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Class Information
Number: 438/265
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Having additional gate electrode surrounded by dielectric (i.e., floating gate) > Oxidizing sidewall of gate electrode
Description: Process for making a floating gate-type field effect transistor including a step of forming a dielectric sidewall on the gate electrode by reacting the gate electrode material with oxygen.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8710549 |
MOS device for eliminating floating body effects and self-heating effects |
Apr. 29, 2014 |
| 8669609 |
Non-volatile memory (NVM) cell for endurance and method of making |
Mar. 11, 2014 |
| 8659069 |
Gate structures |
Feb. 25, 2014 |
| 8652902 |
Floating gate semiconductor memory device and method for producing such a device |
Feb. 18, 2014 |
| 8569868 |
Device having and method for forming fins with multiple widths |
Oct. 29, 2013 |
| 8557659 |
Spacer structures of a semiconductor device |
Oct. 15, 2013 |
| 8466023 |
Semiconductor device and method for fabricating the same |
Jun. 18, 2013 |
| 8377774 |
Split gate type non-volatile semiconductor memory device and method of manufacturing the same |
Feb. 19, 2013 |
| 8368138 |
Non-volatile memory devices and methods of manufacturing the same |
Feb. 5, 2013 |
| 8361869 |
Method for manufacturing suspended fin and gate-all-around field effect transistor |
Jan. 29, 2013 |
| 8288225 |
Method of reducing coupling between floating gates in nonvolatile memory |
Oct. 16, 2012 |
| 8263463 |
Nonvolatile split gate memory cell having oxide growth |
Sep. 11, 2012 |
| 8263459 |
Method for forming a floating gate non-volatile memory cell |
Sep. 11, 2012 |
| 8247857 |
Nonvolatile semiconductor memory device and method for manufacturing same |
Aug. 21, 2012 |
| 8163609 |
Nanocrystal memory with differential energy bands and method of formation |
Apr. 24, 2012 |
| 8138045 |
Method of forming sidewall spacers to reduce formation of recesses in the substrate and increase dopant retention in a semiconductor device |
Mar. 20, 2012 |
| 8124961 |
Single electron transistor |
Feb. 28, 2012 |
| 8124478 |
Method for fabricating flash memory device having vertical floating gate |
Feb. 28, 2012 |
| 8114729 |
Differential poly doping and circuits therefrom |
Feb. 14, 2012 |
| 8114741 |
Oxygen-rich layers underlying BPSG |
Feb. 14, 2012 |
| 8097507 |
Method of fabricating a semiconductor device |
Jan. 17, 2012 |
| 8089121 |
Nonvolatile semiconductor memory device and method of manufacturing the same |
Jan. 3, 2012 |
| 8071448 |
Semiconductor device and manufacturing method of the same |
Dec. 6, 2011 |
| 8063431 |
EEPROM and method for manufacturing EEPROM |
Nov. 22, 2011 |
| 8048730 |
Semiconductor device and method for manufacturing the same |
Nov. 1, 2011 |
| 8048739 |
Method of manufacturing flash memory device |
Nov. 1, 2011 |
| 8017477 |
Nonvolatile memory devices and methods of fabricating the same |
Sep. 13, 2011 |
| 8017991 |
Non-volatile memory device and methods of operating and fabricating the same |
Sep. 13, 2011 |
| 7977191 |
Method for fabricating flash memory device |
Jul. 12, 2011 |
| 7964457 |
Semiconductor integrated circuit device and a manufacturing method for the same |
Jun. 21, 2011 |
| 7955932 |
Single electron transistor and method of manufacturing the same |
Jun. 7, 2011 |
| 7947589 |
FinFET formation with a thermal oxide spacer hard mask formed from crystalline silicon layer |
May. 24, 2011 |
| 7935596 |
HTO offset and BL trench process for memory device to improve device performance |
May. 3, 2011 |
| 7932150 |
Lateral oxidation with high-K dielectric liner |
Apr. 26, 2011 |
| 7923327 |
Method of fabricating non-volatile memory device with concavely depressed electron injection region |
Apr. 12, 2011 |
| 7923365 |
Methods of forming field effect transistors having stress-inducing sidewall insulating spacers thereon |
Apr. 12, 2011 |
| 7892943 |
Isolation trenches for memory devices |
Feb. 22, 2011 |
| 7888203 |
Methods of making nonvolatile memory devices |
Feb. 15, 2011 |
| 7846826 |
Method of manufacturing a semiconductor device with multilayer sidewall |
Dec. 7, 2010 |
| 7829411 |
Method and device to form high quality oxide layers of different thickness in one processing step |
Nov. 9, 2010 |
| 7824981 |
Method and apparatus for semiconductor device and semiconductor memory device |
Nov. 2, 2010 |
| 7816207 |
Semiconductor device having electrode and manufacturing method thereof |
Oct. 19, 2010 |
| 7811888 |
Method for fabricating semiconductor memory device |
Oct. 12, 2010 |
| 7799639 |
Methods of fabricating non-volatile memory devices including a chlorine cured tunnel oxide layer |
Sep. 21, 2010 |
| 7776691 |
Semiconductor memory device and manufacturing method for semiconductor device |
Aug. 17, 2010 |
| 7772068 |
Method of manufacturing non-volatile memory |
Aug. 10, 2010 |
| 7767523 |
Semiconductor device with integrated flash memory and peripheral circuit and its manufacture method |
Aug. 3, 2010 |
| 7749845 |
Semiconductor device manufacturing method |
Jul. 6, 2010 |
| 7732280 |
Semiconductor device having offset spacer and method of forming the same |
Jun. 8, 2010 |
| 7723187 |
Semiconductor memory device and method of manufacturing the same |
May. 25, 2010 |
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