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Class Information
Number: 438/319
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Having heterojunction > Including isolation structure > Air isolation (e.g., mesa, etc.)
Description: Process for making a heterojunction bipolar transistor wherein the emitter or collector region of the device is a raised feature with respect to the plane of the substrate.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8710549 MOS device for eliminating floating body effects and self-heating effects Apr. 29, 2014
8692318 Trench MOS structure and method for making the same Apr. 8, 2014
8466033 Light emitting diode and manufacturing method thereof Jun. 18, 2013
8294194 Nonvolatile semiconductor memory device and manufacturing method of the same Oct. 23, 2012
8264060 Method of sealing an air gap in a layer of a semiconductor structure and semiconductor structure Sep. 11, 2012
8084794 Semiconductor device and manufacturing method thereof Dec. 27, 2011
8071459 Method of sealing an air gap in a layer of a semiconductor structure and semiconductor structure Dec. 6, 2011
8043931 Methods for forming multi-layer silicon structures Oct. 25, 2011
8022485 Transistor structure having reduced input capacitance Sep. 20, 2011
8022501 Semiconductor device and method for isolating the same Sep. 20, 2011
7985977 Sacrificial pillar dielectric platform Jul. 26, 2011
7947566 Method and apparatus for making coplanar isolated regions of different semiconductor materials on a substrate May. 24, 2011
7892943 Isolation trenches for memory devices Feb. 22, 2011
7868335 Modulation doped super-lattice sub-collector for high-performance HBTs and BJTs Jan. 11, 2011
7846806 System and method for providing a self aligned silicon germanium (SiGe) heterojunction bipolar transistor using a mesa emitter-base architecture Dec. 7, 2010
7829449 Process for fabricating an electronic integrated circuit and electronic integrated circuit thus obtained Nov. 9, 2010
7821014 Semiconductor device and manufacturing method thereof with a recessed backside substrate for breakdown voltage blocking Oct. 26, 2010
7759153 Method of fabricating electric field sensor having electric field shield Jul. 20, 2010
7675054 Phase change memory devices and methods for fabricating the same Mar. 9, 2010
7666754 Method and system for forming an air gap structure Feb. 23, 2010
7553756 Process for producing semiconductor integrated circuit device Jun. 30, 2009
7531444 Method to create air gaps using non-plasma processes to damage ILD materials May. 12, 2009
7504699 Fabrication of a semiconductor device with air gaps for ultra-low capacitance interconnections Mar. 17, 2009
7482261 Interconnect structure for BEOL applications Jan. 27, 2009
7462547 Method of fabricating a bipolar transistor having reduced collector-base capacitance Dec. 9, 2008
7396757 Interconnect structure with dielectric air gaps Jul. 8, 2008
7358179 Method of manufacturing semiconductor device including air space formed around gate electrode Apr. 15, 2008
7214594 Method of making semiconductor device using a novel interconnect cladding layer May. 8, 2007
7138329 Air gap for tungsten/aluminum plug applications Nov. 21, 2006
7112866 Method to form a cross network of air gaps within IMD layer Sep. 26, 2006
7094669 Structure and method of liner air gap formation Aug. 22, 2006
6998695 Semiconductor device having a mushroom gate with hollow space Feb. 14, 2006
6964907 Method of etching a lateral trench under an extrinsic base and improved bipolar transistor Nov. 15, 2005
6946355 Method for producing a hetero-bipolar transistor and hetero-bipolar transistor Sep. 20, 2005
6924203 Double HBT base metal micro-bridge Aug. 2, 2005
6924201 Heterojunction bipolar transistor and method of producing the same Aug. 2, 2005
6905929 Single poly EPROM cell having smaller size and improved data retention compatible with advanced CMOS process Jun. 14, 2005
6890828 Method for supporting a bond pad in a multilevel interconnect structure and support structure formed thereby May. 10, 2005
6867079 Method for manufacturing semiconductor device Mar. 15, 2005
6730571 Method to form a cross network of air gaps within IMD layer May. 4, 2004
6724055 Semiconductor structure having an interconnect and method of producing the semiconductor structure Apr. 20, 2004
6645819 Self-aligned fabrication method for a semiconductor device Nov. 11, 2003
6605519 Method for thin film lift-off processes using lateral extended etching masks and device Aug. 12, 2003
6589848 Photodetector device and method for manufacturing the same Jul. 8, 2003
6570217 Semiconductor device and method of manufacturing the same May. 27, 2003
6492238 Bipolar transistor with raised extrinsic base fabricated in an integrated BiCMOS circuit Dec. 10, 2002
6472285 Method for fabricating high-Q inductance device in monolithic technology Oct. 29, 2002
6448177 Method of making a semiconductor device having a dual damascene interconnect spaced from a support structure Sep. 10, 2002
6426267 Method for fabricating high-Q inductance device in monolithic technology Jul. 30, 2002
6406965 Method of fabricating HBT devices Jun. 18, 2002

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