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Class Information
Number: 438/359
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectrical material
Description: Process for making a bipolar transistor involving the formation of a recess in the semiconductor followed by the refilling of the recess with an insulative material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8710627 |
Uni-directional transient voltage suppressor (TVS) |
Apr. 29, 2014 |
| 8692266 |
Circuit substrate structure |
Apr. 8, 2014 |
| 8685830 |
Method of filling shallow trenches |
Apr. 1, 2014 |
| 8679932 |
System and method for manufacturing thin film resistors using a trench and chemical mechanical polishing |
Mar. 25, 2014 |
| 8598678 |
Parasitic vertical PNP bipolar transistor and its fabrication method in BiCMOS process |
Dec. 3, 2013 |
| 8524569 |
Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer |
Sep. 3, 2013 |
| 8450180 |
Methods of forming semiconductor trench and forming dual trenches, and structure for isolating devices |
May. 28, 2013 |
| 8420495 |
Manufacturing approach for collector and a buried layer of bipolar transistor |
Apr. 16, 2013 |
| 8241982 |
Semiconductor device manufacturing method |
Aug. 14, 2012 |
| 8232180 |
Manufacturing method of semiconductor device comprising active region divided by STI element isolation structure |
Jul. 31, 2012 |
| 8222106 |
Nonvolatile semiconductor memory device, method of fabricating the nonvolatile semiconductor memory device and process of writing data on the nonvolatile semiconductor memory device |
Jul. 17, 2012 |
| 8222114 |
Manufacturing approach for collector and a buried layer of bipolar transistor |
Jul. 17, 2012 |
| 8129249 |
Integrated transistor, particularly for voltages and method for the production thereof |
Mar. 6, 2012 |
| 8125045 |
Dielectric isolation type semiconductor device and manufacturing method therefor |
Feb. 28, 2012 |
| 8084355 |
Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry |
Dec. 27, 2011 |
| 8076208 |
Method for forming transistor with high breakdown voltage using pitch multiplication technique |
Dec. 13, 2011 |
| 8071454 |
Method for manufacturing dielectric isolation type semiconductor device |
Dec. 6, 2011 |
| 8030171 |
Method of forming element isolation film and nonvolatile semiconductor memory |
Oct. 4, 2011 |
| 8030167 |
Varied impurity profile region formation for varying breakdown voltage of devices |
Oct. 4, 2011 |
| 8021952 |
Integrated transistor, particularly for voltages and method for the production thereof |
Sep. 20, 2011 |
| 7973345 |
Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a subst |
Jul. 5, 2011 |
| 7968418 |
Apparatus and method for isolating integrated circuit components using deep trench isolation and shallow trench isolation |
Jun. 28, 2011 |
| 7906403 |
Bipolar transistor and method of fabricating the same |
Mar. 15, 2011 |
| 7872326 |
Array of vertical bipolar junction transistors, in particular selectors in a phase change memory device |
Jan. 18, 2011 |
| 7871893 |
Method for non-selective shallow trench isolation reactive ion etch for patterning hybrid-oriented devices compatible with high-performance highly-integrated logic devices |
Jan. 18, 2011 |
| 7855116 |
Nonvolatile semiconductor memory device and manufacturing method thereof |
Dec. 21, 2010 |
| 7833875 |
Semiconductor device and method of fabricating the same |
Nov. 16, 2010 |
| 7736976 |
Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands |
Jun. 15, 2010 |
| 7736992 |
Isolation trench geometry for image sensors |
Jun. 15, 2010 |
| 7737526 |
Isolated trench MOSFET in epi-less semiconductor sustrate |
Jun. 15, 2010 |
| 7723227 |
Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry |
May. 25, 2010 |
| 7682929 |
Method and structure for double lining for shallow trench isolation |
Mar. 23, 2010 |
| 7611950 |
Method for forming shallow trench isolation in semiconductor device |
Nov. 3, 2009 |
| 7595253 |
Method of forming the semiconductor device |
Sep. 29, 2009 |
| 7579664 |
Semiconductor device with trench type device isolation layer and method for fabricating the same |
Aug. 25, 2009 |
| 7541298 |
STI of a semiconductor device and fabrication method thereof |
Jun. 2, 2009 |
| 7514715 |
Angled implant for trench isolation |
Apr. 7, 2009 |
| 7498233 |
Method of forming an insulation layer structure having a concave surface and method of manufacturing a memory device using the same |
Mar. 3, 2009 |
| 7485943 |
Dielectric isolation type semiconductor device and manufacturing method therefor |
Feb. 3, 2009 |
| 7429505 |
Method of fabricating fin field effect transistor using isotropic etching technique |
Sep. 30, 2008 |
| 7396732 |
Formation of deep trench airgaps and related applications |
Jul. 8, 2008 |
| 7393731 |
Semiconductor device and method of manufacturing the same |
Jul. 1, 2008 |
| 7354812 |
Multiple-depth STI trenches in integrated circuit fabrication |
Apr. 8, 2008 |
| 7344949 |
Non-volatile memory device and method of fabricating the same |
Mar. 18, 2008 |
| 7279381 |
Method for fabricating cell transistor of flash memory |
Oct. 9, 2007 |
| 7247534 |
Silicon device on Si:C-OI and SGOI and method of manufacture |
Jul. 24, 2007 |
| 7179691 |
Method for four direction low capacitance ESD protection |
Feb. 20, 2007 |
| 7172914 |
Method of making uniform oxide layer |
Feb. 6, 2007 |
| 7169654 |
Method of forming a semiconductor device |
Jan. 30, 2007 |
| 7157324 |
Transistor structure having reduced transistor leakage attributes |
Jan. 2, 2007 |
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