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Class Information
Number: 438/372
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Self-aligned > Dopant implantation or diffusion > Simultaneous introduction of plural dopants > Plural doping steps
Description: Process having multiple steps of doping semiconductive regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/375 Forming partially overlapping regions 79
438/373 Multiple ion implantation steps 152
438/376 Single dopant forming regions of different depth or concentrations 82
438/377 Through same mask opening 72

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8609502 Method of manufacturing semiconductor device including insulated gate bipolar transistor and diode Dec. 17, 2013
8580646 Method of fabricating field effect transistors with low k sidewall spacers Nov. 12, 2013
8552470 Self-powered integrated circuit with multi-junction photovoltaic cell Oct. 8, 2013
8507352 Method of manufacturing semiconductor device including insulated gate bipolar transistor and diode Aug. 13, 2013
8487280 Modulating implantation for improved workpiece splitting Jul. 16, 2013
8482009 Silicon-on-insulator substrate with built-in substrate junction Jul. 9, 2013
8304831 Method and apparatus of forming a gate Nov. 6, 2012
8012843 Optimized halo or pocket cold implants Sep. 6, 2011
7955940 Silicon-on-insulator substrate with built-in substrate junction Jun. 7, 2011
7947562 Noise reduction in semiconductor device using counter-doping May. 24, 2011
7904273 In-line depth measurement for thru silicon via Mar. 8, 2011
7888226 Method of fabricating power semiconductor device for suppressing substrate recirculation current Feb. 15, 2011
7851317 Method for fabricating high voltage drift in semiconductor device Dec. 14, 2010
7825457 Semiconductor device and manufacturing method therefor Nov. 2, 2010
7732292 Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide Jun. 8, 2010
7651920 Noise reduction in semiconductor device using counter-doping Jan. 26, 2010
7645652 CMOS image sensor and method for fabricating the same Jan. 12, 2010
7569457 Method of fabricating semiconductor device Aug. 4, 2009
7550355 Low-leakage transistor and manufacturing method thereof Jun. 23, 2009
7488638 Method for fabricating a voltage-stable PMOSFET semiconductor structure Feb. 10, 2009
7468305 Forming pocket and LDD regions using separate masks Dec. 23, 2008
7456030 Electroforming technique for the formation of high frequency performance ferromagnetic films Nov. 25, 2008
7439591 Gate layer diode method and apparatus Oct. 21, 2008
7422952 Method of forming a BJT with ESD self protection Sep. 9, 2008
7378324 Selective links in silicon hetero-junction bipolar transistors using carbon doping and method of forming same May. 27, 2008
7338877 Multicomponent fiber including a luminescent colorant Mar. 4, 2008
7314805 Method for fabricating semiconductor device Jan. 1, 2008
7300851 Method of fabricating a silicon-on-insulator device with a channel stop Nov. 27, 2007
7262107 Capacitor structure for a logic process Aug. 28, 2007
7253067 Method for manufacturing a semiconductor device including a shallow trench isolation structure Aug. 7, 2007
7253072 Implant optimization scheme Aug. 7, 2007
7205173 Method of fabricating micro-electromechanical systems Apr. 17, 2007
7195986 Microfluidic device with controlled substrate conductivity Mar. 27, 2007
7169674 Complementary metal oxide semiconductor (CMOS) gate stack with high dielectric constant gate dielectric and integrated diffusion barrier Jan. 30, 2007
7112499 Dual step source/drain extension junction anneal to reduce the junction depth: multiple-pulse low energy laser anneal coupled with rapid thermal anneal Sep. 26, 2006
7112501 Method of fabrication a silicon-on-insulator device with a channel stop Sep. 26, 2006
7094642 Method of fabricating semiconductor device Aug. 22, 2006
7094655 Method of fabricating semiconductor device Aug. 22, 2006
7074687 Method for forming an ESD protection device Jul. 11, 2006
7064040 Method of fabricating semiconductor device Jun. 20, 2006
7049202 Method of manufacturing semiconductor device May. 23, 2006
6762085 Method of forming a high performance and low cost CMOS device Jul. 13, 2004
6713351 Double diffused field effect transistor having reduced on-resistance Mar. 30, 2004
6673703 Method of fabricating an integrated circuit Jan. 6, 2004
6660608 Method for manufacturing CMOS device having low gate resistivity using aluminum implant Dec. 9, 2003
6645820 Polycrystalline silicon diode string for ESD protection of different power supply connections Nov. 11, 2003
6642122 Dual laser anneal for graded halo profile Nov. 4, 2003
6611044 Lateral bipolar transistor and method of making same Aug. 26, 2003
6534373 MOS transistor with reduced floating body effect Mar. 18, 2003
6472287 Manufacturing method of semiconductor with a cleansing agent Oct. 29, 2002

1 2 3

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