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Class Information
Number: 438/305
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Self-aligned > Source or drain doping > Utilizing gate sidewall structure > Plural doping steps
Description: Process including multiple steps of introducing dopant species into the semiconductive regions of the substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618869 |
Manufacturing method for increasing product yield of memory devices suffering from source/drain junction leakage |
Nov. 17, 2009 |
| 7611951 |
Method of fabricating MOS transistor having epitaxial region |
Nov. 3, 2009 |
| 7608512 |
Integrated circuit structure with improved LDMOS design |
Oct. 27, 2009 |
| 7605045 |
Field effect transistors and methods for fabricating the same |
Oct. 20, 2009 |
| 7605038 |
Semiconductor device and manufacturing method thereof |
Oct. 20, 2009 |
| 7602014 |
Superjunction power MOSFET |
Oct. 13, 2009 |
| 7601635 |
Method of manufacturing a semiconductor device |
Oct. 13, 2009 |
| 7601599 |
Semiconductor device and method for manufacturing the same |
Oct. 13, 2009 |
| 7601598 |
Reverse metal process for creating a metal silicide transistor gate structure |
Oct. 13, 2009 |
| 7598147 |
Method of forming CMOS with Si:C source/drain by laser melting and recrystallization |
Oct. 6, 2009 |
| 7598146 |
Self-aligned gate and method |
Oct. 6, 2009 |
| 7585720 |
Dual stress liner device and method |
Sep. 8, 2009 |
| 7582520 |
Method of fabricating complementary metal-oxide-semiconductor transistor and metal-oxide-semiconductor transistor |
Sep. 1, 2009 |
| 7579246 |
Semiconductor device manufacturing method including oblique ion implantation process and reticle pattern forming method |
Aug. 25, 2009 |
| 7572706 |
Source/drain stressor and method therefor |
Aug. 11, 2009 |
| 7572697 |
Method of manufacturing flash memory device |
Aug. 11, 2009 |
| 7569444 |
Transistor and method for manufacturing thereof |
Aug. 4, 2009 |
| 7557022 |
Implantation of carbon and/or fluorine in NMOS fabrication |
Jul. 7, 2009 |
| 7544556 |
Process for forming CMOS devices using removable spacers |
Jun. 9, 2009 |
| 7544553 |
Integration scheme for fully silicided gate |
Jun. 9, 2009 |
| 7541210 |
Method for fabricating CMOS image sensor |
Jun. 2, 2009 |
| 7534707 |
MOS Transistors having inverted T-shaped gate electrodes and fabrication methods thereof |
May. 19, 2009 |
| 7524715 |
Memory cell transistor having different source/drain junction profiles connected to DC node and BC node and manufacturing method thereof |
Apr. 28, 2009 |
| 7524682 |
Method for monitoring temperature in thermal process |
Apr. 28, 2009 |
| 7514332 |
Semiconductor device and method for manufacturing the same |
Apr. 7, 2009 |
| 7510955 |
Method of fabricating multi-fin field effect transistor |
Mar. 31, 2009 |
| 7504309 |
Pre-silicide spacer removal |
Mar. 17, 2009 |
| 7504293 |
Fabrication method for semiconductor device |
Mar. 17, 2009 |
| 7501322 |
Methods of forming non-volatile memory devices having trenches |
Mar. 10, 2009 |
| 7494885 |
Disposable spacer process for field effect transistor fabrication |
Feb. 24, 2009 |
| 7491616 |
Method of manufacturing a semiconductor device including dopant introduction |
Feb. 17, 2009 |
| 7485905 |
Electrostatic discharge protection device |
Feb. 3, 2009 |
| 7485536 |
Abrupt junction formation by atomic layer epitaxy of in situ delta doped dopant diffusion barriers |
Feb. 3, 2009 |
| 7482212 |
Semiconductor device and manufacturing method thereof |
Jan. 27, 2009 |
| 7479434 |
Semiconductor device and method of manufacturing the same |
Jan. 20, 2009 |
| 7473608 |
N-channel MOSFETs comprising dual stressors, and methods for forming the same |
Jan. 6, 2009 |
| 7473607 |
Method of manufacturing a multi-workfunction gates for a CMOS circuit |
Jan. 6, 2009 |
| 7468305 |
Forming pocket and LDD regions using separate masks |
Dec. 23, 2008 |
| 7468303 |
Semiconductor device and manufacturing method thereof |
Dec. 23, 2008 |
| 7462539 |
Direct tunneling memory with separated transistor and tunnel areas |
Dec. 9, 2008 |
| 7456062 |
Method of forming a semiconductor device |
Nov. 25, 2008 |
| 7452780 |
Method of forming a stable transistor by dual source/drain implantation |
Nov. 18, 2008 |
| 7449386 |
Manufacturing method for semiconductor device to mitigate short channel effects |
Nov. 11, 2008 |
| 7446004 |
Method for reducing overlap capacitance in field effect transistors |
Nov. 4, 2008 |
| 7445979 |
Method of fabricating isolated semiconductor devices in epi-less substrate |
Nov. 4, 2008 |
| 7442602 |
Methods of fabricating phase change memory cells having a cell diode and a bottom electrode self-aligned with each other |
Oct. 28, 2008 |
| 7439123 |
Low resistance contact semiconductor device structure |
Oct. 21, 2008 |
| 7432168 |
Method for fabricating semiconductor device with thin gate spacer |
Oct. 7, 2008 |
| 7432146 |
Semiconductor device and manufacturing method thereof |
Oct. 7, 2008 |
| 7411245 |
Spacer barrier structure to prevent spacer voids and method for forming the same |
Aug. 12, 2008 |
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