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Class Information
Number: 438/296
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectric material
Description: Process for making an insulated gate field effect transistor including the step of forming an isolation structure by making a recess in the semiconductor substrate and refilling the recess with an insulative material.










Patents under this class:

Patent Number Title Of Patent Date Issued
8445356 Integrated circuit having back gating, improved isolation and reduced well resistance and method to fabricate same May. 21, 2013
8445350 Semiconductor device and method of manufacturing the same May. 21, 2013
8440533 Self-aligned contact for replacement metal gate and silicide last processes May. 14, 2013
8440532 Structure and method for making metal semiconductor field effect transistor (MOSFET) with isolation last process May. 14, 2013
8440515 Method of forming a field effect transistor May. 14, 2013
8426272 Non-volatile memory devices including shared bit lines and methods of fabricating the same Apr. 23, 2013
8415254 Method for removing dummy poly in a gate last process Apr. 9, 2013
8410559 Selectively self-assembling oxygen diffusion barrier Apr. 2, 2013
8409964 Shallow trench isolation with improved structure and method of forming Apr. 2, 2013
8407634 Analysis of stress impact on transistor performance Mar. 26, 2013
8394695 Semiconductor device production method Mar. 12, 2013
8394689 Semiconductor memory device with stacked gate including charge storage layer and control gate and method of manufacturing the same Mar. 12, 2013
8390064 Semiconductor device having gate trenches and manufacturing method thereof Mar. 5, 2013
8389370 Radiation-tolerant integrated circuit device and method for fabricating Mar. 5, 2013
8389353 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming Mar. 5, 2013
8384177 Semiconductor device and method of manufacturing a semiconductor device Feb. 26, 2013
8383490 Borderless contact for ultra-thin body devices Feb. 26, 2013
8349699 Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry Jan. 8, 2013
8343844 Method for manufacturing capacitor of semiconductor device and capacitor of semiconductor device manufactured thereby Jan. 1, 2013
8338919 Semiconductor device with strain Dec. 25, 2012
8329545 Method of fabricating a charge trap NAND flash memory Dec. 11, 2012
8299528 Transistor and method thereof Oct. 30, 2012
8293612 Lateral double diffused metal oxide semiconductor (LDMOS) device and method of manufacturing LDMOS device Oct. 23, 2012
8278717 Semiconductor memory device and method of manufacturing the same Oct. 2, 2012
8278185 Method for forming device isolation layer of semiconductor device and non-volatile memory device Oct. 2, 2012
8273630 Method for manufacturing semiconductor device Sep. 25, 2012
8273617 Electronic devices and systems, and methods for making and using the same Sep. 25, 2012
8258584 Offset gate semiconductor device Sep. 4, 2012
8258028 Deep trench isolation structures and methods of formation thereof Sep. 4, 2012
8247299 Flash memory device and fabrication method thereof Aug. 21, 2012
8247279 Method of fabricating semiconductor device using epitaxial growth inhibiting layers Aug. 21, 2012
8242564 Semiconductor device with photonics Aug. 14, 2012
8241987 Methods of forming capacitors Aug. 14, 2012
8241982 Semiconductor device manufacturing method Aug. 14, 2012
8236640 Method of fabricating a semiconductor device having gate finger elements extended over a plurality of isolation regions formed in the source and drain regions Aug. 7, 2012
8236638 Shallow trench isolation for SOI structures combining sidewall spacer and bottom liner Aug. 7, 2012
8232180 Manufacturing method of semiconductor device comprising active region divided by STI element isolation structure Jul. 31, 2012
8227318 Integration of multiple gate oxides with shallow trench isolation methods to minimize divot formation Jul. 24, 2012
8222684 Method of manufacturing a semiconductor integrated circuit using a selective disposal spacer technique and semiconductor integrated circuit manufactured thereby Jul. 17, 2012
8222106 Nonvolatile semiconductor memory device, method of fabricating the nonvolatile semiconductor memory device and process of writing data on the nonvolatile semiconductor memory device Jul. 17, 2012
8222101 Method of fabricating a MOS transistor having a gate insulation layer with a lateral portion and a vertical portion Jul. 17, 2012
8222093 Methods for forming barrier regions within regions of insulating material resulting in outgassing paths from the insulating material and related devices Jul. 17, 2012
8216905 Stress engineering to reduce dark current of CMOS image sensors Jul. 10, 2012
8216904 Strained transistor and method for forming the same Jul. 10, 2012
8202784 Semiconductor device having a high aspect ratio isolation trench and method for manufacturing the same Jun. 19, 2012
8198151 Method for fabricating a metal gate structure Jun. 12, 2012
8187950 Method of eliminating micro-trenches during spacer etch May. 29, 2012
8187940 Method for fabricating semiconductor device May. 29, 2012
8178409 Semiconductor device with alternately arranged P-type and N-type thin semiconductor layers and method for manufacturing the same May. 15, 2012
8174071 High voltage LDMOS transistor May. 8, 2012











 
 
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