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Class Information
Number: 438/381
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.)
Description: Process for making an electrical device or component utilizing a semiconductor substrate in which charge carriers do not change their energy levels and that does not provide rectification, amplification, or switching, but which does react to voltage and current input.










Sub-classes under this class:

Class Number Class Name Patents
438/393 Planar capacitor 661
438/382 Resistor 487
438/396 Stacked capacitor 2,648
438/386 Trench capacitor 935


Patents under this class:
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Patent Number Title Of Patent Date Issued
6232175 Method of manufacturing double-recess crown-shaped DRAM capacitor May. 15, 2001
6232194 Silicon nitride capped poly resistor with SAC process May. 15, 2001
6221727 Method to trap air at the silicon substrate for improving the quality factor of RF inductors in CMOS technology Apr. 24, 2001
6211008 Method for forming high-density high-capacity capacitor Apr. 3, 2001
6211030 Method for fabricating resistors in integrated circuits Apr. 3, 2001
6211077 Method for forming polycrystal silicon film for semiconductor elements Apr. 3, 2001
6207521 Thin-film resistor employed in a semiconductor wafer and its method formation Mar. 27, 2001
6204105 Method for fabricating a polycide semiconductor device Mar. 20, 2001
6204110 Methods of forming an SRAM Mar. 20, 2001
6201287 Monolithic inductance-enhancing integrated circuits, complementary metal oxide semiconductor (CMOS) inductance-enhancing integrated circuits, inductor assemblies, and inductance-multiplying me Mar. 13, 2001
6194248 Chip electronic part Feb. 27, 2001
6190956 Forming a capacitor structure of a semiconductor Feb. 20, 2001
6190986 Method of producing sulithographic fuses using a phase shift mask Feb. 20, 2001
6190987 MOS semiconductor device and method of manufacturing the same Feb. 20, 2001
6187647 Method of manufacturing lateral high-Q inductor for semiconductor devices Feb. 13, 2001
6184044 Thin film capacitor including perovskite-type oxide layers having columnar structure and granular structure Feb. 6, 2001
6180445 Method to fabricate high Q inductor by redistribution layer when flip-chip package is employed Jan. 30, 2001
6180481 Barrier layer fabrication methods Jan. 30, 2001
6180482 Method for manufacturing high dielectric capacitor Jan. 30, 2001
6177127 Method of monitoring emissivity Jan. 23, 2001
6177715 Integrated circuit having a level of metallization of variable thickness Jan. 23, 2001
6174802 Method for fabricating a self aligned contact which eliminates the key hole problem using a two step contact deposition Jan. 16, 2001
6171905 Semiconductor device and method of manufacturing the same Jan. 9, 2001
6171922 SiCr thin film resistors having improved temperature coefficients of resistance and sheet resistance Jan. 9, 2001
6169008 High Q inductor and its forming method Jan. 2, 2001
6169010 Method for making integrated circuit capacitor including anchored plug Jan. 2, 2001
6169305 Semiconductor device and method for fabricating the same Jan. 2, 2001
6165834 Method of forming capacitors, method of processing dielectric layers, method of forming a DRAM cell Dec. 26, 2000
6165862 Method of producing a thin film resistor Dec. 26, 2000
6162671 Method of forming capacitors having high dielectric constant material Dec. 19, 2000
6162697 High Q inductor realization for use in MMIC circuits Dec. 19, 2000
6159817 Multi-tap thin film inductor Dec. 12, 2000
6156618 Method for fabricating thin film resistor Dec. 5, 2000
6153461 Manufacturing method of a dielectric layer for DRAM capacitors Nov. 28, 2000
6153489 Fabrication method of inductor devices using a substrate conversion technique Nov. 28, 2000
6150206 Methods of forming integrated circuit capacitors using trench isolation and planarization techniques Nov. 21, 2000
6150208 DRAM capacitors made from silicon-germanium and electrode-limited conduction dielectric films Nov. 21, 2000
6150226 Semiconductor processing methods, methods of forming capacitors, methods of forming silicon nitride, and methods of densifying silicon nitride layers Nov. 21, 2000
6146938 Method of fabricating semiconductor device Nov. 14, 2000
6146958 Methods for making VLSI capacitors and high Q VLSI inductors using metal-filled via plugs Nov. 14, 2000
6143614 Monolithic inductor Nov. 7, 2000
6140197 Method of making spiral-type RF inductors having a high quality factor (Q) Oct. 31, 2000
6136641 Method for manufacturing capacitor of semiconductor device including thermal treatment to dielectric film under hydrogen atmosphere Oct. 24, 2000
6133079 Method for reducing substrate capacitive coupling of a thin film inductor by reverse P/N junctions Oct. 17, 2000
6127237 Etching end point detecting method based on junction current measurement and etching apparatus Oct. 3, 2000
6121103 Optically transparent, electrically conductive semiconductor windows Sep. 19, 2000
6121105 Inverted thin film resistor and method of manufacture Sep. 19, 2000
6121135 Modified buried contact process for IC device fabrication Sep. 19, 2000
6117720 Method of making an integrated circuit electrode having a reduced contact area Sep. 12, 2000
6117721 Semiconductor processing method of forming a static random access memory cell and static random access memory cell Sep. 12, 2000

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