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Class Information
Number: 438/310
Name: Semiconductor device manufacturing: process > Forming bipolar transistor by formation or alteration of semiconductive active regions > Gettering of semiconductor substrate
Description: Process having a step of gettering the semiconductor substrate.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8551837 Methods of fabricating high-K metal gate devices Oct. 8, 2013
8546862 Memory cell, an array, and a method for manufacturing a memory cell Oct. 1, 2013
8546928 Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof Oct. 1, 2013
8399280 Method for protecting an integrated circuit chip against laser attacks Mar. 19, 2013
8382894 Process for the preparation of silicon wafer with reduced slip and warpage Feb. 26, 2013
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8293613 Gettering structures and methods and their application Oct. 23, 2012
8263876 Conductive substrate structure with conductive channels formed by using a two-sided cut approach and a method for manufacturing the same Sep. 11, 2012
8207048 Method for producing ordered nanostructures Jun. 26, 2012
8164096 Organic light emitting diode flat panel display device having uniform electrical characteristics and method of manufacturing the same Apr. 24, 2012
8143910 Semiconductor integrated circuit and method of testing the same Mar. 27, 2012
8138066 Dislocation engineering using a scanned laser Mar. 20, 2012
8133769 Methods for gettering in semiconductor substrate Mar. 13, 2012
8093089 Methods of manufacturing image sensors including gettering regions Jan. 10, 2012
7799660 Method for manufacturing SOI substrate Sep. 21, 2010
7737004 Multilayer gettering structure for semiconductor device and method Jun. 15, 2010
7573083 Transistor type ferroelectric memory and method of manufacturing the same Aug. 11, 2009
7569693 Naphthalene-based semiconductor materials and methods of preparing and use thereof Aug. 4, 2009
7498620 Integration of phosphorus emitter in an NPN device in a BiCMOS process Mar. 3, 2009
7422951 Method of fabricating self-aligned bipolar transistor Sep. 9, 2008
7297630 Methods of fabricating via hole and trench Nov. 20, 2007
7297992 Method and structure for integration of phosphorous emitter in an NPN device in a BiCMOS process Nov. 20, 2007
7211482 Method of forming a memory cell having self-aligned contact regions May. 1, 2007
7169664 Method of reducing wafer contamination by removing under-metal layers at the wafer edge Jan. 30, 2007
7169674 Complementary metal oxide semiconductor (CMOS) gate stack with high dielectric constant gate dielectric and integrated diffusion barrier Jan. 30, 2007
7135351 Method for controlling of thermal donor formation in high resistivity CZ silicon Nov. 14, 2006
6958264 Scribe lane for gettering of contaminants on SOI wafers and gettering method Oct. 25, 2005
6897084 Control of oxygen precipitate formation in high resistivity CZ silicon May. 24, 2005
6838321 SEMICONDUCTOR SUBSTRATE WITH DEFECTS REDUCED OR REMOVED AND METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE CAPABLE OF BIDIRECTIONALLY RETAINING BREAKDOWN VOLTAGE AND METHOD OF MANU Jan. 4, 2005
6815282 Silicon on insulator field effect transistor having shared body contact Nov. 9, 2004
6797547 Bladed silicon-on-insulator semiconductor devices and method of making Sep. 28, 2004
6784051 Method for fabricating semiconductor device Aug. 31, 2004
6777272 Method of manufacturing an active matrix display Aug. 17, 2004
6703281 Differential laser thermal process with disposable spacers Mar. 9, 2004
6693015 Method for improved processing and etchback of a container capacitor Feb. 17, 2004
6670259 Inert atom implantation method for SOI gettering Dec. 30, 2003
6551866 Method of manufacturing a semiconductor memory device Apr. 22, 2003
6433380 Integrated circuit capacitors having composite titanium oxide and tantalum pentoxide dielectric layers therein Aug. 13, 2002
6344384 Method of production of semiconductor device Feb. 5, 2002
6339011 Method of forming semiconductive active area having a proximity gettering region therein and method of processing a monocrystalline silicon substrate to have a proximity gettering region Jan. 15, 2002
6309938 Deuterated bipolar transistor and method of manufacture thereof Oct. 30, 2001
6165867 Method to reduce aspect ratio of DRAM peripheral contact Dec. 26, 2000
6140172 Conductive electrical contacts, capacitors, DRAMs, and integrated circuitry, and methods of forming conductive electrical contacts, capacitors, DRAMs and integrated circuitry Oct. 31, 2000
6114223 Gettering regions and methods of forming gettering regions within a semiconductor wafer Sep. 5, 2000
6090645 Fabrication method of semiconductor device with gettering treatment Jul. 18, 2000
6051474 Negative biasing of isolation trench fill to attract mobile positive ions away from bipolar device regions Apr. 18, 2000
6048778 Gettering regions and methods of forming gettering regions within a semiconductor wafer Apr. 11, 2000
6043112 IGBT with reduced forward voltage drop and reduced switching loss Mar. 28, 2000
5976956 Method of controlling dopant concentrations using transient-enhanced diffusion prior to gate formation in a device Nov. 2, 1999
5895236 Semiconductor device fabricating method having a gettering step Apr. 20, 1999

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