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Class Information
Number: 438/369
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Self-aligned > Dopant implantation or diffusion
Description: Process having a step of implanting or diffusing an electrically active dopant species into a semiconductive region of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/370 Forming buried region (e.g., implanting through insulating layer, etc.) 225
438/371 Simultaneous introduction of plural dopants 54

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8648391 SiGe heterojunction bipolar transistor with an improved breakdown voltage-cutoff frequency product Feb. 11, 2014
8623732 Methods of making laterally double diffused metal oxide semiconductor transistors having a reduced surface field structure Jan. 7, 2014
8623749 Reduction of stored charge in the base region of a bipolar transistor to improve switching speed Jan. 7, 2014
8586442 Manufacturing method for high voltage transistor Nov. 19, 2013
8580646 Method of fabricating field effect transistors with low k sidewall spacers Nov. 12, 2013
8563387 Transistor and method of manufacturing a transistor Oct. 22, 2013
8519403 Angled implantation for deep submicron device optimization Aug. 27, 2013
8497570 Wafer, fabricating method of the same, and semiconductor substrate Jul. 30, 2013
8487280 Modulating implantation for improved workpiece splitting Jul. 16, 2013
8481413 Doping of semiconductor substrate through carbonless phosphorous-containing layer Jul. 9, 2013
8455322 Silicon germanium heterojunction bipolar transistor structure and method Jun. 4, 2013
8409975 Method for decreasing polysilicon gate resistance in a carbon co-implantation process Apr. 2, 2013
8367511 Manufacturing method for high voltage transistor Feb. 5, 2013
8362522 Semiconductor device and method for manufacturing the same Jan. 29, 2013
8236661 Self-aligned well implant for improving short channel effects control, parasitic capacitance, and junction leakage Aug. 7, 2012
8183137 Use of dopants to provide low defect gate full silicidation May. 22, 2012
8178932 Semiconductor device having transistors May. 15, 2012
8174074 Asymmetric embedded silicon germanium field effect transistor May. 8, 2012
8168505 Method of fabricating transistor with epitaxial layers having different germanium concentrations May. 1, 2012
8153495 Semiconductor device and LTPS-TFT within and method of making the same Apr. 10, 2012
8153496 Self-aligned process and method for fabrication of high efficiency solar cells Apr. 10, 2012
8101528 Low temperature ion implantation Jan. 24, 2012
8097518 Semiconductor device and manufacturing method therefor Jan. 17, 2012
8076211 Fabricating bipolar junction select transistors for semiconductor memories Dec. 13, 2011
8076209 Methods for fabricating MOS devices having highly stressed channels Dec. 13, 2011
8071451 Method of doping semiconductors Dec. 6, 2011
8067301 Image sensor and method for forming the same Nov. 29, 2011
8035196 Methods of counter-doping collector regions in bipolar transistors Oct. 11, 2011
8030167 Varied impurity profile region formation for varying breakdown voltage of devices Oct. 4, 2011
7993698 Techniques for temperature controlled ion implantation Aug. 9, 2011
7972971 Method for producing Si.sub.1-yGe.sub.y based zones with different contents in Ge on a same substrate by condensation of germanium Jul. 5, 2011
7951681 Substrate-triggered bipolar junction transistor and ESD protection circuit May. 31, 2011
7939418 Partial implantation method for semiconductor manufacturing May. 10, 2011
7935601 Method for providing semiconductors having self-aligned ion implant May. 3, 2011
7913195 Method for creating mask layout data, apparatus for creating mask layout data, and method for manufacturing semiconductor device Mar. 22, 2011
7897459 Semiconductor device and manufacturing method thereof Mar. 1, 2011
7888226 Method of fabricating power semiconductor device for suppressing substrate recirculation current Feb. 15, 2011
7883946 Angled implantation for deep submicron device optimization Feb. 8, 2011
7851317 Method for fabricating high voltage drift in semiconductor device Dec. 14, 2010
7846806 System and method for providing a self aligned silicon germanium (SiGe) heterojunction bipolar transistor using a mesa emitter-base architecture Dec. 7, 2010
7838375 System and method for providing a polyemit module for a self aligned heterojunction bipolar transistor architecture Nov. 23, 2010
7838378 Semiconductor device and manufacturing method thereof Nov. 23, 2010
7825457 Semiconductor device and manufacturing method therefor Nov. 2, 2010
7820511 Normally-off integrated JFET power switches in wide bandgap semiconductors and methods of making Oct. 26, 2010
7772075 Formation of a MOSFET using an angled implant Aug. 10, 2010
7759148 Method for manufacturing semiconductor optical device Jul. 20, 2010
7759211 Method of fabricating semiconductor device Jul. 20, 2010
7756687 Method for predicting contributions of silicon interstitials to n-type dopant transient enhanced diffusion during a pn junction formation Jul. 13, 2010
7750405 Low-cost high-performance planar back-gate CMOS Jul. 6, 2010
7736994 Method for manufacturing compound material wafers and corresponding compound material wafer Jun. 15, 2010

1 2 3 4 5

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