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Class Information
Number: 438/383
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Resistor > Lightly doped junction isolated resistor
Description: Process wherein the resistive element is in the form of a lightly doped layer of one conductivity type located in a region of opposite conductivity type, such that the pn junction between the resistor region and its containing opposite conductivity-type region serves to electrically isolate the resistor.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8685827 Method of forming polysilicon resistor during replacement metal gate process and semiconductor device having same Apr. 1, 2014
8679932 System and method for manufacturing thin film resistors using a trench and chemical mechanical polishing Mar. 25, 2014
8652921 Semiconductor device having a damp-proof structure and method of fabricating the same Feb. 18, 2014
8482100 Resistor array and semiconductor device including the same Jul. 9, 2013
8481397 Polysilicon resistor and E-fuse for integration with metal gate and high-k dielectric Jul. 9, 2013
8426287 Method of manufacturing semiconductor device, solid-state imaging device, and solid-state imaging apparatus Apr. 23, 2013
8334187 Hard mask for thin film resistor manufacture Dec. 18, 2012
8183107 Semiconductor devices with improved local matching and end resistance of RX based resistors May. 22, 2012
8143674 Semiconductor devices having resistors Mar. 27, 2012
7928515 Semiconductor device and manufacturing method of the semiconductor device Apr. 19, 2011
7871890 Methods of fabricating semiconductor devices having resistors Jan. 18, 2011
7732293 Tunable semiconductor diodes Jun. 8, 2010
7691717 Polysilicon containing resistor with enhanced sheet resistance precision and method for fabrication thereof Apr. 6, 2010
7611957 Method of manufacturing semiconductor device Nov. 3, 2009
7504292 Short channel effect engineering in MOS device using epitaxially carbon-doped silicon Mar. 17, 2009
7439145 Tunable semiconductor diodes Oct. 21, 2008
7419881 Phase changeable memory device and method of formation thereof Sep. 2, 2008
7323751 Thin film resistor integration in a dual damascene structure Jan. 29, 2008
7307024 Flash memory and fabrication method thereof Dec. 11, 2007
7300836 Manufacturing method of semiconductor device Nov. 27, 2007
7250333 Method of fabricating a linearized output driver and terminator Jul. 31, 2007
7163868 Method for forming a lightly doped drain in a thin film transistor Jan. 16, 2007
7135367 Manufacturing method of semiconductor device Nov. 14, 2006
7071070 Method of fabricating capacitor Jul. 4, 2006
7064414 Heater for annealing trapped charge in a semiconductor device Jun. 20, 2006
7059859 Manufacturing method of semiconductor device Jun. 13, 2006
7029956 Memory system capable of operating at high temperatures and method for fabricating the same Apr. 18, 2006
7002235 Semiconductor device Feb. 21, 2006
6984869 High performance diode implanted voltage controlled p-type diffusion resistor Jan. 10, 2006
6936520 Method for fabricating semiconductor device having gate electrode together with resistance element Aug. 30, 2005
6900088 Semiconductor device and its manufacture method May. 31, 2005
6835632 Semiconductor device and process of producing the same Dec. 28, 2004
6784066 Method for manufacturing semiconductor device and semiconductor device manufactured thereby Aug. 31, 2004
6784044 High dopant concentration diffused resistor and method of manufacture therefor Aug. 31, 2004
6734075 CMOS device having high-density resistance elements May. 11, 2004
6734076 Method for thin film resistor integration in dual damascene structure May. 11, 2004
6720228 Current source bias circuit with hot carrier injection tracking Apr. 13, 2004
6690082 High dopant concentration diffused resistor and method of manufacture therefor Feb. 10, 2004
6667217 Method of fabricating a damascene copper inductor structure using a sub-0.18 um CMOS process Dec. 23, 2003
6642604 Semiconductor device with resistor layer having heat radiation path to semiconductor substrate Nov. 4, 2003
6583019 Perimeter anchored thick film pad Jun. 24, 2003
6579775 Semiconductor device having a metal gate with a work function compatible with a semiconductor device Jun. 17, 2003
6573149 Semiconductor device having a metal gate with a work function compatible with a semiconductor device Jun. 3, 2003
6528834 Container capacitor structure and method of formation thereof Mar. 4, 2003
6500723 Method for forming a well under isolation and structure thereof Dec. 31, 2002
6432766 Method of fabricating a SRAM device Aug. 13, 2002
6426268 Thin film resistor fabrication method Jul. 30, 2002
6420226 Method of defining a buried stack capacitor structure for a one transistor RAM cell Jul. 16, 2002
6410398 Device for the adjustment of circuits after packaging, corresponding fabrication process and induction device Jun. 25, 2002
6403438 Process for manufacturing a resistive structure used in semiconductor integrated circuits Jun. 11, 2002

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