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Class Information
Number: 438/373
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Self-aligned > Dopant implantation or diffusion > Simultaneous introduction of plural dopants > Plural doping steps > Multiple ion implantation steps
Description: Process wherein the plural doping steps are affected by implanting electrically active dopant ions into semiconductive regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/374 Using same conductivity-type dopant 86

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8673753 Multi-energy ion implantation Mar. 18, 2014
8598007 Methods of performing highly tilted halo implantation processes on semiconductor devices Dec. 3, 2013
8580646 Method of fabricating field effect transistors with low k sidewall spacers Nov. 12, 2013
8513083 Methods of forming an anode and a cathode of a substrate diode by performing angled ion implantation processes Aug. 20, 2013
8487280 Modulating implantation for improved workpiece splitting Jul. 16, 2013
8409975 Method for decreasing polysilicon gate resistance in a carbon co-implantation process Apr. 2, 2013
8298889 Process of forming an electronic device including a trench and a conductive structure therein Oct. 30, 2012
8198659 Semiconductor device and method for fabricating the same Jun. 12, 2012
8174074 Asymmetric embedded silicon germanium field effect transistor May. 8, 2012
8114751 Multi-angle rotation for ion implantation of trenches in superjunction devices Feb. 14, 2012
8067301 Image sensor and method for forming the same Nov. 29, 2011
8035196 Methods of counter-doping collector regions in bipolar transistors Oct. 11, 2011
8012843 Optimized halo or pocket cold implants Sep. 6, 2011
7888226 Method of fabricating power semiconductor device for suppressing substrate recirculation current Feb. 15, 2011
7825457 Semiconductor device and manufacturing method therefor Nov. 2, 2010
7732292 Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide Jun. 8, 2010
7674658 Semiconductor device and manufacturing method thereof Mar. 9, 2010
7655526 Method for manufacturing semiconductor device Feb. 2, 2010
7645652 CMOS image sensor and method for fabricating the same Jan. 12, 2010
7611975 Method of implanting a substrate and an ion implanter for performing the method Nov. 3, 2009
7582546 Device with damaged breakdown layer Sep. 1, 2009
7569457 Method of fabricating semiconductor device Aug. 4, 2009
7550355 Low-leakage transistor and manufacturing method thereof Jun. 23, 2009
7541250 Method for forming a self-aligned twin well region with simplified processing Jun. 2, 2009
7476914 Methods to improve the SiGe heterojunction bipolar device performance Jan. 13, 2009
7468305 Forming pocket and LDD regions using separate masks Dec. 23, 2008
7439092 Thin film splitting method Oct. 21, 2008
7314805 Method for fabricating semiconductor device Jan. 1, 2008
7300851 Method of fabricating a silicon-on-insulator device with a channel stop Nov. 27, 2007
7276421 Method of forming single crystal semiconductor thin film on insulator and semiconductor device fabricated thereby Oct. 2, 2007
7271443 Semiconductor device and manufacturing method for the same Sep. 18, 2007
7253067 Method for manufacturing a semiconductor device including a shallow trench isolation structure Aug. 7, 2007
7253072 Implant optimization scheme Aug. 7, 2007
7220649 Method of manufacturing semiconductor device and the semiconductor device manufactured by the method May. 22, 2007
7195986 Microfluidic device with controlled substrate conductivity Mar. 27, 2007
7169674 Complementary metal oxide semiconductor (CMOS) gate stack with high dielectric constant gate dielectric and integrated diffusion barrier Jan. 30, 2007
7157346 Method of reducing charging damage to integrated circuits during semiconductor manufacturing Jan. 2, 2007
7144787 Methods to improve the SiGe heterojunction bipolar device performance Dec. 5, 2006
7118983 Method of fabricating semiconductor device Oct. 10, 2006
7112501 Method of fabrication a silicon-on-insulator device with a channel stop Sep. 26, 2006
7049202 Method of manufacturing semiconductor device May. 23, 2006
7001856 Method of calculating a pressure compensation recipe for a semiconductor wafer implanter Feb. 21, 2006
6995068 Double-implant high performance varactor and method for manufacturing same Feb. 7, 2006
6924216 Semiconductor device having improved doping profiles and method of improving the doping profiles of a semiconductor device Aug. 2, 2005
6924215 Method of monitoring high tilt angle of medium current implant Aug. 2, 2005
6924874 Method of forming a liquid crystal display Aug. 2, 2005
6893931 Reducing extrinsic base resistance in an NPN transistor May. 17, 2005
6864144 Method of stabilizing resist material through ion implantation Mar. 8, 2005
6852604 Manufacturing method of semiconductor substrate Feb. 8, 2005
6849526 Method of improving device resistance Feb. 1, 2005

1 2 3 4

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