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Class Information
Number: 438/297
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including isolation structure > Recessed oxide formed by localized oxidation (i.e., locos)
Description: Process for making an insulated gate field effect transistor including the step of oxidizing a selected region of a semiconductive substrate to form an embedded oxide (e.g., field oxide) therein which forms the periphery of a semiconductive region utilized for the formation of the field effect transistor.

Sub-classes under this class:

Class Number Class Name Patents
438/298 Doping region beneath recessed oxide (e.g., to form chanstop, etc.) 318

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8685847 Semiconductor device having localized extremely thin silicon on insulator channel region Apr. 1, 2014
8525238 Semiconductor device production method and semiconductor device Sep. 3, 2013
8466045 Method of forming strained epitaxial carbon-doped silicon films Jun. 18, 2013
8460992 Semiconductor device and method of manufacturing the same Jun. 11, 2013
8426282 Method for forming semiconductor substrate isolation Apr. 23, 2013
8394695 Semiconductor device production method Mar. 12, 2013
8329564 Method for fabricating super-steep retrograde well MOSFET on SOI or bulk silicon substrate, and device fabricated in accordance with the method Dec. 11, 2012
8318567 Thermal treatment equipment and method for heat-treating Nov. 27, 2012
8314463 Method for fabricating super-steep retrograde well MOSFET on SOI or bulk silicon substrate, and device fabricated in accordance with the method Nov. 20, 2012
8260098 Optocoupler circuit Sep. 4, 2012
8232166 Method for fabricating semiconductor device with recess gate Jul. 31, 2012
8232594 Semiconductor device and method of manufacturing the same Jul. 31, 2012
8217423 Structure and method for mobility enhanced MOSFETs with unalloyed silicide Jul. 10, 2012
8168500 Double gate depletion mode MOSFET May. 1, 2012
8124427 Method of creating an extremely thin semiconductor-on-insulator (ETSOI) layer having a uniform thickness Feb. 28, 2012
8114725 Method of manufacturing MOS device having lightly doped drain structure Feb. 14, 2012
8080443 Method of making pillars using photoresist spacer mask Dec. 20, 2011
8067293 Power semiconductor device and method of manufacturing the same Nov. 29, 2011
8058129 Lateral double diffused MOS device and method for manufacturing the same Nov. 15, 2011
8039359 Method of forming low capacitance ESD device and structure therefor Oct. 18, 2011
8003471 Formation of a super steep retrograde channel Aug. 23, 2011
7998806 Semiconductor device and method of manufacturing the same Aug. 16, 2011
7973333 Lateral DMOS transistor and method for the production thereof Jul. 5, 2011
7915110 MOS transistor manufacturing Mar. 29, 2011
7888234 Method for manufacturing a semiconductor body with a trench and semiconductor body with a trench Feb. 15, 2011
7883976 Structure and method for manufacturing device with planar halo profile Feb. 8, 2011
7871895 Method and structure for relieving transistor performance degradation due to shallow trench isolation induced stress Jan. 18, 2011
7863077 Image sensor and method for manufacturing the same Jan. 4, 2011
7863145 Method and resulting structure using silver for LCOS devices Jan. 4, 2011
7863153 System and method for creating different field oxide profiles in a locos process Jan. 4, 2011
7863692 Semiconductor device Jan. 4, 2011
7855117 Method of forming a thin layer and method of manufacturing a semiconductor device Dec. 21, 2010
7847365 MOSFET with isolation structure for monolithic integration and fabrication method thereof Dec. 7, 2010
7816206 Semiconductor device and method for fabricating the same Oct. 19, 2010
7807518 Semiconductor memory device and manufacturing method thereof Oct. 5, 2010
7759205 Methods for fabricating semiconductor devices minimizing under-oxide regrowth Jul. 20, 2010
7749831 Methods for fabricating solid state image sensor devices having non-planar transistors Jul. 6, 2010
7736963 Method of forming a gate structure for a semiconductor device and method of forming a cell gate structure for a non-volatile memory device Jun. 15, 2010
7709907 ESD structure May. 4, 2010
7696049 Method to manufacture LDMOS transistors with improved threshold voltage control Apr. 13, 2010
7670954 Method of manufacturing semiconductor device Mar. 2, 2010
7666747 Process of manufacturing semiconductor device Feb. 23, 2010
7662720 3-Dimensional flash memory device and method of fabricating the same Feb. 16, 2010
7645668 Charge trapping type semiconductor memory device and method of manufacturing the same Jan. 12, 2010
7638397 Method of forming quantum wire gate device Dec. 29, 2009
7625783 Semiconductor element and method for manufacturing the same Dec. 1, 2009
7608515 Diffusion layer for stressed semiconductor devices Oct. 27, 2009
7601597 Manufacturing method of a super-junction semiconductor device Oct. 13, 2009
7577493 Temperature regulating method, thermal processing system and semiconductor device manufacturing method Aug. 18, 2009
7566482 SOI by oxidation of porous silicon Jul. 28, 2009

1 2 3 4 5 6 7 8 9 10 11

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