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Class Information
Number: 438/320
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Having heterojunction > Self-aligned
Description: Process for making a heterojunction bipolar transistor wherein a previously formed device feature is utilized to make device regions in the desired registration to the previously formed feature.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8673707 |
Method for forming metal gate |
Mar. 18, 2014 |
| 8648391 |
SiGe heterojunction bipolar transistor with an improved breakdown voltage-cutoff frequency product |
Feb. 11, 2014 |
| 8613862 |
Method for manufacturing liquid discharge head substrate |
Dec. 24, 2013 |
| 8574994 |
HBT with emitter electrode having planar side walls |
Nov. 5, 2013 |
| 8486797 |
Bipolar junction transistor with epitaxial contacts |
Jul. 16, 2013 |
| 8133791 |
Method of manufacturing a bipolar transistor and bipolar transistor obtained therewith |
Mar. 13, 2012 |
| 8048734 |
Bipolar transistor and method for making same |
Nov. 1, 2011 |
| 7935606 |
Transistor manufacture |
May. 3, 2011 |
| 7923340 |
Method to reduce collector resistance of a bipolar transistor and integration into a standard CMOS flow |
Apr. 12, 2011 |
| 7892943 |
Isolation trenches for memory devices |
Feb. 22, 2011 |
| 7875523 |
HBT with emitter electrode having planar side walls |
Jan. 25, 2011 |
| 7846806 |
System and method for providing a self aligned silicon germanium (SiGe) heterojunction bipolar transistor using a mesa emitter-base architecture |
Dec. 7, 2010 |
| 7838375 |
System and method for providing a polyemit module for a self aligned heterojunction bipolar transistor architecture |
Nov. 23, 2010 |
| 7732292 |
Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide |
Jun. 8, 2010 |
| 7709338 |
BiCMOS devices with a self-aligned emitter and methods of fabricating such BiCMOS devices |
May. 4, 2010 |
| 7696034 |
Methods of base formation in a BiCOMS process |
Apr. 13, 2010 |
| 7651919 |
Bandgap and recombination engineered emitter layers for SiGe HBT performance optimization |
Jan. 26, 2010 |
| 7615457 |
Method of fabricating self-aligned bipolar transistor having tapered collector |
Nov. 10, 2009 |
| 7615455 |
Integrated circuit bipolar transistor |
Nov. 10, 2009 |
| 7611955 |
Method of forming a bipolar transistor and semiconductor component thereof |
Nov. 3, 2009 |
| 7598148 |
Non-self-aligned heterojunction bipolar transistor and a method for preparing a non-self-aligned heterojunction bipolar transistor |
Oct. 6, 2009 |
| 7557010 |
Method to improve writer leakage in a SiGe bipolar device |
Jul. 7, 2009 |
| 7521313 |
Thin film device active matrix by pattern reversal process |
Apr. 21, 2009 |
| 7498620 |
Integration of phosphorus emitter in an NPN device in a BiCMOS process |
Mar. 3, 2009 |
| 7465969 |
Bipolar transistor and method for fabricating the same |
Dec. 16, 2008 |
| 7422951 |
Method of fabricating self-aligned bipolar transistor |
Sep. 9, 2008 |
| 7390721 |
Methods of base formation in a BiCMOS process |
Jun. 24, 2008 |
| 7368764 |
Heterojunction bipolar transistor and method to make a heterojunction bipolar transistor |
May. 6, 2008 |
| 7354820 |
Heterojunction bipolar transistor with dielectric assisted planarized contacts and method for fabricating |
Apr. 8, 2008 |
| 7303968 |
Semiconductor device and method having multiple subcollectors formed on a common wafer |
Dec. 4, 2007 |
| 7262483 |
Semiconductor device and method for manufacturing the same |
Aug. 28, 2007 |
| 7190047 |
Transistors and methods for making the same |
Mar. 13, 2007 |
| 7186582 |
Process for deposition of semiconductor films |
Mar. 6, 2007 |
| 7166517 |
Semiconductor device and method of manufacture thereof |
Jan. 23, 2007 |
| 7151035 |
Semiconductor device and manufacturing method thereof |
Dec. 19, 2006 |
| 7118981 |
Method of fabricating an integrated silicon-germanium heterobipolar transistor and an integrated silicon-germanium heterobipolar transistor |
Oct. 10, 2006 |
| 7098114 |
Method for forming cmos device with self-aligned contacts and region formed using salicide process |
Aug. 29, 2006 |
| 7091099 |
Bipolar transistor and method for fabricating the same |
Aug. 15, 2006 |
| 7087940 |
Structure and method of forming bipolar transistor having a self-aligned raised extrinsic base using self-aligned etch stop layer |
Aug. 8, 2006 |
| 7049201 |
Method and apparatus for a heterojunction bipolar transistor using self-aligned epitaxy |
May. 23, 2006 |
| 7037799 |
Breakdown voltage adjustment for bipolar transistors |
May. 2, 2006 |
| 7037798 |
Bipolar transistor structure with self-aligned raised extrinsic base and methods |
May. 2, 2006 |
| 7022578 |
Heterojunction bipolar transistor using reverse emitter window |
Apr. 4, 2006 |
| 7008815 |
Method of manufacturing a self-aligned guard ring of a photo diode |
Mar. 7, 2006 |
| 6979626 |
Method for fabricating a self-aligned bipolar transistor having increased manufacturability and related structure |
Dec. 27, 2005 |
| 6962842 |
Method of removing a sacrificial emitter feature in a BICMOS process with a super self-aligned BJT |
Nov. 8, 2005 |
| 6958253 |
Process for deposition of semiconductor films |
Oct. 25, 2005 |
| 6924202 |
Heterojunction bipolar transistor with self-aligned emitter and sidewall base contact |
Aug. 2, 2005 |
| 6924201 |
Heterojunction bipolar transistor and method of producing the same |
Aug. 2, 2005 |
| 6911369 |
Discontinuity prevention for SiGe deposition |
Jun. 28, 2005 |
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