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Class Information
Number: 438/321
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Having heterojunction > Self-aligned > Utilizing dummy emitter
Description: Process for making a heterojunction bipolar transistor wherein a substitute emitter is formed or removed prior to the forming of the active emitter region of the device.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611954 |
Bipolar transistor self-alignment with raised extrinsic base extension and methods of forming same |
Nov. 3, 2009 |
| 7541249 |
Process for producing a base connection of a bipolar transistor |
Jun. 2, 2009 |
| 7399675 |
Electronic device including an array and process for forming the same |
Jul. 15, 2008 |
| 7378324 |
Selective links in silicon hetero-junction bipolar transistors using carbon doping and method of forming same |
May. 27, 2008 |
| 7291536 |
Fabricating a self-aligned bipolar transistor having increased manufacturability |
Nov. 6, 2007 |
| 7282418 |
Method for fabricating a self-aligned bipolar transistor without spacers |
Oct. 16, 2007 |
| 7247530 |
Ultrathin SOI transistor and method of making the same |
Jul. 24, 2007 |
| 7041564 |
Method for fabricating a self-aligned bipolar transistor |
May. 9, 2006 |
| 7033898 |
Method for fabricating a self-aligned bipolar transistor having recessed spacers |
Apr. 25, 2006 |
| 7022578 |
Heterojunction bipolar transistor using reverse emitter window |
Apr. 4, 2006 |
| 6979626 |
Method for fabricating a self-aligned bipolar transistor having increased manufacturability and related structure |
Dec. 27, 2005 |
| 6894328 |
Self-aligned bipolar transistor having recessed spacers and method for fabricating same |
May. 17, 2005 |
| 6881640 |
Fabrication method for heterojunction bipolar transistor |
Apr. 19, 2005 |
| 6869853 |
Fabrication of a bipolar transistor using a sacrificial emitter |
Mar. 22, 2005 |
| 6867080 |
Polysilicon tilting to prevent geometry effects during laser thermal annealing |
Mar. 15, 2005 |
| 6818520 |
Method for controlling critical dimension in an HBT emitter |
Nov. 16, 2004 |
| 6812107 |
Method for improved alignment tolerance in a bipolar transistor |
Nov. 2, 2004 |
| 6790722 |
Logic SOI structure, process and application for vertical bipolar transistor |
Sep. 14, 2004 |
| 6777302 |
Nitride pedestal for raised extrinsic base HBT process |
Aug. 17, 2004 |
| 6716711 |
Method for fabricating a self-aligned emitter in a bipolar transistor |
Apr. 6, 2004 |
| 6680235 |
Method for fabricating a selective eptaxial HBT emitter |
Jan. 20, 2004 |
| 6639257 |
Hetero-junction bipolar transistor having a dummy electrode |
Oct. 28, 2003 |
| 6617220 |
Method for fabricating an epitaxial base bipolar transistor with raised extrinsic base |
Sep. 9, 2003 |
| 6573540 |
Semiconductor device and method for fabricating the same |
Jun. 3, 2003 |
| 6569744 |
Method of converting a metal oxide semiconductor transistor into a bipolar transistor |
May. 27, 2003 |
| 6551889 |
Method of producing a SI-GE base heterojunction bipolar device |
Apr. 22, 2003 |
| 6534372 |
Method for fabricating a self-aligned emitter in a bipolar transistor |
Mar. 18, 2003 |
| 6482697 |
Method of forming a highly integrated non-volatile semiconductor memory device |
Nov. 19, 2002 |
| 6465317 |
Process for producing a bipolar transistor with self-aligned emitter and extrinsic base |
Oct. 15, 2002 |
| 6444536 |
Method for fabricating bipolar transistors |
Sep. 3, 2002 |
| 6403991 |
Semiconductor device and method for fabricating the same |
Jun. 11, 2002 |
| 6372594 |
Fabrication method of submicron gate using anisotropic etching |
Apr. 16, 2002 |
| 6323075 |
Method of fabricating semiconductor device |
Nov. 27, 2001 |
| 6265276 |
Structure and fabrication of bipolar transistor |
Jul. 24, 2001 |
| 6153919 |
Bipolar transistor with polysilicon dummy emitter |
Nov. 28, 2000 |
| 5994194 |
Self-aligned base ohmic metal for an HBT device cross-reference to related applications |
Nov. 30, 1999 |
| 5821149 |
Method of fabricating a heterobipolar transistor |
Oct. 13, 1998 |
| 5804487 |
Method of fabricating high .beta.HBT devices |
Sep. 8, 1998 |
| 5804476 |
Method of forming BiCMOS devices having mosfet and bipolar sections therein |
Sep. 8, 1998 |
| 5362658 |
Method for producing semiconductor device |
Nov. 8, 1994 |
| 5252500 |
Method of fabricating a semiconductor device |
Oct. 12, 1993 |
| 5166081 |
Method of producing a bipolar transistor |
Nov. 24, 1992 |
| 5093272 |
Manufacturing method for a self-aligned emitter-base-complex for heterobipolar transistors |
Mar. 3, 1992 |
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