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Class Information
Number: 438/308
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Radiation or energy treatment modifying properties of semiconductor regions of substrate (e.g., thermal, corpuscular, electromagnetic, etc.)
Description: Process for making an insulated gate field effect transistor having a step of irradiating the semiconductor substrate to alter the electrical properties of semiconductive regions thereof.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7460932 |
Support of deep power savings mode and partial good in a thermal management system |
Dec. 2, 2008 |
| 7442615 |
Semiconductor processing system and method |
Oct. 28, 2008 |
| 7439114 |
Laser anneal method of a semiconductor layer |
Oct. 21, 2008 |
| 7435635 |
Method for crystallizing semiconductor material |
Oct. 14, 2008 |
| 7435658 |
Method of manufacturing metal-oxide-semiconductor transistor |
Oct. 14, 2008 |
| 7422987 |
Method for manufacturing semiconductor device |
Sep. 9, 2008 |
| 7419860 |
Method of fabricating a semiconductor thin film |
Sep. 2, 2008 |
| 7419861 |
Laser irradiation apparatus, laser irradiation method, semiconductor device, and method of manufacturing a semiconductor device |
Sep. 2, 2008 |
| 7410878 |
Polysilicon film having smooth surface and method of forming the same |
Aug. 12, 2008 |
| 7381598 |
Insulated gate semiconductor device and process for fabricating the same |
Jun. 3, 2008 |
| 7361566 |
Method of forming poly-silicon thin film transistors |
Apr. 22, 2008 |
| 7351638 |
Scanning laser thermal annealing |
Apr. 1, 2008 |
| 7335539 |
Method for making thin-film semiconductor device |
Feb. 26, 2008 |
| 7329620 |
System and method for providing an integrated circuit having increased radiation hardness and reliability |
Feb. 12, 2008 |
| 7326623 |
Method of manufacturing display device |
Feb. 5, 2008 |
| 7316960 |
Strain enhanced ultra shallow junction formation |
Jan. 8, 2008 |
| 7303967 |
Method for fabricating transistor of semiconductor device |
Dec. 4, 2007 |
| 7300516 |
Laser irradiation method and laser irradiation apparatus, and method for fabricating semiconductor device |
Nov. 27, 2007 |
| 7279387 |
Method for fabricating asymmetric semiconductor device |
Oct. 9, 2007 |
| 7273774 |
Method for making thin-film semiconductor device |
Sep. 25, 2007 |
| 7262106 |
Absorber layer for DSA processing |
Aug. 28, 2007 |
| 7259056 |
Method for manufacturing semiconductor device |
Aug. 21, 2007 |
| 7259082 |
Method of manufacturing semiconductor device |
Aug. 21, 2007 |
| 7259103 |
Fabrication method of polycrystalline silicon TFT |
Aug. 21, 2007 |
| 7241650 |
Method of manufacturing a polysilicon layer and a mask used therein |
Jul. 10, 2007 |
| 7226823 |
Semiconductor device and method of manufacturing the same |
Jun. 5, 2007 |
| 7226826 |
Semiconductor device having multiple work functions and method of manufacture therefor |
Jun. 5, 2007 |
| 7223665 |
Method for manufacturing dielectric thin film capacitor |
May. 29, 2007 |
| 7211482 |
Method of forming a memory cell having self-aligned contact regions |
May. 1, 2007 |
| 7205215 |
Fabrication method of thin film transistor |
Apr. 17, 2007 |
| 7192818 |
Polysilicon thin film fabrication method |
Mar. 20, 2007 |
| 7189623 |
Semiconductor processing method and field effect transistor |
Mar. 13, 2007 |
| 7189624 |
Fabrication method for a semiconductor device including a semiconductor substrate formed with a shallow impurity region |
Mar. 13, 2007 |
| 7169657 |
Process for laser processing and apparatus for use in the same |
Jan. 30, 2007 |
| 7166505 |
Method for making a semiconductor device having a high-k gate dielectric |
Jan. 23, 2007 |
| 7160784 |
Method of manufacturing a semiconductor film with little warp |
Jan. 9, 2007 |
| 7160764 |
Laser annealing method and semiconductor device fabricating method |
Jan. 9, 2007 |
| 7153749 |
Method of tuning threshold voltages of interdiffusible structures |
Dec. 26, 2006 |
| 7151033 |
Method for manufacturing a semiconductor device having a low junction leakage current |
Dec. 19, 2006 |
| 7148091 |
Method of manufacturing thin film transistor |
Dec. 12, 2006 |
| 7138306 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device |
Nov. 21, 2006 |
| 7135387 |
Method of manufacturing semiconductor element |
Nov. 14, 2006 |
| 7132343 |
Method and apparatus for manufacturing display panel |
Nov. 7, 2006 |
| 7132375 |
Method of manufacturing a semiconductor device by crystallization of a semiconductor region by use of a continuous wave laser beam through the substrate |
Nov. 7, 2006 |
| 7129141 |
Method for manufacturing a semiconductor device having a low junction leakage current |
Oct. 31, 2006 |
| 7122435 |
Methods, systems and structures for forming improved transistors |
Oct. 17, 2006 |
| 7115435 |
Manufacturing method for wiring substrates |
Oct. 3, 2006 |
| 7112499 |
Dual step source/drain extension junction anneal to reduce the junction depth: multiple-pulse low energy laser anneal coupled with rapid thermal anneal |
Sep. 26, 2006 |
| 7109087 |
Absorber layer for DSA processing |
Sep. 19, 2006 |
| 7109085 |
Etching process to avoid polysilicon notching |
Sep. 19, 2006 |
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