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Class Information
Number: 438/321
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Having heterojunction > Self-aligned > Utilizing dummy emitter
Description: Process for making a heterojunction bipolar transistor wherein a substitute emitter is formed or removed prior to the forming of the active emitter region of the device.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8633996 Image sensor having nonlinear response Jan. 21, 2014
8198119 Method for fabricating sensitive image sensor with non-uniform focal length Jun. 12, 2012
7927958 System and method for providing a self aligned bipolar transistor using a silicon nitride ring Apr. 19, 2011
7875908 Selective links in silicon hetero-junction bipolar transistors using carbon doping and method of forming same Jan. 25, 2011
7858481 Method for fabricating transistor with thinned channel Dec. 28, 2010
7838375 System and method for providing a polyemit module for a self aligned heterojunction bipolar transistor architecture Nov. 23, 2010
7776704 Method to build self-aligned NPN in advanced BiCMOS technology Aug. 17, 2010
7732292 Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide Jun. 8, 2010
7709338 BiCMOS devices with a self-aligned emitter and methods of fabricating such BiCMOS devices May. 4, 2010
7611954 Bipolar transistor self-alignment with raised extrinsic base extension and methods of forming same Nov. 3, 2009
7541249 Process for producing a base connection of a bipolar transistor Jun. 2, 2009
7399675 Electronic device including an array and process for forming the same Jul. 15, 2008
7378324 Selective links in silicon hetero-junction bipolar transistors using carbon doping and method of forming same May. 27, 2008
7291536 Fabricating a self-aligned bipolar transistor having increased manufacturability Nov. 6, 2007
7282418 Method for fabricating a self-aligned bipolar transistor without spacers Oct. 16, 2007
7247530 Ultrathin SOI transistor and method of making the same Jul. 24, 2007
7041564 Method for fabricating a self-aligned bipolar transistor May. 9, 2006
7033898 Method for fabricating a self-aligned bipolar transistor having recessed spacers Apr. 25, 2006
7022578 Heterojunction bipolar transistor using reverse emitter window Apr. 4, 2006
6979626 Method for fabricating a self-aligned bipolar transistor having increased manufacturability and related structure Dec. 27, 2005
6894328 Self-aligned bipolar transistor having recessed spacers and method for fabricating same May. 17, 2005
6881640 Fabrication method for heterojunction bipolar transistor Apr. 19, 2005
6869853 Fabrication of a bipolar transistor using a sacrificial emitter Mar. 22, 2005
6867080 Polysilicon tilting to prevent geometry effects during laser thermal annealing Mar. 15, 2005
6818520 Method for controlling critical dimension in an HBT emitter Nov. 16, 2004
6812107 Method for improved alignment tolerance in a bipolar transistor Nov. 2, 2004
6790722 Logic SOI structure, process and application for vertical bipolar transistor Sep. 14, 2004
6777302 Nitride pedestal for raised extrinsic base HBT process Aug. 17, 2004
6716711 Method for fabricating a self-aligned emitter in a bipolar transistor Apr. 6, 2004
6680235 Method for fabricating a selective eptaxial HBT emitter Jan. 20, 2004
6639257 Hetero-junction bipolar transistor having a dummy electrode Oct. 28, 2003
6617220 Method for fabricating an epitaxial base bipolar transistor with raised extrinsic base Sep. 9, 2003
6573540 Semiconductor device and method for fabricating the same Jun. 3, 2003
6569744 Method of converting a metal oxide semiconductor transistor into a bipolar transistor May. 27, 2003
6551889 Method of producing a SI-GE base heterojunction bipolar device Apr. 22, 2003
6534372 Method for fabricating a self-aligned emitter in a bipolar transistor Mar. 18, 2003
6482697 Method of forming a highly integrated non-volatile semiconductor memory device Nov. 19, 2002
6465317 Process for producing a bipolar transistor with self-aligned emitter and extrinsic base Oct. 15, 2002
6444536 Method for fabricating bipolar transistors Sep. 3, 2002
6403991 Semiconductor device and method for fabricating the same Jun. 11, 2002
6372594 Fabrication method of submicron gate using anisotropic etching Apr. 16, 2002
6323075 Method of fabricating semiconductor device Nov. 27, 2001
6265276 Structure and fabrication of bipolar transistor Jul. 24, 2001
6153919 Bipolar transistor with polysilicon dummy emitter Nov. 28, 2000
5994194 Self-aligned base ohmic metal for an HBT device cross-reference to related applications Nov. 30, 1999
5821149 Method of fabricating a heterobipolar transistor Oct. 13, 1998
5804487 Method of fabricating high .beta.HBT devices Sep. 8, 1998
5804476 Method of forming BiCMOS devices having mosfet and bipolar sections therein Sep. 8, 1998
5362658 Method for producing semiconductor device Nov. 8, 1994
5252500 Method of fabricating a semiconductor device Oct. 12, 1993

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