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Class Information
Number: 438/265
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Having additional gate electrode surrounded by dielectric (i.e., floating gate) > Oxidizing sidewall of gate electrode
Description: Process for making a floating gate-type field effect transistor including a step of forming a dielectric sidewall on the gate electrode by reacting the gate electrode material with oxygen.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608509 |
Method of manufacturing a flash memory device having compensation members formed on edge portions of a tunnel oxide layer |
Oct. 27, 2009 |
| 7605044 |
Method of manufacturing semiconductor device |
Oct. 20, 2009 |
| 7598140 |
Method of producing a semiconductor device having an oxide film |
Oct. 6, 2009 |
| 7592227 |
Methods of manufacturing a semiconductor device |
Sep. 22, 2009 |
| 7582530 |
Managing floating gate-to-floating gate spacing to support scalability |
Sep. 1, 2009 |
| 7575967 |
Semiconductor integrated circuit device and a manufacturing method for the same |
Aug. 18, 2009 |
| 7572697 |
Method of manufacturing flash memory device |
Aug. 11, 2009 |
| 7563676 |
NOR-type flash memory cell array and method for manufacturing the same |
Jul. 21, 2009 |
| 7563673 |
Method of forming gate structure of semiconductor device |
Jul. 21, 2009 |
| 7560329 |
Semiconductor device and method for fabricating the same |
Jul. 14, 2009 |
| 7547601 |
Low power electrically alterable nonvolatile memory cells and arrays |
Jun. 16, 2009 |
| 7521325 |
Semiconductor device and method for fabricating the same |
Apr. 21, 2009 |
| 7518176 |
Programmable nonvolatile memory and semiconductor integrated circuit device |
Apr. 14, 2009 |
| 7510923 |
Slim spacer implementation to improve drive current |
Mar. 31, 2009 |
| 7494874 |
Method of manufacturing a flash memory device |
Feb. 24, 2009 |
| 7482660 |
Nonvolatile semiconductor memory with transistor whose gate electrode has bird's beak |
Jan. 27, 2009 |
| 7482226 |
Semiconductor memory device |
Jan. 27, 2009 |
| 7476583 |
Semiconductor device and method of manufacturing the same |
Jan. 13, 2009 |
| 7456115 |
Method for forming semiconductor devices having reduced gate edge leakage current |
Nov. 25, 2008 |
| 7452766 |
Finned memory cells and the fabrication thereof |
Nov. 18, 2008 |
| 7439106 |
Gate CD trimming beyond photolithography |
Oct. 21, 2008 |
| 7439131 |
Flash memory device having resistivity measurement pattern and method of forming the same |
Oct. 21, 2008 |
| 7439157 |
Isolation trenches for memory devices |
Oct. 21, 2008 |
| 7413953 |
Method of forming floating gate array of flash memory device |
Aug. 19, 2008 |
| 7410869 |
Method of manufacturing a semiconductor device |
Aug. 12, 2008 |
| 7402492 |
Method of manufacturing a memory device having improved erasing characteristics |
Jul. 22, 2008 |
| 7371645 |
Method of manufacturing a field effect transistor device with recessed channel and corner gate device |
May. 13, 2008 |
| 7368348 |
Methods of forming MOS transistors having buried gate electrodes therein |
May. 6, 2008 |
| 7364963 |
Method for fabricating semiconductor device |
Apr. 29, 2008 |
| 7358130 |
Method for monitoring lateral encroachment of spacer process on a CD SEM |
Apr. 15, 2008 |
| 7358139 |
Method of forming a field effect transistor including depositing and removing insulative material effective to expose transistor gate conductive material but not transistor gate semiconductor |
Apr. 15, 2008 |
| 7354824 |
Fabrication method of non-volatile memory |
Apr. 8, 2008 |
| 7332408 |
Isolation trenches for memory devices |
Feb. 19, 2008 |
| 7320915 |
Method of manufacturing flash memory device |
Jan. 22, 2008 |
| 7300842 |
Method of fabricating a mask ROM |
Nov. 27, 2007 |
| 7297598 |
Process for erase improvement in a non-volatile memory device |
Nov. 20, 2007 |
| 7276403 |
Selective oxidation of silicon in diode, TFT, and monolithic three dimensional memory arrays |
Oct. 2, 2007 |
| 7271064 |
Method of forming a field effect transistor using conductive masking material |
Sep. 18, 2007 |
| 7250337 |
Method for fabricating a nonvolatile sonos memory device |
Jul. 31, 2007 |
| 7247917 |
Nonvolatile semiconductor memory devices and methods of manufacturing the same |
Jul. 24, 2007 |
| 7244642 |
Method to obtain fully silicided gate electrodes |
Jul. 17, 2007 |
| 7232725 |
Split gate memory device and fabricating method thereof |
Jun. 19, 2007 |
| 7226838 |
Methods for fabricating a semiconductor device |
Jun. 5, 2007 |
| 7217621 |
Self-aligned split-gate NAND flash memory and fabrication process |
May. 15, 2007 |
| 7208377 |
Silicon oxidation method |
Apr. 24, 2007 |
| 7199034 |
Flash memory device and method for fabricating the same |
Apr. 3, 2007 |
| 7189618 |
Method of manufacturing a transistor of a semiconductor device |
Mar. 13, 2007 |
| 7183158 |
Method of fabricating a non-volatile memory |
Feb. 27, 2007 |
| 7179709 |
Method of fabricating non-volatile memory device having local SONOS gate structure |
Feb. 20, 2007 |
| 7166508 |
Method for forming nonvolatile memory device including insulating film containing nitrogen (nitride) |
Jan. 23, 2007 |
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