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Class Information
Number: 438/377
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Self-aligned > Dopant implantation or diffusion > Simultaneous introduction of plural dopants > Plural doping steps > Through same mask opening
Description: Process wherein plural doping steps are affected through the same opening in a dopant masking layer.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7598133 Semiconductor memory device and a method of manufacturing the same Oct. 6, 2009
7550355 Low-leakage transistor and manufacturing method thereof Jun. 23, 2009
7488663 Semiconductor article and method for manufacturing with reduced base resistance Feb. 10, 2009
7303949 High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture Dec. 4, 2007
7241660 Manufacturing method of semiconductor device Jul. 10, 2007
7067383 Method of making bipolar transistors and resulting product Jun. 27, 2006
7037748 CMOS image sensor and method for manufacturing the same May. 2, 2006
7033903 Method and apparatus for forming patterned photoresist layer Apr. 25, 2006
6890826 Method of making bipolar transistor with integrated base contact and field plate May. 10, 2005
6872645 Methods of positioning and/or orienting nanostructures Mar. 29, 2005
6835606 Low temperature polysilicon thin film transistor and method of forming polysilicon layer of same Dec. 28, 2004
6432790 Method of manufacturing photomask, photomask, and method of manufacturing semiconductor integrated circuit device Aug. 13, 2002
6337252 Semiconductor device manufacturing method Jan. 8, 2002
6329260 Analog-to-digital converter and method of fabrication Dec. 11, 2001
6251739 Integrated circuit, components thereof and manufacturing method Jun. 26, 2001
6180442 Bipolar transistor with an inhomogeneous emitter in a BICMOS integrated circuit method Jan. 30, 2001
6077746 Using p-type halo implant as ROM cell isolation in flat-cell mask ROM process Jun. 20, 2000
6043130 Process for forming bipolar transistor compatible with CMOS utilizing tilted ion implanted base Mar. 28, 2000
6001700 Method and mask structure for self-aligning ion implanting to form various device structures Dec. 14, 1999
5885880 Bipolar transistor device and method for manufacturing the same Mar. 23, 1999
5846858 SOI-BiCMOS method Dec. 8, 1998
5837590 Isolated vertical PNP transistor without required buried layer Nov. 17, 1998
5726922 Assembly for removably connecting data storage devices Mar. 10, 1998
5688709 Method for forming composite trench-fin capacitors for DRAMS Nov. 18, 1997
5593906 Method of processing a polysilicon film on a single-crystal silicon substrate Jan. 14, 1997
5589409 Fabrication of bipolar transistors with improved output current-voltage characteristics Dec. 31, 1996
5569613 Method of making bipolar junction transistor Oct. 29, 1996
5336632 Method for manufacturing capacitor and bipolar transistor Aug. 9, 1994
5296388 Fabrication method for semiconductor devices Mar. 22, 1994
5254485 Method for manufacturing bipolar semiconductor device Oct. 19, 1993
5252517 Method of conductor isolation from a conductive contact plug Oct. 12, 1993
5091321 Method for making an NPN transistor with controlled base width compatible with making a Bi-MOS integrated circuit Feb. 25, 1992
5077227 Semiconductor device and method for fabricating the same Dec. 31, 1991
5071780 Reverse self-aligned transistor integrated circuit Dec. 10, 1991
5064774 Self-aligned bipolar transistor process Nov. 12, 1991
5019523 Process for making polysilicon contacts to IC mesas May. 28, 1991
4952521 Process for fabricating a semiconductor device with selective growth of a metal silicide Aug. 28, 1990
4898837 Method of fabricating a semiconductor integrated circuit Feb. 6, 1990
4824794 Method for fabricating a bipolar transistor having self aligned base and emitter Apr. 25, 1989
4804634 Integrated circuit lateral transistor structure Feb. 14, 1989
4780426 Method for manufacturing high-breakdown voltage semiconductor device Oct. 25, 1988
4717677 Fabricating a semiconductor device with buried oxide Jan. 5, 1988
4701998 Method for fabricating a bipolar transistor Oct. 27, 1987
4693782 Fabrication method of semiconductor device Sep. 15, 1987
4689872 Method of manufacturing a semiconductor device Sep. 1, 1987
4536945 Process for producing CMOS structures with Schottky bipolar transistors Aug. 27, 1985
4536950 Method for making semiconductor device Aug. 27, 1985
4465528 Method of producing a walled emitter semiconductor device Aug. 14, 1984
4441932 Process for preparing semiconductor device having active base region implanted therein using walled emitter opening and the edge of dielectric isolation zone Apr. 10, 1984
4347654 Method of fabricating a high-frequency bipolar transistor structure utilizing permeation-etching Sep. 7, 1982

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