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Class Information
Number: 438/270
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Vertical channel > Gate electrode in trench or recess in semiconductor substrate
Description: Process for making an insulated gate field effect transistor wherein the gate electrode is formed in a groove or recess in the semiconductor substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622770 |
Semiconductor device having a trench gate and method of fabricating the same |
Nov. 24, 2009 |
| 7622768 |
Semiconductor device and method of manufacturing thereof |
Nov. 24, 2009 |
| 7622353 |
Method for forming recessed gate structure with stepped profile |
Nov. 24, 2009 |
| 7622352 |
Multi-step gate structure and method for preparing the same |
Nov. 24, 2009 |
| 7622351 |
Method of manufacturing semiconductor device and semiconductor device |
Nov. 24, 2009 |
| 7622350 |
Method of manufacturing semiconductor device having cell transistor with recess channel structure |
Nov. 24, 2009 |
| 7619275 |
Process for forming an electronic device including discontinuous storage elements |
Nov. 17, 2009 |
| 7615452 |
Method of fabrication of normally-off field-effect semiconductor device |
Nov. 10, 2009 |
| 7615451 |
Method for forming semiconductor device |
Nov. 10, 2009 |
| 7615450 |
Method of manufacturing flash memory device |
Nov. 10, 2009 |
| 7615449 |
Semiconductor device having a recess channel transistor |
Nov. 10, 2009 |
| 7611949 |
Method of fabricating metal-oxide-semiconductor transistor |
Nov. 3, 2009 |
| 7611947 |
Method of manufacturing semiconductor device |
Nov. 3, 2009 |
| 7608878 |
Semiconductor device manufactured with a double shallow trench isolation process |
Oct. 27, 2009 |
| 7608511 |
Fabrication method of trenched power MOSFET with low gate impedance |
Oct. 27, 2009 |
| 7605427 |
Field plate trench transistor |
Oct. 20, 2009 |
| 7605037 |
Manufacturing method for an integrated semiconductor memory device and corresponding semiconductor memory device |
Oct. 20, 2009 |
| 7605032 |
Method for producing a trench transistor and trench transistor |
Oct. 20, 2009 |
| 7602015 |
Process to control semiconductor wafer yield |
Oct. 13, 2009 |
| 7601603 |
Method for manufacturing semiconductor device |
Oct. 13, 2009 |
| 7601597 |
Manufacturing method of a super-junction semiconductor device |
Oct. 13, 2009 |
| 7601596 |
Semiconductor device with trench transistors and method for manufacturing such a device |
Oct. 13, 2009 |
| 7601582 |
Method for manufacturing a semiconductor device having a device isolation trench |
Oct. 13, 2009 |
| 7598586 |
Semiconductor device and production method therefor |
Oct. 6, 2009 |
| 7598146 |
Self-aligned gate and method |
Oct. 6, 2009 |
| 7598144 |
Method for forming inter-poly dielectric in shielded gate field effect transistor |
Oct. 6, 2009 |
| 7598143 |
Method for producing an integrated circuit with a trench transistor structure |
Oct. 6, 2009 |
| 7598134 |
Memory device forming methods |
Oct. 6, 2009 |
| 7595262 |
Manufacturing method for an integrated semiconductor structure |
Sep. 29, 2009 |
| 7592233 |
Method for forming a memory device with a recessed gate |
Sep. 22, 2009 |
| 7592228 |
Recessed clamping diode fabrication in trench devices |
Sep. 22, 2009 |
| 7592218 |
Methods of forming vertical transistors |
Sep. 22, 2009 |
| 7592210 |
Semiconductor device with increased channel area and decreased leakage current |
Sep. 22, 2009 |
| 7589371 |
Semiconductor device and fabrication method therefor |
Sep. 15, 2009 |
| 7589369 |
Semiconductor constructions |
Sep. 15, 2009 |
| 7588985 |
Method for fabricating fin transistor |
Sep. 15, 2009 |
| 7588977 |
Method of fabricating a MOS field effect transistor having plurality of channels |
Sep. 15, 2009 |
| 7585732 |
Insulated gate type semiconductor device and method for fabricating the same |
Sep. 8, 2009 |
| 7585727 |
Method for fabricating semiconductor device having bulb-shaped recess gate |
Sep. 8, 2009 |
| 7585705 |
Method for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop |
Sep. 8, 2009 |
| 7582532 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7582531 |
Method for producing a buried semiconductor layer |
Sep. 1, 2009 |
| 7579650 |
Termination design for deep source electrode MOSFET |
Aug. 25, 2009 |
| 7579649 |
Trench field effect transistor and method of making it |
Aug. 25, 2009 |
| 7579244 |
Method of fabricating a semiconductor device |
Aug. 25, 2009 |
| 7579234 |
Method for fabricating memory device with recess channel MOS transistor |
Aug. 25, 2009 |
| 7576389 |
Semiconductor device and manufacture method thereof |
Aug. 18, 2009 |
| 7575989 |
Method of manufacturing a transistor of a semiconductor device |
Aug. 18, 2009 |
| 7575974 |
Method for fabricating semiconductor device including recess gate |
Aug. 18, 2009 |
| 7572704 |
Method for forming metal pattern and method for forming gate electrode in semiconductor device using the same |
Aug. 11, 2009 |
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