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Class Information
Number: 438/296
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectric material
Description: Process for making an insulated gate field effect transistor including the step of forming an isolation structure by making a recess in the semiconductor substrate and refilling the recess with an insulative material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618857 |
Method of reducing detrimental STI-induced stress in MOSFET channels |
Nov. 17, 2009 |
| 7615391 |
Solar cell and method of fabricating the same |
Nov. 10, 2009 |
| 7615451 |
Method for forming semiconductor device |
Nov. 10, 2009 |
| 7615818 |
Semiconductor device and method of manufacturing the same |
Nov. 10, 2009 |
| 7611950 |
Method for forming shallow trench isolation in semiconductor device |
Nov. 3, 2009 |
| 7608509 |
Method of manufacturing a flash memory device having compensation members formed on edge portions of a tunnel oxide layer |
Oct. 27, 2009 |
| 7608518 |
Semiconductor device and method for fabricating the same |
Oct. 27, 2009 |
| 7608514 |
MSM binary switch memory |
Oct. 27, 2009 |
| 7601576 |
Method for fabricating semiconductor device |
Oct. 13, 2009 |
| 7598562 |
Semiconductor device and method of manufacturing the same |
Oct. 6, 2009 |
| 7595224 |
Method for manufacturing integrated circuit |
Sep. 29, 2009 |
| 7595253 |
Method of forming the semiconductor device |
Sep. 29, 2009 |
| 7592216 |
Fabrication process of a semiconductor device having a capacitor |
Sep. 22, 2009 |
| 7592223 |
Methods of fabricating non-volatile memory with integrated select and peripheral circuitry and post-isolation memory cell formation |
Sep. 22, 2009 |
| 7588986 |
Method of manufacturing a semiconductor device |
Sep. 15, 2009 |
| 7585723 |
Method for fabricating capacitor |
Sep. 8, 2009 |
| 7579234 |
Method for fabricating memory device with recess channel MOS transistor |
Aug. 25, 2009 |
| 7579256 |
Method for forming shallow trench isolation in semiconductor device using a pore-generating layer |
Aug. 25, 2009 |
| 7579664 |
Semiconductor device with trench type device isolation layer and method for fabricating the same |
Aug. 25, 2009 |
| 7566621 |
Method for forming semiconductor device having fin structure |
Jul. 28, 2009 |
| 7563683 |
Transistor and method of fabricating the same |
Jul. 21, 2009 |
| 7560357 |
Method for creating narrow trenches in dielectric materials |
Jul. 14, 2009 |
| 7560335 |
Memory device transistors |
Jul. 14, 2009 |
| 7553748 |
Semiconductor device and method of manufacturing the same |
Jun. 30, 2009 |
| 7550355 |
Low-leakage transistor and manufacturing method thereof |
Jun. 23, 2009 |
| 7550796 |
Germanium semiconductor device and method of manufacturing the same |
Jun. 23, 2009 |
| 7547605 |
Microelectronic device and a method for its manufacture |
Jun. 16, 2009 |
| 7544560 |
Image sensor and fabrication method thereof |
Jun. 9, 2009 |
| 7538002 |
Semiconductor process integrating source/drain stressors and interlevel dielectric layer stressors |
May. 26, 2009 |
| 7534687 |
Semiconductor device and method for manufacturing the same |
May. 19, 2009 |
| 7531415 |
Multilayered CMP stop for flat planarization |
May. 12, 2009 |
| 7531424 |
Vacuum wafer-level packaging for SOI-MEMS devices |
May. 12, 2009 |
| 7528046 |
Method for manufacturing semiconductor device |
May. 5, 2009 |
| 7528033 |
Semiconductor device with a dummy gate and a method of manufacturing a semiconductor device with a dummy gate |
May. 5, 2009 |
| 7528045 |
MOS transistor and manufacturing methods thereof |
May. 5, 2009 |
| 7524729 |
Method of manufacturing a semiconductor integrated circuit device having a trench |
Apr. 28, 2009 |
| 7521318 |
Semiconductor device and method of manufacturing the same |
Apr. 21, 2009 |
| 7517760 |
Semiconductor device manufacturing method including three gate insulating films |
Apr. 14, 2009 |
| 7514304 |
MOSFET having channel in bulk semiconductor and source/drain on insulator, and method of fabrication |
Apr. 7, 2009 |
| 7514336 |
Robust shallow trench isolation structures and a method for forming shallow trench isolation structures |
Apr. 7, 2009 |
| 7501326 |
Method for forming isolation layer of semiconductor device |
Mar. 10, 2009 |
| 7501686 |
Semiconductor device and method for manufacturing the same |
Mar. 10, 2009 |
| 7498233 |
Method of forming an insulation layer structure having a concave surface and method of manufacturing a memory device using the same |
Mar. 3, 2009 |
| 7494883 |
Semiconductor device having a trench isolation and method of fabricating the same |
Feb. 24, 2009 |
| 7491614 |
Methods for forming channel stop for deep trench isolation prior to deep trench etch |
Feb. 17, 2009 |
| 7488658 |
Stressed semiconductor device structures having granular semiconductor material |
Feb. 10, 2009 |
| 7488659 |
Structure and methods for stress concentrating spacer |
Feb. 10, 2009 |
| 7485542 |
Method for producing bit lines for UCP flash memories |
Feb. 3, 2009 |
| 7470587 |
Flash memory device and method of manufacturing the same |
Dec. 30, 2008 |
| 7468301 |
PMOS transistor with increased effective channel length in the peripheral region and a multi-height substrate |
Dec. 23, 2008 |
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