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Class Information
Number: 438/306
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Self-aligned > Source or drain doping > Plural doping steps
Description: Process including multiple steps of introducing dopant species into the semiconductive regions of the substrate.


Sub-classes under this class:

Class Number Class Name Patents
438/307 Using same conductivity-type dopant 410


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
7618870 Non-uniformly doped high voltage drain-extended transistor and method of manufacture thereof Nov. 17, 2009
7608512 Integrated circuit structure with improved LDMOS design Oct. 27, 2009
7601600 Power semiconductor device and method for manufacturing the same Oct. 13, 2009
7585737 Method of manufacturing double diffused drains in semiconductor devices Sep. 8, 2009
7585739 Semiconductor device and method of fabricating the same Sep. 8, 2009
7582517 Method for making split dual gate field effect transistor Sep. 1, 2009
7579651 Semiconductor device Aug. 25, 2009
7573098 Transistors fabricated using a reduced cost CMOS process Aug. 11, 2009
7566934 Semiconductor device to suppress leak current at an end of an isolation film Jul. 28, 2009
7564056 Method for manufacturing a semiconductor device Jul. 21, 2009
7560324 Drain extended MOS transistors and methods for making the same Jul. 14, 2009
7553733 Isolated LDMOS IC technology Jun. 30, 2009
7544573 Semiconductor device including MOS field effect transistor having offset spacers or gate sidewall films on either side of gate electrode and method of manufacturing the same Jun. 9, 2009
7534667 Structure and method for fabrication of deep junction silicon-on-insulator transistors May. 19, 2009
7524715 Memory cell transistor having different source/drain junction profiles connected to DC node and BC node and manufacturing method thereof Apr. 28, 2009
7514329 Robust DEMOS transistors and method for making the same Apr. 7, 2009
7494885 Disposable spacer process for field effect transistor fabrication Feb. 24, 2009
7491616 Method of manufacturing a semiconductor device including dopant introduction Feb. 17, 2009
7488638 Method for fabricating a voltage-stable PMOSFET semiconductor structure Feb. 10, 2009
7485536 Abrupt junction formation by atomic layer epitaxy of in situ delta doped dopant diffusion barriers Feb. 3, 2009
7482218 Low-capacitance input/output and electrostatic discharge circuit for protecting an integrated circuit from electrostatic discharge Jan. 27, 2009
7470593 Method for manufacturing a cell transistor of a semiconductor memory device Dec. 30, 2008
7468303 Semiconductor device and manufacturing method thereof Dec. 23, 2008
7465637 Method for manufacturing semiconductor device Dec. 16, 2008
7449386 Manufacturing method for semiconductor device to mitigate short channel effects Nov. 11, 2008
7446008 Method for fabricating silicide layers for semiconductor device Nov. 4, 2008
7442613 Methods of forming an asymmetric field effect transistor Oct. 28, 2008
7435636 Fabrication of self-aligned gallium arsenide MOSFETs using damascene gate methods Oct. 14, 2008
7416950 MOS transistor forming method Aug. 26, 2008
7408222 Charge trapping device and method of producing the charge trapping device Aug. 5, 2008
7405117 Method of fabricating a lateral double-diffused MOSFET (LDMOS) transistor Jul. 29, 2008
7402451 Optimized transistor for imager device Jul. 22, 2008
7402485 Method of forming a semiconductor device Jul. 22, 2008
7396713 Structure and method for forming asymmetrical overlap capacitance in field effect transistors Jul. 8, 2008
7384844 Method of fabricating flash memory device Jun. 10, 2008
7361562 Method of manufacturing semiconductor device Apr. 22, 2008
7351622 Methods of forming semiconductor device Apr. 1, 2008
7348233 Methods for fabricating a CMOS device including silicide contacts Mar. 25, 2008
7344947 Methods of performance improvement of HVMOS devices Mar. 18, 2008
7338871 Method for fabricating semiconductor device Mar. 4, 2008
RE40138 Method for improving hot carrier lifetime via a nitrogen implantation procedure performed before or after a Teos liner deposition Mar. 4, 2008
7335543 MOS device for high voltage operation and method of manufacture Feb. 26, 2008
7335563 Rotated field effect transistors and method of manufacture Feb. 26, 2008
7320921 Smart grading implant with diffusion retarding implant for making integrated circuit chips Jan. 22, 2008
7321151 Semiconductor device and method of fabricating the same Jan. 22, 2008
7315062 Semiconductor device, mask for impurity implantation, and method of fabricating the semiconductor device Jan. 1, 2008
7314803 Method for producing a semiconductor structure Jan. 1, 2008
7309633 Semiconductor device including MOS field effect transistor having offset spacers or gate sidewall films on either side of gate electrode and method of manufacturing the same Dec. 18, 2007
7309901 Field effect transistors (FETs) with multiple and/or staircase silicide Dec. 18, 2007
7303952 Method for fabricating doped polysilicon lines Dec. 4, 2007

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