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Class Information
Number: 438/262
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Having additional gate electrode surrounded by dielectric (i.e., floating gate) > Including elongated source or drain region disposed under thick oxide regions (e.g., buried or diffused bitline, etc.)
Description: Process for making a floating gate-type insulated gate field effect transistor having elongated source or drain region located under thick oxide dielectric regions.










Sub-classes under this class:

Class Number Class Name Patents
438/263 Tunneling insulator 322


Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8643098 Method for fabricating semiconductor device with side contact Feb. 4, 2014
8637389 Resist feature and removable spacer pitch doubling patterning method for pillar structures Jan. 28, 2014
8623723 Method for manufacturing a semiconductor device with a bit line contact hole Jan. 7, 2014
8617951 Method of manufacturing a semiconductor memory device having a floating gate Dec. 31, 2013
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8604564 Semiconductor structures and methods of manufacturing the same Dec. 10, 2013
8575017 Non-volatile semiconductor memory device and method of manufacturing the same Nov. 5, 2013
8546218 Method for fabricating semiconductor device with buried word line Oct. 1, 2013
8507971 Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins Aug. 13, 2013
8487369 Semiconductor device with buried gates and buried bit lines and method for fabricating the same Jul. 16, 2013
8481431 Method for opening one-side contact region of vertical transistor and method for fabricating one-side junction region using the same Jul. 9, 2013
8455342 Mask ROM fabrication method Jun. 4, 2013
8435859 Methods of forming electrical contacts May. 7, 2013
8399319 Semiconductor device and method for manufacturing the same Mar. 19, 2013
8372732 Method for fabricating non-volatile memory device Feb. 12, 2013
8357606 Resist feature and removable spacer pitch doubling patterning method for pillar structures Jan. 22, 2013
8288227 Semiconductor memory device with bit line of small resistance and manufacturing method thereof Oct. 16, 2012
8278171 Fabrication method for semiconductor device having laminated electronic conductor on bit line Oct. 2, 2012
8278164 Semiconductor structures and methods of manufacturing the same Oct. 2, 2012
8236646 Non-volatile memory manufacturing method using STI trench implantation Aug. 7, 2012
8222159 Manufacturing method of semiconductor device Jul. 17, 2012
8222685 Flash memory device and method for manufacturing the same Jul. 17, 2012
8216897 Method for manufacturing a capacitor of a semiconductor device Jul. 10, 2012
8193059 Bit line structure and method for the production thereof Jun. 5, 2012
8178407 Systems and methods for a high density, compact memory array May. 15, 2012
8119471 Semiconductor device and method for manufacturing the same Feb. 21, 2012
8114765 Methods for increased array feature density Feb. 14, 2012
8105924 Deep trench based far subcollector reachthrough Jan. 31, 2012
8084347 Resist feature and removable spacer pitch doubling patterning method for pillar structures Dec. 27, 2011
8048739 Method of manufacturing flash memory device Nov. 1, 2011
8034684 Semiconductor device with improved overlay margin and method of manufacturing the same Oct. 11, 2011
8026604 Semiconductor devices having contact holes including protrusions exposing contact pads Sep. 27, 2011
8017477 Nonvolatile memory devices and methods of fabricating the same Sep. 13, 2011
8017991 Non-volatile memory device and methods of operating and fabricating the same Sep. 13, 2011
8012829 Semiconductor device and method of manufacturing the same Sep. 6, 2011
8012830 ORO and ORPRO with bit line trench to suppress transport program disturb Sep. 6, 2011
7989291 Anisotropic stress generation by stress-generating liners having a sublithographic width Aug. 2, 2011
7985648 Semiconductor memory device with bit line of small resistance and manufacturing method thereof Jul. 26, 2011
7960266 Spacer patterns using assist layer for high density semiconductor devices Jun. 14, 2011
7951675 SI trench between bitline HDP for BVDSS improvement May. 31, 2011
7923327 Method of fabricating non-volatile memory device with concavely depressed electron injection region Apr. 12, 2011
7910431 Method for manufacturing semiconductor device Mar. 22, 2011
7906394 Implanted vertical source-line under straight stack for FLASH EPROM Mar. 15, 2011
7902590 Semiconductor device, method of controlling the same, and method of manufacturing the same Mar. 8, 2011
7897457 Method for manufacturing a nonvolatile semiconductor memory device Mar. 1, 2011
7892943 Isolation trenches for memory devices Feb. 22, 2011
7888203 Methods of making nonvolatile memory devices Feb. 15, 2011
7858473 Flash memory device and method of manufacturing the same Dec. 28, 2010
7846795 Bit line of a semiconductor device and method for fabricating the same Dec. 7, 2010
7846796 Semiconductor devices including buried bit lines Dec. 7, 2010

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