Forming bipolar transistor by formation or alteration of semiconductive active regions > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectrical material > Patents

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Class Information
Number: 438/359
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectrical material
Description: Process for making a bipolar transistor involving the formation of a recess in the semiconductor followed by the refilling of the recess with an insulative material.

Sub-classes under this class:

Class Number	Class Name	Patents
438/361	Including deposition of polysilicon or noninsulative material into groove	140
438/360	With epitaxial semiconductor formation in groove	78

Patents under this class:

1 2 3 4 5

Patent Number	Title Of Patent	Date Issued
8710627	Uni-directional transient voltage suppressor (TVS)	Apr. 29, 2014
8692266	Circuit substrate structure	Apr. 8, 2014
8685830	Method of filling shallow trenches	Apr. 1, 2014
8679932	System and method for manufacturing thin film resistors using a trench and chemical mechanical polishing	Mar. 25, 2014
8598678	Parasitic vertical PNP bipolar transistor and its fabrication method in BiCMOS process	Dec. 3, 2013
8524569	Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer	Sep. 3, 2013
8450180	Methods of forming semiconductor trench and forming dual trenches, and structure for isolating devices	May. 28, 2013
8420495	Manufacturing approach for collector and a buried layer of bipolar transistor	Apr. 16, 2013
8241982	Semiconductor device manufacturing method	Aug. 14, 2012
8232180	Manufacturing method of semiconductor device comprising active region divided by STI element isolation structure	Jul. 31, 2012
8222106	Nonvolatile semiconductor memory device, method of fabricating the nonvolatile semiconductor memory device and process of writing data on the nonvolatile semiconductor memory device	Jul. 17, 2012
8222114	Manufacturing approach for collector and a buried layer of bipolar transistor	Jul. 17, 2012
8129249	Integrated transistor, particularly for voltages and method for the production thereof	Mar. 6, 2012
8125045	Dielectric isolation type semiconductor device and manufacturing method therefor	Feb. 28, 2012
8084355	Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry	Dec. 27, 2011
8076208	Method for forming transistor with high breakdown voltage using pitch multiplication technique	Dec. 13, 2011
8071454	Method for manufacturing dielectric isolation type semiconductor device	Dec. 6, 2011
8030171	Method of forming element isolation film and nonvolatile semiconductor memory	Oct. 4, 2011
8030167	Varied impurity profile region formation for varying breakdown voltage of devices	Oct. 4, 2011
8021952	Integrated transistor, particularly for voltages and method for the production thereof	Sep. 20, 2011
7973345	Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a subst	Jul. 5, 2011
7968418	Apparatus and method for isolating integrated circuit components using deep trench isolation and shallow trench isolation	Jun. 28, 2011
7906403	Bipolar transistor and method of fabricating the same	Mar. 15, 2011
7872326	Array of vertical bipolar junction transistors, in particular selectors in a phase change memory device	Jan. 18, 2011
7871893	Method for non-selective shallow trench isolation reactive ion etch for patterning hybrid-oriented devices compatible with high-performance highly-integrated logic devices	Jan. 18, 2011
7855116	Nonvolatile semiconductor memory device and manufacturing method thereof	Dec. 21, 2010
7833875	Semiconductor device and method of fabricating the same	Nov. 16, 2010
7736976	Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands	Jun. 15, 2010
7736992	Isolation trench geometry for image sensors	Jun. 15, 2010
7737526	Isolated trench MOSFET in epi-less semiconductor sustrate	Jun. 15, 2010
7723227	Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry	May. 25, 2010
7682929	Method and structure for double lining for shallow trench isolation	Mar. 23, 2010
7611950	Method for forming shallow trench isolation in semiconductor device	Nov. 3, 2009
7595253	Method of forming the semiconductor device	Sep. 29, 2009
7579664	Semiconductor device with trench type device isolation layer and method for fabricating the same	Aug. 25, 2009
7541298	STI of a semiconductor device and fabrication method thereof	Jun. 2, 2009
7514715	Angled implant for trench isolation	Apr. 7, 2009
7498233	Method of forming an insulation layer structure having a concave surface and method of manufacturing a memory device using the same	Mar. 3, 2009
7485943	Dielectric isolation type semiconductor device and manufacturing method therefor	Feb. 3, 2009
7429505	Method of fabricating fin field effect transistor using isotropic etching technique	Sep. 30, 2008
7396732	Formation of deep trench airgaps and related applications	Jul. 8, 2008
7393731	Semiconductor device and method of manufacturing the same	Jul. 1, 2008
7354812	Multiple-depth STI trenches in integrated circuit fabrication	Apr. 8, 2008
7344949	Non-volatile memory device and method of fabricating the same	Mar. 18, 2008
7279381	Method for fabricating cell transistor of flash memory	Oct. 9, 2007
7247534	Silicon device on Si:C-OI and SGOI and method of manufacture	Jul. 24, 2007
7179691	Method for four direction low capacitance ESD protection	Feb. 20, 2007
7172914	Method of making uniform oxide layer	Feb. 6, 2007
7169654	Method of forming a semiconductor device	Jan. 30, 2007
7157324	Transistor structure having reduced transistor leakage attributes	Jan. 2, 2007