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Class Information
Number: 438/298
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including isolation structure > Recessed oxide formed by localized oxidation (i.e., locos) > Doping region beneath recessed oxide (e.g., to form chanstop, etc.)
Description: Process including a step of introducing electrically active dopant species into the semiconductor substrate region beneath the recessed oxide (e.g., to form a channel stop thereby preventing electric field inversion beneath the recessed oxide, etc.).

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8710587 Lateral double diffused metal oxide semiconductor device and method of manufacturing the same Apr. 29, 2014
8664723 Integrated circuit structures having base resistance tuning regions and methods for forming the same Mar. 4, 2014
8643110 Localized biasing for silicon on insulator structures Feb. 4, 2014
8637358 Field-effect-transistor with self-aligned diffusion contact Jan. 28, 2014
8580695 Method of fabricating a semiconductor device Nov. 12, 2013
8536659 Semiconductor device with integrated channel stop and body contact Sep. 17, 2013
8507345 Semiconductor device and manufacturing method thereof Aug. 13, 2013
8507356 Formation of wells utilizing masks in manufacturing semiconductor device Aug. 13, 2013
8410553 Semiconductor structure including high voltage device Apr. 2, 2013
8389995 Epitaxial solid-state semiconducting heterostructures and method for making same Mar. 5, 2013
8372722 Method for fabricating a semiconductor device Feb. 12, 2013
8329566 Method of manufacturing a high-performance semiconductor device Dec. 11, 2012
8258028 Deep trench isolation structures and methods of formation thereof Sep. 4, 2012
8227841 Self-aligned impact-ionization field effect transistor Jul. 24, 2012
8125036 Integrated circuit having an edge passivation and oxidation resistant layer and method Feb. 28, 2012
8124466 Process for manufacturing voltage-controlled transistor Feb. 28, 2012
8089116 FLOTOX-TYPE EEPROM and method for manufacturing the same Jan. 3, 2012
8053320 Semiconductor device and manufacturing method thereof Nov. 8, 2011
8017480 Apparatus and associated method for making a floating gate cell in a virtual ground array Sep. 13, 2011
8017486 Method of fabricating low on-resistance lateral double-diffused MOS device Sep. 13, 2011
7986004 Semiconductor device and method of manufacture thereof Jul. 26, 2011
7951679 Method for fabricating semiconductor device May. 31, 2011
7935603 Symmetric non-intrusive and covert technique to render a transistor permanently non-operable May. 3, 2011
7915110 MOS transistor manufacturing Mar. 29, 2011
7867862 Semiconductor structure including high voltage device Jan. 11, 2011
7863149 Method for fabricating a capacitor Jan. 4, 2011
7829420 Method of forming a channel termination region using a trench and a channel stopper ring Nov. 9, 2010
7736976 Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands Jun. 15, 2010
7732288 Method for fabricating a semiconductor structure Jun. 8, 2010
7723174 CMOS device comprising MOS transistors with recessed drain and source areas and a SI/GE material in the drain and source areas of the PMOS transistor May. 25, 2010
7718505 Method of forming a semiconductor structure comprising insulating layers with different thicknesses May. 18, 2010
7687834 Integrated circuit using complementary junction field effect transistor and MOS transistor in silicon and silicon alloys Mar. 30, 2010
7687363 Method for manufacturing semiconductor device Mar. 30, 2010
7682910 Method of selectively adjusting ion implantation dose on semiconductor devices Mar. 23, 2010
7622356 Method of fabricating metal oxide semiconductor field effect transistor Nov. 24, 2009
7550355 Low-leakage transistor and manufacturing method thereof Jun. 23, 2009
7508032 High voltage device with low on-resistance Mar. 24, 2009
7498636 Semiconductor device and method of manufacturing the same Mar. 3, 2009
7494883 Semiconductor device having a trench isolation and method of fabricating the same Feb. 24, 2009
7491614 Methods for forming channel stop for deep trench isolation prior to deep trench etch Feb. 17, 2009
7465630 Method for manufacturing flash memory device Dec. 16, 2008
7429505 Method of fabricating fin field effect transistor using isotropic etching technique Sep. 30, 2008
7425752 Semiconductor device channel termination Sep. 16, 2008
7416930 Method for producing an oxide confined semiconductor laser Aug. 26, 2008
7314792 Method for fabricating transistor of semiconductor device Jan. 1, 2008
7309636 High-voltage metal-oxide-semiconductor device and method of manufacturing the same Dec. 18, 2007
7250340 Method of fabricating programmable structure including discontinuous storage elements and spacer control gates in a trench Jul. 31, 2007
7247569 Ultra-thin Si MOSFET device structure and method of manufacture Jul. 24, 2007
7238563 Semiconductor device having isolation region and method of manufacturing the same Jul. 3, 2007
7235460 Method of forming active and isolation areas with split active patterning Jun. 26, 2007

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