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Class Information
Number: 438/368
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Self-aligned > Forming active region from adjacent doped polycrystalline or amorphous semiconductor > Simultaneously outdiffusing plural dopants from polysilicon or amorphous semiconductor
Description: Process including the simultaneous outdiffusing of electrically active dopants from the polysilicon or amorphous active region.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7566919 Method to reduce seedlayer topography in BICMOS process Jul. 28, 2009
7538004 Method of fabrication for SiGe heterojunction bipolar transistor (HBT) May. 26, 2009
7534691 Isolation structures for preventing photons and carriers from reaching active areas and methods of formation May. 19, 2009
7446009 Manufacturing method for semiconductor device Nov. 4, 2008
7410878 Polysilicon film having smooth surface and method of forming the same Aug. 12, 2008
7338875 Method of fabricating a semiconductor device having a toroidal-like junction Mar. 4, 2008
7232732 Semiconductor device with a toroidal-like junction Jun. 19, 2007
7217609 Semiconductor fabrication process, lateral PNP transistor, and integrated circuit May. 15, 2007
7211877 Chip scale surface mount package for semiconductor device and process of fabricating the same May. 1, 2007
7169674 Complementary metal oxide semiconductor (CMOS) gate stack with high dielectric constant gate dielectric and integrated diffusion barrier Jan. 30, 2007
7112500 Thin film transistor, liquid crystal display and manufacturing method thereof Sep. 26, 2006
7105415 Method for the production of a bipolar transistor Sep. 12, 2006
7005359 Bipolar junction transistor with improved extrinsic base region and method of fabrication Feb. 28, 2006
6881987 pMOS device having ultra shallow super-steep-retrograde epi-channel with dual channel doping and method for fabricating the same Apr. 19, 2005
6872638 Method of manufacturing a semiconductor device Mar. 29, 2005
6869854 Diffused extrinsic base and method for fabrication Mar. 22, 2005
6800541 Pulse laser irradiation method for forming a semiconductor thin film Oct. 5, 2004
6790737 Method for fabricating thin metal layers from the liquid phase Sep. 14, 2004
6740560 Bipolar transistor and method for producing same May. 25, 2004
6656812 Vertical bipolar transistor having little low-frequency noise and high current gain, and corresponding fabrication process Dec. 2, 2003
6642121 Control of amount and uniformity of oxidation at the interface of an emitter region of a monocrystalline silicon wafer and a polysilicon layer formed by chemical vapor deposition Nov. 4, 2003
6617220 Method for fabricating an epitaxial base bipolar transistor with raised extrinsic base Sep. 9, 2003
6506655 Bipolar transistor manufacturing method Jan. 14, 2003
6362034 Method of forming MOSFET gate electrodes having reduced depletion region growth sensitivity to applied electric field Mar. 26, 2002
6319786 Self-aligned bipolar transistor manufacturing method Nov. 20, 2001
6248650 Self-aligned BJT emitter contact Jun. 19, 2001
6194280 Method for forming a self-aligned BJT emitter contact Feb. 27, 2001
6180442 Bipolar transistor with an inhomogeneous emitter in a BICMOS integrated circuit method Jan. 30, 2001
6156594 Fabrication of bipolar/CMOS integrated circuits and of a capacitor Dec. 5, 2000
6130136 Bipolar transistor with L-shaped base-emitter spacer Oct. 10, 2000
6114208 Method for fabricating complementary MOS transistor Sep. 5, 2000
6080601 Method for forming a bipolar-based active pixel sensor cell with metal contact and increased capacitive coupling to the base region Jun. 27, 2000
6077752 Method in the manufacturing of a semiconductor device Jun. 20, 2000
6004855 Process for producing a high performance bipolar structure Dec. 21, 1999
5994196 Methods of forming bipolar junction transistors using simultaneous base and emitter diffusion techniques Nov. 30, 1999
5985728 Silicon on insulator process with recovery of a device layer from an etch stop layer Nov. 16, 1999
5940711 Method for making high-frequency bipolar transistor Aug. 17, 1999
5882976 Method of fabricating a self-aligned double polysilicon NPN transistor with poly etch stop Mar. 16, 1999
5866462 Double-spacer technique for forming a bipolar transistor with a very narrow emitter Feb. 2, 1999
5856228 Manufacturing method for making bipolar device having double polysilicon structure Jan. 5, 1999
5851858 Method for producing a multiplicity of microelectronic circuits on SOI Dec. 22, 1998
5846869 Method of manufacturing semiconductor integrated circuit device Dec. 8, 1998
5843828 Method for fabricating a semiconductor device with bipolar transistor Dec. 1, 1998
5804486 Process for manufacturing a high-frequency bipolar transistor structure Sep. 8, 1998
5773349 Method for making ultrahigh speed bipolar transistor Jun. 30, 1998
5736447 Method for manufacturing a bipolar junction transistor having a polysilicon emitter Apr. 7, 1998
5686322 Process for doping two levels of a double poly bipolar transistor after formation of second poly layer Nov. 11, 1997
5629219 Method for making a complementary bipolar transistor May. 13, 1997
5614422 Process for doping two levels of a double poly bipolar transistor after formation of second poly layer Mar. 25, 1997
5541120 Method of making complementary bipolar polysilicon emitter devices Jul. 30, 1996

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