the same Nov. 12, 2013
8563336 Method for forming thin film resistor and terminal bond pad simultaneously Oct. 22, 2013
8551854 Method of manufacturing a semiconductor device Oct. 8, 2013
8546275 Atomic layer deposition of hafnium and zirconium oxides for memory applications Oct. 1, 2013
8535953 Process for selectively patterning a magnetic film structure Sep. 17, 2013
8530320 High-nitrogen content metal resistor and method of forming same Sep. 10, 2013
8531003 Semiconductor device and manufacturing method of the same Sep. 10, 2013
8530321 Variable resistance element and manufacturing method thereof Sep. 10, 2013
8482099 Poly-resistor, and linear amplifier Jul. 9, 2013
8470683 Method and electronic device for a simplified integration of high precision thinfilm resistors Jun. 25, 2013
8470682 Methods and structures for increased thermal dissipation of thin film resistors Jun. 25, 2013
8470637 Method for fabricating a resistor for a resistance random access memory Jun. 25, 2013
8426745 Thin film resistor Apr. 23, 2013
8427273 Resistor structure of phase change material and trimming method thereof Apr. 23, 2013
8420408 Semiconductor memory and manufacturing method thereof Apr. 16, 2013
8409970 Semiconductor device and method of making integrated passive devices Apr. 2, 2013
8400257 Via-less thin film resistor with a dielectric cap Mar. 19, 2013
8367030 Thin film of metal-silicon compound and process for producing the thin film of the metal-silicon compound Feb. 5, 2013
8334187 Hard mask for thin film resistor manufacture Dec. 18, 2012
8298904 Compact thermally controlled thin film resistors utilizing substrate contacts and methods of manufacture Oct. 30, 2012
8288297 Atomic layer deposition of metal oxide materials for memory applications Oct. 16, 2012
8283198 Resistive memory and methods of processing resistive memory Oct. 9, 2012
8278139 Passivating glue layer to improve amorphous carbon to metal adhesion Oct. 2, 2012
8263471 Multilayer structure comprising a phase change material layer and method of producing the same Sep. 11, 2012
8243494 Self-aligned structure and method for confining a melting point in a resistor random access memory Aug. 14, 2012
8179225 Ceramic electronic component, manufacturing method of ceramic electronic component, and packaging method of ceramic electronic components May. 15, 2012
8168493 Semiconductor memory device and method of manufacturing the same May. 1, 2012
8143674 Semiconductor devices having resistors Mar. 27, 2012
8138056 Thermally insulated phase change material memory cells with pillar structure Mar. 20, 2012
8119491 Methods of fabricating passive element without planarizing and related semiconductor device Feb. 21, 2012
8105850 Process for selectively patterning a magnetic film structure Jan. 31, 2012
8088661 Nonvolatile semiconductor memory with resistance elements and method of manufacturing the same Jan. 3, 2012
8080461 Method of making a thin film resistor Dec. 20, 2011
8076754 Silicide-interface polysilicon resistor Dec. 13, 2011
8071437 Method of fabricating efuse, resistor and transistor Dec. 6, 2011
8021953 Method for making PMC type memory cells Sep. 20, 2011
8013394 Integrated circuit having resistor between BEOL interconnect and FEOL structure and related method Sep. 6, 2011

1 2 3 4 5 6 7 8 9

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