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Class Information
Number: 438/272
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Vertical channel > Gate electrode in trench or recess in semiconductor substrate > Totally embedded in semiconductive layers
Description: Process wherein the gate electrode is surrounded on all sides by semiconductive layers.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8703563 Source and body contact structure for trench-DMOS devices using polysilicon Apr. 22, 2014
8679921 Canyon gate transistor and methods for its fabrication Mar. 25, 2014
8647972 Multi-layer work function metal replacement gate Feb. 11, 2014
8618602 Semiconductor device and method of forming the same Dec. 31, 2013
8603879 Method for fabricating super-junction power device with reduced miller capacitance Dec. 10, 2013
8598655 Semiconductor device and method for manufacturing a semiconductor device Dec. 3, 2013
8563377 Trench-based power semiconductor devices with increased breakdown voltage characteristics Oct. 22, 2013
8557656 Cross-hair cell based floating body device Oct. 15, 2013
8541278 Method for fabricating super-junction power device with reduced miller capacitance Sep. 24, 2013
8541826 Memory array structure and method for forming the same Sep. 24, 2013
8536008 Manufacturing method of vertical channel transistor array Sep. 17, 2013
8524559 Manufacturing method of power transistor device Sep. 3, 2013
8492226 Trench transistor Jul. 23, 2013
8481390 Method for forming impurity region of vertical transistor and method for fabricating vertical transistor using the same Jul. 9, 2013
8476133 Method of manufacture and structure for a trench transistor having a heavy body region Jul. 2, 2013
8476134 Method of manufacturing super-junction semiconductor device Jul. 2, 2013
8476136 Method and a structure for enhancing electrical insulation and dynamic performance of MIS structures comprising vertical field plates Jul. 2, 2013
8470673 Method of fabricating semiconductor device with buried bit line Jun. 25, 2013
8461001 Methods for manufacturing trench MOSFET with implanted drift region Jun. 11, 2013
8455319 Vertical transistor for random-access memory and manufacturing method thereof Jun. 4, 2013
8435860 Trench type semiconductor device and fabrication method for the same May. 7, 2013
8415739 Semiconductor component and method of manufacture Apr. 9, 2013
8405089 Semiconductor memory device and manufacturing method thereof Mar. 26, 2013
8372708 Device structure and manufacturing method using HDP deposited using deposited source-body implant block Feb. 12, 2013
8361856 Memory cells, arrays of memory cells, and methods of forming memory cells Jan. 29, 2013
8362551 Semiconductor device Jan. 29, 2013
8349693 Method of manufacturing a semiconductor device having a super junction Jan. 8, 2013
8329538 Shielded gate trench FET with an inter-electrode dielectric having a low-k dielectric therein Dec. 11, 2012
8304829 Trench-based power semiconductor devices with increased breakdown voltage characteristics Nov. 6, 2012
8293604 Methods of manufacturing vertical channel semiconductor devices Oct. 23, 2012
8283715 Method and apparatus for buried word line formation Oct. 9, 2012
8278703 Cross-hair cell based floating body device Oct. 2, 2012
8268687 Three-dimensional semiconductor memory device and method of fabricating the same Sep. 18, 2012
8232592 Semiconductor device and manufacturing method of semiconductor device Jul. 31, 2012
8183113 Methods of forming recessed gate structures including blocking members, and methods of forming semiconductor devices having the recessed gate structures May. 22, 2012
8168521 Methods of manufacturing semiconductor devices having low resistance buried gate structures May. 1, 2012
8143125 Structure and method for forming a salicide on the gate electrode of a trench-gate FET Mar. 27, 2012
8133786 Transistors with laterally extended active regions and methods of fabricating same Mar. 13, 2012
8101484 Method of forming a FET having ultra-low on-resistance and low gate charge Jan. 24, 2012
8097501 Method for manufacturing semiconductor device Jan. 17, 2012
8084327 Method for forming trench gate field effect transistor with recessed mesas using spacers Dec. 27, 2011
8084304 Method for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop Dec. 27, 2011
8076718 Insulated gate semiconductor device and method for producing the same Dec. 13, 2011
8058686 Semiconductor device including a columnar intermediate region and manufacturing method thereof Nov. 15, 2011
8053316 Method of fabricating vertical channel transistor Nov. 8, 2011
8044459 Semiconductor device with trench field plate including first and second semiconductor materials Oct. 25, 2011
8022473 Semiconductor device having reduced sub-threshold leakage Sep. 20, 2011
7994008 Transistor device with two planar gates and fabrication process Aug. 9, 2011
7985610 Solar cell, method of forming emitter layer of solar cell, and method of manufacturing solar cell Jul. 26, 2011
7981709 Semiconductor device and method for fabricating the same Jul. 19, 2011

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