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Class Information
Number: 438/359
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectrical material
Description: Process for making a bipolar transistor involving the formation of a recess in the semiconductor followed by the refilling of the recess with an insulative material.










Sub-classes under this class:

Class Number Class Name Patents
438/361 Including deposition of polysilicon or noninsulative material into groove 140
438/360 With epitaxial semiconductor formation in groove 78


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8710627 Uni-directional transient voltage suppressor (TVS) Apr. 29, 2014
8692266 Circuit substrate structure Apr. 8, 2014
8685830 Method of filling shallow trenches Apr. 1, 2014
8679932 System and method for manufacturing thin film resistors using a trench and chemical mechanical polishing Mar. 25, 2014
8598678 Parasitic vertical PNP bipolar transistor and its fabrication method in BiCMOS process Dec. 3, 2013
8524569 Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer Sep. 3, 2013
8450180 Methods of forming semiconductor trench and forming dual trenches, and structure for isolating devices May. 28, 2013
8420495 Manufacturing approach for collector and a buried layer of bipolar transistor Apr. 16, 2013
8241982 Semiconductor device manufacturing method Aug. 14, 2012
8232180 Manufacturing method of semiconductor device comprising active region divided by STI element isolation structure Jul. 31, 2012
8222106 Nonvolatile semiconductor memory device, method of fabricating the nonvolatile semiconductor memory device and process of writing data on the nonvolatile semiconductor memory device Jul. 17, 2012
8222114 Manufacturing approach for collector and a buried layer of bipolar transistor Jul. 17, 2012
8129249 Integrated transistor, particularly for voltages and method for the production thereof Mar. 6, 2012
8125045 Dielectric isolation type semiconductor device and manufacturing method therefor Feb. 28, 2012
8084355 Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry Dec. 27, 2011
8076208 Method for forming transistor with high breakdown voltage using pitch multiplication technique Dec. 13, 2011
8071454 Method for manufacturing dielectric isolation type semiconductor device Dec. 6, 2011
8030171 Method of forming element isolation film and nonvolatile semiconductor memory Oct. 4, 2011
8030167 Varied impurity profile region formation for varying breakdown voltage of devices Oct. 4, 2011
8021952 Integrated transistor, particularly for voltages and method for the production thereof Sep. 20, 2011
7973345 Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a subst Jul. 5, 2011
7968418 Apparatus and method for isolating integrated circuit components using deep trench isolation and shallow trench isolation Jun. 28, 2011
7906403 Bipolar transistor and method of fabricating the same Mar. 15, 2011
7872326 Array of vertical bipolar junction transistors, in particular selectors in a phase change memory device Jan. 18, 2011
7871893 Method for non-selective shallow trench isolation reactive ion etch for patterning hybrid-oriented devices compatible with high-performance highly-integrated logic devices Jan. 18, 2011
7855116 Nonvolatile semiconductor memory device and manufacturing method thereof Dec. 21, 2010
7833875 Semiconductor device and method of fabricating the same Nov. 16, 2010
7736976 Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands Jun. 15, 2010
7736992 Isolation trench geometry for image sensors Jun. 15, 2010
7737526 Isolated trench MOSFET in epi-less semiconductor sustrate Jun. 15, 2010
7723227 Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry May. 25, 2010
7682929 Method and structure for double lining for shallow trench isolation Mar. 23, 2010
7611950 Method for forming shallow trench isolation in semiconductor device Nov. 3, 2009
7595253 Method of forming the semiconductor device Sep. 29, 2009
7579664 Semiconductor device with trench type device isolation layer and method for fabricating the same Aug. 25, 2009
7541298 STI of a semiconductor device and fabrication method thereof Jun. 2, 2009
7514715 Angled implant for trench isolation Apr. 7, 2009
7498233 Method of forming an insulation layer structure having a concave surface and method of manufacturing a memory device using the same Mar. 3, 2009
7485943 Dielectric isolation type semiconductor device and manufacturing method therefor Feb. 3, 2009
7429505 Method of fabricating fin field effect transistor using isotropic etching technique Sep. 30, 2008
7396732 Formation of deep trench airgaps and related applications Jul. 8, 2008
7393731 Semiconductor device and method of manufacturing the same Jul. 1, 2008
7354812 Multiple-depth STI trenches in integrated circuit fabrication Apr. 8, 2008
7344949 Non-volatile memory device and method of fabricating the same Mar. 18, 2008
7279381 Method for fabricating cell transistor of flash memory Oct. 9, 2007
7247534 Silicon device on Si:C-OI and SGOI and method of manufacture Jul. 24, 2007
7179691 Method for four direction low capacitance ESD protection Feb. 20, 2007
7172914 Method of making uniform oxide layer Feb. 6, 2007
7169654 Method of forming a semiconductor device Jan. 30, 2007
7157324 Transistor structure having reduced transistor leakage attributes Jan. 2, 2007

1 2 3 4 5










 
 
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