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Class Information
Number: 438/296
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectric material
Description: Process for making an insulated gate field effect transistor including the step of forming an isolation structure by making a recess in the semiconductor substrate and refilling the recess with an insulative material.










Patents under this class:

Patent Number Title Of Patent Date Issued
7785983 Semiconductor device having tiles for dual-trench integration and method therefor Aug. 31, 2010
7781838 Integrated circuit including a body transistor and method Aug. 24, 2010
7781293 Semiconductor device and method of fabricating the same including trenches of different aspect ratios Aug. 24, 2010
7776715 Reverse construction memory cell Aug. 17, 2010
7767531 Method of forming transistor having channel region at sidewall of channel portion hole Aug. 3, 2010
7763519 Method for fabricating an interconnect arrangement with increased capacitive coupling and associated interconnect arrangement Jul. 27, 2010
7759204 Process for high voltage superjunction termination Jul. 20, 2010
7749846 Method of forming contact structure and method of fabricating semiconductor device using the same Jul. 6, 2010
7745902 System and method for providing improved trench isolation of semiconductor devices Jun. 29, 2010
7745305 Method of removing an oxide and method of filling a trench using the same Jun. 29, 2010
7732287 Method of forming a body-tie Jun. 8, 2010
7727844 Gate structure of a semiconductor device Jun. 1, 2010
7723227 Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry May. 25, 2010
7723194 Semiconductor device having silicide layers and method of fabricating the same May. 25, 2010
7719090 Semiconductor device with strain May. 18, 2010
7718505 Method of forming a semiconductor structure comprising insulating layers with different thicknesses May. 18, 2010
7714407 Semiconductor device and method of forming a semiconductor device May. 11, 2010
7713887 Method for forming isolation layer in semiconductor device May. 11, 2010
7713827 Method for manufacturing semiconductor device May. 11, 2010
7713807 High-performance CMOS SOI devices on hybrid crystal-oriented substrates May. 11, 2010
7709897 Fusion bonding process and structure for fabricating silicon-on-insulator (SOI) semiconductor devices May. 4, 2010
7709347 Semiconductor device and method of fabricating the same May. 4, 2010
7705401 Semiconductor device including a fin-channel recess-gate MISFET Apr. 27, 2010
7704894 Method of eliminating small bin defects in high throughput TEOS films Apr. 27, 2010
7700455 Method for forming isolation structure in semiconductor device Apr. 20, 2010
7700448 Manufacturing method of semiconductor device Apr. 20, 2010
7696581 Isolation film in semiconductor device and method of forming the same Apr. 13, 2010
7691691 Semiconductor device and methods for making the same Apr. 6, 2010
7687361 Method of fabricating a transistor having a triple channel in a memory device Mar. 30, 2010
7682929 Method and structure for double lining for shallow trench isolation Mar. 23, 2010
7682907 Non-volatile memory integrated circuit Mar. 23, 2010
7682859 Patterned strained semiconductor substrate and device Mar. 23, 2010
7670897 Semiconductor device and method for fabricating the same Mar. 2, 2010
7666742 Method of fabricating semiconductor devices having a recessed active edge Feb. 23, 2010
7659170 Method of increasing transistor drive current by recessing an isolation trench Feb. 9, 2010
7655534 Method of forming fin transistor Feb. 2, 2010
7655524 Method for manufacturing isolation layer having barrier layer formed thereon Feb. 2, 2010
7648881 Non-volatile memory devices with charge storage insulators and methods of fabricating such devices Jan. 19, 2010
7648869 Method of fabricating semiconductor structures for latch-up suppression Jan. 19, 2010
7645676 Semiconductor structures for latch-up suppression and methods of forming such semiconductor structures Jan. 12, 2010
7645670 Method for fabricating nonvolatile memory device Jan. 12, 2010
7645668 Charge trapping type semiconductor memory device and method of manufacturing the same Jan. 12, 2010
7642161 Method of fabricating recess gate in semiconductor device Jan. 5, 2010
7642153 Methods for forming gate electrodes for integrated circuits Jan. 5, 2010
7638398 Semiconductor device with increased channel area and fabrication method thereof Dec. 29, 2009
7629646 Trench MOSFET with terraced gate and manufacturing method thereof Dec. 8, 2009
7625807 Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication Dec. 1, 2009
7618857 Method of reducing detrimental STI-induced stress in MOSFET channels Nov. 17, 2009
7615818 Semiconductor device and method of manufacturing the same Nov. 10, 2009
7615451 Method for forming semiconductor device Nov. 10, 2009











 
 
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