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Class Information
Number: 438/296
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectric material
Description: Process for making an insulated gate field effect transistor including the step of forming an isolation structure by making a recess in the semiconductor substrate and refilling the recess with an insulative material.










Patents under this class:

Patent Number Title Of Patent Date Issued
8709901 Method of forming an isolation structure Apr. 29, 2014
8709898 Fabrication method of semiconductor device and fabrication method of dynamic threshold transistor Apr. 29, 2014
8703608 Control of local environment for polysilicon conductors in integrated circuits Apr. 22, 2014
8703550 Dual shallow trench isolation liner for preventing electrical shorts Apr. 22, 2014
8692266 Circuit substrate structure Apr. 8, 2014
8691654 Semiconductor device having stressor film and method of manufacturing semiconductor device Apr. 8, 2014
8691651 Method of forming non-planar FET Apr. 8, 2014
8686505 Lateral semiconductor device and manufacturing method therefor Apr. 1, 2014
8685832 Trench filling method and method of manufacturing semiconductor integrated circuit device Apr. 1, 2014
8685830 Method of filling shallow trenches Apr. 1, 2014
8685817 Metal gate structures for CMOS transistor devices having reduced parasitic capacitance Apr. 1, 2014
8680594 Semiconductor constructions and methods of forming semiconductor constructions Mar. 25, 2014
8679938 Shallow trench isolation for device including deep trench capacitors Mar. 25, 2014
8674472 Low harmonic RF switch in SOI Mar. 18, 2014
8673735 Semiconductor device and method for making same Mar. 18, 2014
8673724 Methods of fabricating semiconductor devices Mar. 18, 2014
8673723 Methods of forming isolation regions for FinFET semiconductor devices Mar. 18, 2014
8664071 Castellated gate MOSFET tetrode capable of fully-depleted operation Mar. 4, 2014
8664050 Structure and method to improve ETSOI MOSFETS with back gate Mar. 4, 2014
8658536 Selective fin cut process Feb. 25, 2014
8652911 Semiconductor device and method of manufacturing the same Feb. 18, 2014
8652888 SOI device with DTI and STI Feb. 18, 2014
8647935 Buried oxidation for enhanced mobility Feb. 11, 2014
8629008 Electrical isolation structures for ultra-thin semiconductor-on-insulator devices Jan. 14, 2014
8623730 Method for fabricating silicon-on-insulator transistor with self-aligned borderless source/drain contacts Jan. 7, 2014
8592939 Semiconductor device and manufacturing method thereof Nov. 26, 2013
8586429 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming Nov. 19, 2013
8557668 Method for forming N-shaped bottom stress liner Oct. 15, 2013
8557667 Spacer for a gate electrode having tensile stress and a method of forming the same Oct. 15, 2013
8551844 Methods of forming semiconductor constructions Oct. 8, 2013
8541297 Manufacturing method of semiconductor device Sep. 24, 2013
8535992 Thyristor random access memory device and method Sep. 17, 2013
8524569 Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer Sep. 3, 2013
8524564 Full silicidation prevention via dual nickel deposition approach Sep. 3, 2013
8518774 Manufacturing process for zero-capacitor random access memory circuits Aug. 27, 2013
8518757 Method of fabricating strained semiconductor structures from silicon-on-insulator (SOI) Aug. 27, 2013
8507356 Formation of wells utilizing masks in manufacturing semiconductor device Aug. 13, 2013
8507341 Integrated circuit fabrication Aug. 13, 2013
8501562 Fabricating a gate oxide Aug. 6, 2013
8497176 Semiconductor device with STI and method for manufacturing the semiconductor device Jul. 30, 2013
8497175 Method of fabricating FinFET devices Jul. 30, 2013
8492845 Gate-to-gate recessed strap and methods of manufacture of same Jul. 23, 2013
8492229 Method and layout of semiconductor device with reduced parasitics Jul. 23, 2013
8487368 Low voltage power MOSFET device and process for its manufacture Jul. 16, 2013
8486818 Semiconductor devices including buried gate electrodes and isolation layers and methods of forming semiconductor devices including buried gate electrodes and isolation layers using self aligne Jul. 16, 2013
8486792 Film forming method of silicon oxide film, silicon oxide film, semiconductor device, and manufacturing method of semiconductor device Jul. 16, 2013
8470686 Method of increasing deposition rate of silicon dioxide on a catalyst Jun. 25, 2013
8461008 Methods for fabricating FinFET integrated circuits in bulk semiconductor substrates Jun. 11, 2013
8460992 Semiconductor device and method of manufacturing the same Jun. 11, 2013
8450180 Methods of forming semiconductor trench and forming dual trenches, and structure for isolating devices May. 28, 2013











 
 
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