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Class Information
Number: 438/259
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Having additional gate electrode surrounded by dielectric (i.e., floating gate) > Including forming gate electrode in trench or recess in substrate
Description: Process for making a floating gate type insulated gate field effect transistor including forming a gate electrode in a groove located in the semiconductor substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615449 |
Semiconductor device having a recess channel transistor |
Nov. 10, 2009 |
| 7615451 |
Method for forming semiconductor device |
Nov. 10, 2009 |
| 7615452 |
Method of fabrication of normally-off field-effect semiconductor device |
Nov. 10, 2009 |
| 7611947 |
Method of manufacturing semiconductor device |
Nov. 3, 2009 |
| 7608508 |
Method for manufacturing semiconductor device |
Oct. 27, 2009 |
| 7608878 |
Semiconductor device manufactured with a double shallow trench isolation process |
Oct. 27, 2009 |
| 7608511 |
Fabrication method of trenched power MOSFET with low gate impedance |
Oct. 27, 2009 |
| 7608876 |
Merged MOS-bipolar capacitor memory cell |
Oct. 27, 2009 |
| 7601592 |
Method for forming multi-gate non-volatile memory devices using a damascene process |
Oct. 13, 2009 |
| 7598586 |
Semiconductor device and production method therefor |
Oct. 6, 2009 |
| 7598562 |
Semiconductor device and method of manufacturing the same |
Oct. 6, 2009 |
| 7598563 |
Memory device and method for manufacturing the same |
Oct. 6, 2009 |
| 7595238 |
Trench MOS type silicon carbide semiconductor device and method for manufacturing the same |
Sep. 29, 2009 |
| 7592222 |
Method of fabricating flash memory device |
Sep. 22, 2009 |
| 7592224 |
Method of fabricating a storage device including decontinuous storage elements within and between trenches |
Sep. 22, 2009 |
| 7592233 |
Method for forming a memory device with a recessed gate |
Sep. 22, 2009 |
| 7588977 |
Method of fabricating a MOS field effect transistor having plurality of channels |
Sep. 15, 2009 |
| 7588984 |
Method to define a transistor gate of a DRAM and the transistor gate using same |
Sep. 15, 2009 |
| 7585727 |
Method for fabricating semiconductor device having bulb-shaped recess gate |
Sep. 8, 2009 |
| 7585755 |
Method of fabricating non-volatile memory device |
Sep. 8, 2009 |
| 7582530 |
Managing floating gate-to-floating gate spacing to support scalability |
Sep. 1, 2009 |
| 7582532 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7579649 |
Trench field effect transistor and method of making it |
Aug. 25, 2009 |
| 7579241 |
Semiconductor device and method of manufacture thereof |
Aug. 25, 2009 |
| 7579237 |
Nonvolatile memory device and method of manufacturing the same |
Aug. 25, 2009 |
| 7579240 |
Method of making vertical transistor with horizontal gate layers |
Aug. 25, 2009 |
| 7575973 |
Method of making three dimensional NAND memory |
Aug. 18, 2009 |
| 7575974 |
Method for fabricating semiconductor device including recess gate |
Aug. 18, 2009 |
| 7575989 |
Method of manufacturing a transistor of a semiconductor device |
Aug. 18, 2009 |
| 7572699 |
Process of forming an electronic device including fins and discontinuous storage elements |
Aug. 11, 2009 |
| 7572701 |
Recessed gate for a CMOS image sensor |
Aug. 11, 2009 |
| 7563686 |
Method for forming a memory device with a recessed gate |
Jul. 21, 2009 |
| 7563677 |
Recessed gate electrode and method of forming the same and semiconductor device having the recessed gate electrode and method of manufacturing the same |
Jul. 21, 2009 |
| 7560335 |
Memory device transistors |
Jul. 14, 2009 |
| 7560340 |
Method of manufacturing flash memory device |
Jul. 14, 2009 |
| 7560723 |
Enhanced memory density resistance variable memory cells, arrays, devices and systems including the same, and methods of fabrication |
Jul. 14, 2009 |
| 7557002 |
Methods of forming transistor devices |
Jul. 7, 2009 |
| 7556992 |
Method for forming vertical structures in a semiconductor device |
Jul. 7, 2009 |
| 7553717 |
Recess etch for epitaxial SiGe |
Jun. 30, 2009 |
| 7550341 |
High density stepped, non-planar flash memory |
Jun. 23, 2009 |
| 7550800 |
Method and apparatus transporting charges in semiconductor device and semiconductor memory device |
Jun. 23, 2009 |
| 7547604 |
Method of forming a recessed gate structure on a substrate having insulating columns and removing said insulating columns after forming a conductive region of the gate structure |
Jun. 16, 2009 |
| 7547603 |
Non-planar non-volatile memory cell with an erase gate, an array therefor, and a method of making same |
Jun. 16, 2009 |
| 7547601 |
Low power electrically alterable nonvolatile memory cells and arrays |
Jun. 16, 2009 |
| 7547600 |
Five channel fin transistor and method for fabricating the same |
Jun. 16, 2009 |
| 7544568 |
Semiconductor device and method of manufacturing the same |
Jun. 9, 2009 |
| 7544989 |
High density stepped, non-planar flash memory |
Jun. 9, 2009 |
| 7544991 |
Non-volatile memory device and methods of manufacturing and operating the same |
Jun. 9, 2009 |
| 7541242 |
NROM memory cell, memory array, related devices and methods |
Jun. 2, 2009 |
| 7541241 |
Method for fabricating memory cell |
Jun. 2, 2009 |
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