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Class Information
Number: 438/301
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Self-aligned > Source or drain doping
Description: Process having a step for the self-aligned introduction of electrically active dopant species into the semiconductor regions of the substrate to form the transistor source or drain regions or portions thereof.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7605407 |
Composite stressors with variable element atomic concentrations in MOS devices |
Oct. 20, 2009 |
| 7605043 |
Semiconductor device and manufacturing method for the same |
Oct. 20, 2009 |
| 7605042 |
SOI bottom pre-doping merged e-SiGe for poly height reduction |
Oct. 20, 2009 |
| 7595261 |
Method and system for manufacturing semiconductor device having less variation in electrical characteristics |
Sep. 29, 2009 |
| 7592242 |
Apparatus and method for controlling diffusion |
Sep. 22, 2009 |
| 7592232 |
Method for manufacturing semiconductor device |
Sep. 22, 2009 |
| 7588990 |
Dynamic surface annealing of implanted dopants with low temperature HDPCVD process for depositing a high extinction coefficient optical absorber layer |
Sep. 15, 2009 |
| 7586160 |
Method of manufacturing a semiconductor integrated circuit and semiconductor integrated circuit |
Sep. 8, 2009 |
| 7585763 |
Methods of fabricating integrated circuit devices using anti-reflective coating as implant blocking layer |
Sep. 8, 2009 |
| 7585738 |
Method of forming a fully silicided semiconductor device with independent gate and source/drain doping and related device |
Sep. 8, 2009 |
| 7585737 |
Method of manufacturing double diffused drains in semiconductor devices |
Sep. 8, 2009 |
| 7572706 |
Source/drain stressor and method therefor |
Aug. 11, 2009 |
| 7569464 |
Method for manufacturing a semiconductor device having improved across chip implant uniformity |
Aug. 4, 2009 |
| 7569455 |
Manufacturing method of semiconductor device |
Aug. 4, 2009 |
| 7566624 |
Method for the production of transistor structures with LDD |
Jul. 28, 2009 |
| 7564056 |
Method for manufacturing a semiconductor device |
Jul. 21, 2009 |
| 7563682 |
LDMOS transistor device, integrated circuit, and fabrication method thereof |
Jul. 21, 2009 |
| 7563663 |
Method of manufacturing semiconductor device with offset sidewall structure |
Jul. 21, 2009 |
| 7560350 |
Method for forming strained semiconductor device and method for forming source/drain region |
Jul. 14, 2009 |
| 7560326 |
Silicon/silcion germaninum/silicon body device with embedded carbon dopant |
Jul. 14, 2009 |
| 7557023 |
Implantation of gate regions in semiconductor device fabrication |
Jul. 7, 2009 |
| 7553726 |
Method of fabricating nonvolatile memory device |
Jun. 30, 2009 |
| 7553720 |
Non-volatile memory device and fabrication method thereof |
Jun. 30, 2009 |
| 7550807 |
Semiconductor memory |
Jun. 23, 2009 |
| 7550356 |
Method of fabricating strained-silicon transistors |
Jun. 23, 2009 |
| 7544573 |
Semiconductor device including MOS field effect transistor having offset spacers or gate sidewall films on either side of gate electrode and method of manufacturing the same |
Jun. 9, 2009 |
| 7538003 |
Method for fabricating MOS transistor |
May. 26, 2009 |
| 7538001 |
Transistor gate forming methods and integrated circuits |
May. 26, 2009 |
| 7534689 |
Stress enhanced MOS transistor and methods for its fabrication |
May. 19, 2009 |
| 7524695 |
Image sensor and pixel having an optimized floating diffusion |
Apr. 28, 2009 |
| 7521326 |
Semiconductor device and manufacturing method thereof |
Apr. 21, 2009 |
| 7521316 |
Methods of forming gate structures for semiconductor devices |
Apr. 21, 2009 |
| 7517772 |
Selective etch for patterning a semiconductor film deposited non-selectively |
Apr. 14, 2009 |
| 7510943 |
Semiconductor devices and methods of manufacture thereof |
Mar. 31, 2009 |
| 7504328 |
Schottky barrier source/drain n-mosfet using ytterbium silicide |
Mar. 17, 2009 |
| 7501317 |
Method of manufacturing semiconductor device |
Mar. 10, 2009 |
| 7494881 |
Methods for selective placement of dislocation arrays |
Feb. 24, 2009 |
| 7494857 |
Advanced activation approach for MOS devices |
Feb. 24, 2009 |
| 7488658 |
Stressed semiconductor device structures having granular semiconductor material |
Feb. 10, 2009 |
| 7485925 |
High voltage metal oxide semiconductor transistor and fabricating method thereof |
Feb. 3, 2009 |
| 7485536 |
Abrupt junction formation by atomic layer epitaxy of in situ delta doped dopant diffusion barriers |
Feb. 3, 2009 |
| 7485520 |
Method of manufacturing a body-contacted finfet |
Feb. 3, 2009 |
| 7485515 |
Method of manufacturing metal oxide semiconductor |
Feb. 3, 2009 |
| 7482226 |
Semiconductor memory device |
Jan. 27, 2009 |
| 7482218 |
Low-capacitance input/output and electrostatic discharge circuit for protecting an integrated circuit from electrostatic discharge |
Jan. 27, 2009 |
| 7482212 |
Semiconductor device and manufacturing method thereof |
Jan. 27, 2009 |
| 7482210 |
Method of fabricating semiconductor device having junction isolation insulating layer |
Jan. 27, 2009 |
| 7479437 |
Method to reduce contact resistance on thin silicon-on-insulator device |
Jan. 20, 2009 |
| 7479434 |
Semiconductor device and method of manufacturing the same |
Jan. 20, 2009 |
| 7479433 |
Method for manufacturing semiconductor device |
Jan. 20, 2009 |
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