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Class Information
Number: 438/360
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectrical material > With epitaxial semiconductor formation in groove
Description: Process for making a bipolar transistor additionally involving the epitaxial deposition of a semiconductor material in the groove.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709910 Semiconductor process Apr. 29, 2014
8647929 Semiconductor devices and methods of manufacturing thereof Feb. 11, 2014
8415224 Method of fabricating a semiconductor device including forming trenches having particular structures Apr. 9, 2013
8247282 Enhancing interface characteristics between a channel semiconductor alloy and a gate dielectric by an oxidation process Aug. 21, 2012
8198633 Stress transfer enhancement in transistors by a late gate re-crystallization Jun. 12, 2012
8178415 Method for manufacturing RF powder May. 15, 2012
8154050 Semiconductor device with semiconductor epitaxial layers buried in source/drain regions, and fabrication method of the same Apr. 10, 2012
8129249 Integrated transistor, particularly for voltages and method for the production thereof Mar. 6, 2012
7947569 Method for producing a semiconductor including a foreign material layer May. 24, 2011
7927977 Method of making damascene diodes using sacrificial material Apr. 19, 2011
7883954 Self-aligned epitaxially grown bipolar transistor Feb. 8, 2011
7867841 Methods of forming semiconductor devices with extended active regions Jan. 11, 2011
7858529 Treatment method of semiconductor, method for manufacturing MOS, and MOS structure Dec. 28, 2010
7838372 Methods of manufacturing semiconductor devices and structures thereof Nov. 23, 2010
7772060 Integrated SiGe NMOS and PMOS transistors Aug. 10, 2010
7759199 Stressor for engineered strain on channel Jul. 20, 2010
7754513 Latch-up resistant semiconductor structures on hybrid substrates and methods for forming such semiconductor structures Jul. 13, 2010
7696019 Semiconductor devices and methods of manufacturing thereof Apr. 13, 2010
7629211 Field effect transistor and method of forming a field effect transistor Dec. 8, 2009
7615455 Integrated circuit bipolar transistor Nov. 10, 2009
7517771 Method for manufacturing semiconductor device having trench Apr. 14, 2009
7435656 Semiconductor device of transistor structure having strained semiconductor layer Oct. 14, 2008
7368345 Flash memory devices and methods of fabricating the same May. 6, 2008
7354840 Method for opto-electronic integration on a SOI substrate Apr. 8, 2008
7351633 Method of fabricating semiconductor device using selective epitaxial growth Apr. 1, 2008
7338848 Method for opto-electronic integration on a SOI substrate and related structure Mar. 4, 2008
7339254 SOI substrate for integration of opto-electronics with SiGe BiCMOS Mar. 4, 2008
7268043 Semiconductor device and method of manufacturing the same Sep. 11, 2007
7259069 Semiconductor device and method of manufacturing the same Aug. 21, 2007
7153731 Method of forming a field effect transistor with halo implant regions Dec. 26, 2006
7151035 Semiconductor device and manufacturing method thereof Dec. 19, 2006
6939773 Semiconductor devices and manufacturing methods thereof Sep. 6, 2005
6900105 Semiconductor device and method of manufacture May. 31, 2005
6884687 SEMICONDUCTOR PROCESSING METHODS OF FORMING INTEGRATED CIRCUITRY, FORMING CONDUCTIVE LINES, FORMING A CONDUCTIVE GRID, FORMING A CONDUCTIVE NETWORK, FORMING AN ELECTRICAL INTERCONNECTION TO A Apr. 26, 2005
6861311 SEMICONDUCTOR PROCESSING METHODS OF FORMING INTEGRATED CIRCUITRY, FORMING CONDUCTIVE LINES, FORMING A CONDUCTIVE GRID, FORMING A CONDUCTIVE NETWORK, FORMING AN ELECTRICAL INTERCONNECTION TO A Mar. 1, 2005
6855612 Method for fabricating a bipolar transistor Feb. 15, 2005
6815305 Method for fabricating BICMOS semiconductor devices Nov. 9, 2004
6790697 Optical semiconductor device and method of fabricating the same Sep. 14, 2004
6740552 Method of making vertical diode structures May. 25, 2004
6737688 Method for manufacturing semiconductor device May. 18, 2004
6727157 Method for forming a shallow trench isolation using air gap Apr. 27, 2004
6723618 Methods of forming field isolation structures Apr. 20, 2004
6635543 SOI hybrid structure with selective epitaxial growth of silicon Oct. 21, 2003
6599793 Memory array with salicide isolation Jul. 29, 2003
6593200 Method of forming an integrated inductor and high speed interconnect in a planarized process with shallow trench isolation Jul. 15, 2003
6579771 Self aligned compact bipolar junction transistor layout, and method of making same Jun. 17, 2003
6569744 Method of converting a metal oxide semiconductor transistor into a bipolar transistor May. 27, 2003
6528379 Method for manufacturing semiconductor integrated circuit device Mar. 4, 2003
6509242 Heterojunction bipolar transistor Jan. 21, 2003
6506657 Process for forming damascene-type isolation structure for BJT device formed in trench Jan. 14, 2003

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