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Class Information
Number: 438/310
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Gettering of semiconductor substrate
Description: Process having a step of gettering the semiconductor substrate.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7573083 Transistor type ferroelectric memory and method of manufacturing the same Aug. 11, 2009
7569693 Naphthalene-based semiconductor materials and methods of preparing and use thereof Aug. 4, 2009
7498620 Integration of phosphorus emitter in an NPN device in a BiCMOS process Mar. 3, 2009
7422951 Method of fabricating self-aligned bipolar transistor Sep. 9, 2008
7297630 Methods of fabricating via hole and trench Nov. 20, 2007
7297992 Method and structure for integration of phosphorous emitter in an NPN device in a BiCMOS process Nov. 20, 2007
7211482 Method of forming a memory cell having self-aligned contact regions May. 1, 2007
7169664 Method of reducing wafer contamination by removing under-metal layers at the wafer edge Jan. 30, 2007
7169674 Complementary metal oxide semiconductor (CMOS) gate stack with high dielectric constant gate dielectric and integrated diffusion barrier Jan. 30, 2007
7135351 Method for controlling of thermal donor formation in high resistivity CZ silicon Nov. 14, 2006
6958264 Scribe lane for gettering of contaminants on SOI wafers and gettering method Oct. 25, 2005
6897084 Control of oxygen precipitate formation in high resistivity CZ silicon May. 24, 2005
6838321 SEMICONDUCTOR SUBSTRATE WITH DEFECTS REDUCED OR REMOVED AND METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE CAPABLE OF BIDIRECTIONALLY RETAINING BREAKDOWN VOLTAGE AND METHOD OF MANU Jan. 4, 2005
6815282 Silicon on insulator field effect transistor having shared body contact Nov. 9, 2004
6797547 Bladed silicon-on-insulator semiconductor devices and method of making Sep. 28, 2004
6784051 Method for fabricating semiconductor device Aug. 31, 2004
6777272 Method of manufacturing an active matrix display Aug. 17, 2004
6703281 Differential laser thermal process with disposable spacers Mar. 9, 2004
6693015 Method for improved processing and etchback of a container capacitor Feb. 17, 2004
6670259 Inert atom implantation method for SOI gettering Dec. 30, 2003
6551866 Method of manufacturing a semiconductor memory device Apr. 22, 2003
6433380 Integrated circuit capacitors having composite titanium oxide and tantalum pentoxide dielectric layers therein Aug. 13, 2002
6344384 Method of production of semiconductor device Feb. 5, 2002
6339011 Method of forming semiconductive active area having a proximity gettering region therein and method of processing a monocrystalline silicon substrate to have a proximity gettering region Jan. 15, 2002
6309938 Deuterated bipolar transistor and method of manufacture thereof Oct. 30, 2001
6165867 Method to reduce aspect ratio of DRAM peripheral contact Dec. 26, 2000
6140172 Conductive electrical contacts, capacitors, DRAMs, and integrated circuitry, and methods of forming conductive electrical contacts, capacitors, DRAMs and integrated circuitry Oct. 31, 2000
6114223 Gettering regions and methods of forming gettering regions within a semiconductor wafer Sep. 5, 2000
6090645 Fabrication method of semiconductor device with gettering treatment Jul. 18, 2000
6051474 Negative biasing of isolation trench fill to attract mobile positive ions away from bipolar device regions Apr. 18, 2000
6048778 Gettering regions and methods of forming gettering regions within a semiconductor wafer Apr. 11, 2000
6043112 IGBT with reduced forward voltage drop and reduced switching loss Mar. 28, 2000
5976956 Method of controlling dopant concentrations using transient-enhanced diffusion prior to gate formation in a device Nov. 2, 1999
5895236 Semiconductor device fabricating method having a gettering step Apr. 20, 1999
5892292 Getterer for multi-layer wafers and method for making same Apr. 6, 1999
5773356 Gettering regions and methods of forming gettering regions within a semiconductor wafer Jun. 30, 1998
5753563 Method of removing particles by adhesive May. 19, 1998
5376562 Method for forming vertical transistor structures having bipolar and MOS devices Dec. 27, 1994
5137839 Method of manufacturing a bipolar transistor having polysilicon layer which serves as an emitter electrode and passivating dangling bonds Aug. 11, 1992
5102810 Method for controlling the switching speed of bipolar power devices Apr. 7, 1992
5098852 Method of manufacturing a semiconductor device by mega-electron volt ion implantation Mar. 24, 1992
4796073 Front-surface N+ gettering techniques for reducing noise in integrated circuits Jan. 3, 1989
4771009 Process for manufacturing semiconductor devices by implantation and diffusion Sep. 13, 1988
4766086 Method of gettering a semiconductor device and forming an isolation region therein Aug. 23, 1988
4732874 Removing metal precipitates from semiconductor devices Mar. 22, 1988
4717680 Fabrication of vertical NPN and PNP bipolar transistors in monolithic substrate Jan. 5, 1988
4597804 Methods of forming denuded zone in wafer by intrinsic gettering and forming bipolar transistor therein Jul. 1, 1986
4575922 Method of fabricating integrated circuits incorporating steps to detect presence of gettering sites Mar. 18, 1986
4505759 Method for making a conductive silicon substrate by heat treatment of oxygenated and lightly doped silicon single crystals Mar. 19, 1985
4498227 Wafer fabrication by implanting through protective layer Feb. 12, 1985

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