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Class Information
Number: 438/265
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Having additional gate electrode surrounded by dielectric (i.e., floating gate) > Oxidizing sidewall of gate electrode
Description: Process for making a floating gate-type field effect transistor including a step of forming a dielectric sidewall on the gate electrode by reacting the gate electrode material with oxygen.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8710549 MOS device for eliminating floating body effects and self-heating effects Apr. 29, 2014
8669609 Non-volatile memory (NVM) cell for endurance and method of making Mar. 11, 2014
8659069 Gate structures Feb. 25, 2014
8652902 Floating gate semiconductor memory device and method for producing such a device Feb. 18, 2014
8569868 Device having and method for forming fins with multiple widths Oct. 29, 2013
8557659 Spacer structures of a semiconductor device Oct. 15, 2013
8466023 Semiconductor device and method for fabricating the same Jun. 18, 2013
8377774 Split gate type non-volatile semiconductor memory device and method of manufacturing the same Feb. 19, 2013
8368138 Non-volatile memory devices and methods of manufacturing the same Feb. 5, 2013
8361869 Method for manufacturing suspended fin and gate-all-around field effect transistor Jan. 29, 2013
8288225 Method of reducing coupling between floating gates in nonvolatile memory Oct. 16, 2012
8263463 Nonvolatile split gate memory cell having oxide growth Sep. 11, 2012
8263459 Method for forming a floating gate non-volatile memory cell Sep. 11, 2012
8247857 Nonvolatile semiconductor memory device and method for manufacturing same Aug. 21, 2012
8163609 Nanocrystal memory with differential energy bands and method of formation Apr. 24, 2012
8138045 Method of forming sidewall spacers to reduce formation of recesses in the substrate and increase dopant retention in a semiconductor device Mar. 20, 2012
8124961 Single electron transistor Feb. 28, 2012
8124478 Method for fabricating flash memory device having vertical floating gate Feb. 28, 2012
8114729 Differential poly doping and circuits therefrom Feb. 14, 2012
8114741 Oxygen-rich layers underlying BPSG Feb. 14, 2012
8097507 Method of fabricating a semiconductor device Jan. 17, 2012
8089121 Nonvolatile semiconductor memory device and method of manufacturing the same Jan. 3, 2012
8071448 Semiconductor device and manufacturing method of the same Dec. 6, 2011
8063431 EEPROM and method for manufacturing EEPROM Nov. 22, 2011
8048730 Semiconductor device and method for manufacturing the same Nov. 1, 2011
8048739 Method of manufacturing flash memory device Nov. 1, 2011
8017477 Nonvolatile memory devices and methods of fabricating the same Sep. 13, 2011
8017991 Non-volatile memory device and methods of operating and fabricating the same Sep. 13, 2011
7977191 Method for fabricating flash memory device Jul. 12, 2011
7964457 Semiconductor integrated circuit device and a manufacturing method for the same Jun. 21, 2011
7955932 Single electron transistor and method of manufacturing the same Jun. 7, 2011
7947589 FinFET formation with a thermal oxide spacer hard mask formed from crystalline silicon layer May. 24, 2011
7935596 HTO offset and BL trench process for memory device to improve device performance May. 3, 2011
7932150 Lateral oxidation with high-K dielectric liner Apr. 26, 2011
7923327 Method of fabricating non-volatile memory device with concavely depressed electron injection region Apr. 12, 2011
7923365 Methods of forming field effect transistors having stress-inducing sidewall insulating spacers thereon Apr. 12, 2011
7892943 Isolation trenches for memory devices Feb. 22, 2011
7888203 Methods of making nonvolatile memory devices Feb. 15, 2011
7846826 Method of manufacturing a semiconductor device with multilayer sidewall Dec. 7, 2010
7829411 Method and device to form high quality oxide layers of different thickness in one processing step Nov. 9, 2010
7824981 Method and apparatus for semiconductor device and semiconductor memory device Nov. 2, 2010
7816207 Semiconductor device having electrode and manufacturing method thereof Oct. 19, 2010
7811888 Method for fabricating semiconductor memory device Oct. 12, 2010
7799639 Methods of fabricating non-volatile memory devices including a chlorine cured tunnel oxide layer Sep. 21, 2010
7776691 Semiconductor memory device and manufacturing method for semiconductor device Aug. 17, 2010
7772068 Method of manufacturing non-volatile memory Aug. 10, 2010
7767523 Semiconductor device with integrated flash memory and peripheral circuit and its manufacture method Aug. 3, 2010
7749845 Semiconductor device manufacturing method Jul. 6, 2010
7732280 Semiconductor device having offset spacer and method of forming the same Jun. 8, 2010
7723187 Semiconductor memory device and method of manufacturing the same May. 25, 2010

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