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Class Information
Number: 438/369
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Self-aligned > Dopant implantation or diffusion
Description: Process having a step of implanting or diffusing an electrically active dopant species into a semiconductive region of the substrate.


Sub-classes under this class:

Class Number Class Name Patents
438/370 Forming buried region (e.g., implanting through insulating layer, etc.) 185
438/371 Simultaneous introduction of plural dopants 43


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
7615458 Activation of CMOS source/drain extensions by ultra-high temperature anneals Nov. 10, 2009
7572708 Utilization of doped glass on the sidewall of the emitter window in a bipolar transistor structure Aug. 11, 2009
7563685 Bipolar-transistor and method for the production of a bipolar-transistor Jul. 21, 2009
7556994 Normally-off integrated JFET power switches in wide bandgap semiconductors and methods of making Jul. 7, 2009
7550355 Low-leakage transistor and manufacturing method thereof Jun. 23, 2009
7550358 MEMS device including a laterally movable portion with piezo-resistive sensing elements and electrostatic actuating elements on trench side walls, and methods for producing the same Jun. 23, 2009
7445979 Method of fabricating isolated semiconductor devices in epi-less substrate Nov. 4, 2008
7442616 Method of manufacturing a bipolar transistor and bipolar transistor thereof Oct. 28, 2008
7439591 Gate layer diode method and apparatus Oct. 21, 2008
7435659 Method for manufacturing a semiconductor device having an alignment feature formed using an N-type dopant and a wet oxidation process Oct. 14, 2008
7429525 Fabrication process of a semiconductor device Sep. 30, 2008
7413996 High k gate insulator removal Aug. 19, 2008
7364978 Method of fabricating semiconductor device Apr. 29, 2008
7361548 Methods of forming a capacitor using an atomic layer deposition process Apr. 22, 2008
7361567 Non-volatile nanocrystal memory and method therefor Apr. 22, 2008
7338894 Semiconductor device having nitridated oxide layer and method therefor Mar. 4, 2008
7338876 Method for manufacturing a semiconductor device Mar. 4, 2008
7338875 Method of fabricating a semiconductor device having a toroidal-like junction Mar. 4, 2008
7314794 Low-cost high-performance planar back-gate CMOS Jan. 1, 2008
7314804 Plasma implantation of impurities in junction region recesses Jan. 1, 2008
7253072 Implant optimization scheme Aug. 7, 2007
7253071 Methods for enhancing the formation of nickel mono-silicide by reducing the formation of nickel di-silicide Aug. 7, 2007
7195986 Microfluidic device with controlled substrate conductivity Mar. 27, 2007
7169677 Method for producing a spacer structure Jan. 30, 2007
7151035 Semiconductor device and manufacturing method thereof Dec. 19, 2006
7141480 Tri-gate low power device and method for manufacturing the same Nov. 28, 2006
7111386 Lead plating method for GMR head manufacture Sep. 26, 2006
7067425 Method of manufacturing flash memory device Jun. 27, 2006
7033902 Method for making thin film transistors with lightly doped regions Apr. 25, 2006
7029967 Silicide method for CMOS integrated circuits Apr. 18, 2006
6973712 Lead plating method for GMR head manufacture Dec. 13, 2005
6949424 Single poly-emitter PNP using DWELL diffusion in a BiCMOS technology Sep. 27, 2005
6939773 Semiconductor devices and manufacturing methods thereof Sep. 6, 2005
6924216 Semiconductor device having improved doping profiles and method of improving the doping profiles of a semiconductor device Aug. 2, 2005
6921691 Transistor with dopant-bearing metal in source and drain Jul. 26, 2005
6919615 Semiconductor device for integrated injection logic cell and process for fabricating the same Jul. 19, 2005
6900105 Semiconductor device and method of manufacture May. 31, 2005
6893934 Bipolar transistor device having phosphorous May. 17, 2005
6884689 Fabrication of self-aligned bipolar transistor Apr. 26, 2005
6881639 Method of manufacturing semiconductor device Apr. 19, 2005
6878603 Process for manufacturing a DMOS transistor Apr. 12, 2005
6864144 Method of stabilizing resist material through ion implantation Mar. 8, 2005
6852603 Fabrication of abrupt ultra-shallow junctions Feb. 8, 2005
6849526 Method of improving device resistance Feb. 1, 2005
6838326 Semiconductor device, and method for manufacturing the same Jan. 4, 2005
6838350 Triply implanted complementary bipolar transistors Jan. 4, 2005
6833292 Reducing dopant losses during annealing processes Dec. 21, 2004
6825082 Ferroelectric memory device and method of forming the same Nov. 30, 2004
6812148 Preventing gate oxice thinning effect in a recess LOCOS process Nov. 2, 2004
6780725 METHOD FOR FORMING A SEMICONDUCTOR DEVICE INCLUDING FORMING VERTICAL NPN AND PNP TRANSISTORS BY EXPOSING THE EPITAXIAL LAYER, FORMING A MONOCRYSTAL LAYER AND ADJUSTING THE IMPURITY CONCENTRATI Aug. 24, 2004

1 2 3


 
 
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