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Class Information
Number: 438/260
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Having additional gate electrode surrounded by dielectric (i.e., floating gate) > Textured surface of gate insulator or gate electrode
Description: Process for making a floating gate-type insulated gate field effect transistor wherein a roughened surface is utilized for the gate insulator or gate electrode.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7592224 |
Method of fabricating a storage device including decontinuous storage elements within and between trenches |
Sep. 22, 2009 |
| 7582930 |
Non-volatile memory and method for manufacturing non-volatile memory |
Sep. 1, 2009 |
| 7579237 |
Nonvolatile memory device and method of manufacturing the same |
Aug. 25, 2009 |
| 7575978 |
Method for making conductive nanoparticle charge storage element |
Aug. 18, 2009 |
| 7566616 |
Methods for fabricating flash memory devices |
Jul. 28, 2009 |
| 7560340 |
Method of manufacturing flash memory device |
Jul. 14, 2009 |
| 7531404 |
Semiconductor device having a metal gate electrode formed on an annealed high-k gate dielectric layer |
May. 12, 2009 |
| 7518176 |
Programmable nonvolatile memory and semiconductor integrated circuit device |
Apr. 14, 2009 |
| 7508026 |
Non-volatile semiconductor memory device having a two-layer gate electrode transistor and method of manufacturing the device |
Mar. 24, 2009 |
| 7494861 |
Method for metal gated ultra short MOSFET devices |
Feb. 24, 2009 |
| 7485526 |
Floating-gate structure with dielectric component |
Feb. 3, 2009 |
| 7453116 |
Semiconductor memory device and method of fabricating the same |
Nov. 18, 2008 |
| 7445997 |
Methods of forming non-volatile memory devices having floating gate electrodes |
Nov. 4, 2008 |
| 7445984 |
Method for removing nanoclusters from selected regions |
Nov. 4, 2008 |
| 7445998 |
Method for fabricating semiconductor device |
Nov. 4, 2008 |
| 7439157 |
Isolation trenches for memory devices |
Oct. 21, 2008 |
| 7432156 |
Memory device and methods for its fabrication |
Oct. 7, 2008 |
| 7432158 |
Method for retaining nanocluster size and electrical characteristics during processing |
Oct. 7, 2008 |
| 7432157 |
Method of fabricating flash memory |
Oct. 7, 2008 |
| 7419870 |
Method of manufacturing a flash memory device |
Sep. 2, 2008 |
| 7407857 |
Method of making a scalable flash EEPROM memory cell with notched floating gate and graded source region |
Aug. 5, 2008 |
| 7390691 |
Increasing phase change memory column landing margin |
Jun. 24, 2008 |
| 7374989 |
Flash memory and methods of fabricating the same |
May. 20, 2008 |
| 7371645 |
Method of manufacturing a field effect transistor device with recessed channel and corner gate device |
May. 13, 2008 |
| RE40275 |
Method for producing a memory cell |
Apr. 29, 2008 |
| 7361543 |
Method of forming a nanocluster charge storage device |
Apr. 22, 2008 |
| 7358134 |
Split gate flash memory cell and manufacturing method thereof |
Apr. 15, 2008 |
| 7354824 |
Fabrication method of non-volatile memory |
Apr. 8, 2008 |
| 7341914 |
Method for forming a non-volatile memory and a peripheral device on a semiconductor substrate |
Mar. 11, 2008 |
| 7335558 |
Method of manufacturing NAND flash memory device |
Feb. 26, 2008 |
| 7332408 |
Isolation trenches for memory devices |
Feb. 19, 2008 |
| 7320914 |
System and method for gate formation in a semiconductor device |
Jan. 22, 2008 |
| 7312498 |
Nonvolatile semiconductor memory cell and method of manufacturing the same |
Dec. 25, 2007 |
| 7282758 |
Method of fabricating a floating gate for a nonvolatile memory |
Oct. 16, 2007 |
| 7279385 |
Flash memory device and manufacturing method thereof |
Oct. 9, 2007 |
| 7189618 |
Method of manufacturing a transistor of a semiconductor device |
Mar. 13, 2007 |
| 7183143 |
Method for forming nitrided tunnel oxide layer |
Feb. 27, 2007 |
| 7183158 |
Method of fabricating a non-volatile memory |
Feb. 27, 2007 |
| 7179709 |
Method of fabricating non-volatile memory device having local SONOS gate structure |
Feb. 20, 2007 |
| 7169667 |
Nonvolatile memory cell with multiple floating gates formed after the select gate |
Jan. 30, 2007 |
| 7160775 |
Method of discharging a semiconductor device |
Jan. 9, 2007 |
| 7157334 |
Method of manufacturing flash memory device |
Jan. 2, 2007 |
| 7125770 |
Gate Structure in flash memory cell and method of forming the same, and method of forming dielectric film |
Oct. 24, 2006 |
| 7118969 |
Method of manufacturing a floating gate and method of manufacturing a non-volatile semiconductor memory device comprising the same |
Oct. 10, 2006 |
| 7118967 |
Protection of charge trapping dielectric flash memory devices from UV-induced charging in BEOL processing |
Oct. 10, 2006 |
| 7101760 |
Charge trapping nanocrystal dielectric for non-volatile memory transistor |
Sep. 5, 2006 |
| 7101756 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity |
Sep. 5, 2006 |
| 7091550 |
Non-volatile memory device and method of manufacturing the same |
Aug. 15, 2006 |
| 7074676 |
Memory film, method of manufacturing the memory film, memory element, semiconductor storage device, semiconductor integrated circuit, and portable electronic equipment |
Jul. 11, 2006 |
| 7053442 |
Nonvolatile semiconductor memory device |
May. 30, 2006 |
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