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Class Information
Number: 438/267
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Having additional gate electrode surrounded by dielectric (i.e., floating gate) > Having additional, nonmemory control electrode or channel portion (e.g., for accessing field effect transistor structure, etc.) > Including forming gate electrode as conductive sidewall spacer to another electrode
Description: Process including a step of forming a conductive electrode on the sidewall of another electrode wherein the conductive sidewall serves as a gate electrode.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618862 |
Flash memory device and method for manufacturing the same |
Nov. 17, 2009 |
| 7608884 |
Scalable split-gate flash memory cell with high source-coupling ratio |
Oct. 27, 2009 |
| 7601596 |
Semiconductor device with trench transistors and method for manufacturing such a device |
Oct. 13, 2009 |
| 7601593 |
Flash memory with metal-insulator-metal tunneling program and erase |
Oct. 13, 2009 |
| 7601594 |
Method for fabricating semiconductor memory |
Oct. 13, 2009 |
| 7585731 |
Semiconductor integrated circuit device and its manufacturing method |
Sep. 8, 2009 |
| 7585726 |
Nonvolatile semiconductor memory devices and the fabrication process of them |
Sep. 8, 2009 |
| 7582527 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7582550 |
Semiconductor memory device and manufacturing method thereof |
Sep. 1, 2009 |
| 7579236 |
Nonvolatile memory device, method of fabricating and method of operating the same |
Aug. 25, 2009 |
| 7579239 |
Method for the manufacture of a non-volatile memory device and memory device thus obtained |
Aug. 25, 2009 |
| 7579243 |
Split gate memory cell method |
Aug. 25, 2009 |
| 7572702 |
Split gate type non-volatile memory device |
Aug. 11, 2009 |
| 7566615 |
Methods of fabricating scalable two transistor memory devices |
Jul. 28, 2009 |
| 7563673 |
Method of forming gate structure of semiconductor device |
Jul. 21, 2009 |
| 7560320 |
Nonvolatile semiconductor memory and a fabrication method for the same |
Jul. 14, 2009 |
| 7557005 |
Semiconductor device and a method of manufacturing the same |
Jul. 7, 2009 |
| 7550347 |
Methods of forming integrated circuit device gate structures |
Jun. 23, 2009 |
| 7550348 |
Source side injection storage device with spacer gates and method therefor |
Jun. 23, 2009 |
| 7547603 |
Non-planar non-volatile memory cell with an erase gate, an array therefor, and a method of making same |
Jun. 16, 2009 |
| 7537988 |
Differential offset spacer |
May. 26, 2009 |
| 7537996 |
Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried source line and floating gate |
May. 26, 2009 |
| 7528047 |
Self-aligned split gate memory cell and method of forming |
May. 5, 2009 |
| 7517757 |
Non-volatile memory device having dual gate and method of forming the same |
Apr. 14, 2009 |
| 7488648 |
Methods of fabricating scalable two-transistor memory devices having metal source/drain regions |
Feb. 10, 2009 |
| 7488649 |
Method of manufacturing split gate type non-volatile memory device |
Feb. 10, 2009 |
| 7476592 |
Method for manufacturing semiconductor device |
Jan. 13, 2009 |
| 7462539 |
Direct tunneling memory with separated transistor and tunnel areas |
Dec. 9, 2008 |
| 7439157 |
Isolation trenches for memory devices |
Oct. 21, 2008 |
| 7435683 |
Apparatus and method for selectively recessing spacers on multi-gate devices |
Oct. 14, 2008 |
| 7436020 |
Flash memory with metal-insulator-metal tunneling program and erase |
Oct. 14, 2008 |
| 7432159 |
Electrically erasable programmable read-only memory (EEPROM) device and methods of fabricating the same |
Oct. 7, 2008 |
| 7416945 |
Method for forming a split gate memory device |
Aug. 26, 2008 |
| 7378314 |
Source side injection storage device with control gates adjacent to shared source/drain and method therefor |
May. 27, 2008 |
| 7378315 |
Method for fabricating semiconductor device |
May. 27, 2008 |
| 7374999 |
Semiconductor device |
May. 20, 2008 |
| 7371645 |
Method of manufacturing a field effect transistor device with recessed channel and corner gate device |
May. 13, 2008 |
| 7368373 |
Method for manufacturing semiconductor devices and plug |
May. 6, 2008 |
| 7364970 |
Method of making a multi-bit non-volatile memory (NVM) cell and structure |
Apr. 29, 2008 |
| 7361554 |
Multi-bit non-volatile memory device, method of operating the same, and method of manufacturing the multi-bit non-volatile memory device |
Apr. 22, 2008 |
| 7354825 |
Methods and apparatus to form gates in semiconductor devices |
Apr. 8, 2008 |
| 7341912 |
Split gate flash memory device having self-aligned control gate and method of manufacturing the same |
Mar. 11, 2008 |
| 7335558 |
Method of manufacturing NAND flash memory device |
Feb. 26, 2008 |
| 7332408 |
Isolation trenches for memory devices |
Feb. 19, 2008 |
| 7332396 |
Semiconductor device with recessed trench and method of fabricating the same |
Feb. 19, 2008 |
| 7323357 |
Method for manufacturing a resistively switching memory cell and memory device based thereon |
Jan. 29, 2008 |
| 7320913 |
Methods of forming split-gate non-volatile memory devices |
Jan. 22, 2008 |
| 7315057 |
Split gate non-volatile memory devices and methods of forming same |
Jan. 1, 2008 |
| 7312129 |
Method for producing two gates controlling the same channel |
Dec. 25, 2007 |
| 7303960 |
Method for fabricating flash memory device |
Dec. 4, 2007 |
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