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Class Information
Number: 438/256
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Stacked capacitor > Contacts formed by selective growth or deposition
Description: Process wherein electrical contacts are formed by selective growth or deposition of conductive material onto the semiconductor substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622348 |
Methods for fabricating an integrated circuit |
Nov. 24, 2009 |
| 7623338 |
Multiple metal-insulator-metal capacitors and method of fabricating the same |
Nov. 24, 2009 |
| 7618859 |
Thin film capacitor and fabrication method thereof |
Nov. 17, 2009 |
| 7605033 |
Low resistance peripheral local interconnect contacts with selective wet strip of titanium |
Oct. 20, 2009 |
| 7582560 |
Method for fabricating semiconductor device |
Sep. 1, 2009 |
| 7566611 |
Manufacturing method for an integrated semiconductor structure |
Jul. 28, 2009 |
| 7544563 |
Methods of forming a plurality of capacitors |
Jun. 9, 2009 |
| 7491606 |
Semiconductor device and method for fabricating the same |
Feb. 17, 2009 |
| 7488644 |
Method of fabricating a semiconductor device |
Feb. 10, 2009 |
| 7482257 |
Method for forming metal contact in semiconductor device |
Jan. 27, 2009 |
| 7482221 |
Memory device and method of manufacturing a memory device |
Jan. 27, 2009 |
| 7452770 |
Reduced cell-to-cell shorting for memory arrays |
Nov. 18, 2008 |
| 7449383 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same |
Nov. 11, 2008 |
| 7402466 |
Strained silicon CMOS on hybrid crystal orientations |
Jul. 22, 2008 |
| 7399671 |
Disposable pillars for contact formation |
Jul. 15, 2008 |
| 7393742 |
Semiconductor device having a capacitor and a fabrication method thereof |
Jul. 1, 2008 |
| 7374992 |
Manufacturing method for an integrated semiconductor structure |
May. 20, 2008 |
| 7364996 |
Methods of fabricating patterned layers on a substrate |
Apr. 29, 2008 |
| 7332389 |
Selective polysilicon stud growth |
Feb. 19, 2008 |
| 7329569 |
Methods of forming semiconductor devices including mesa structures and multiple passivation layers |
Feb. 12, 2008 |
| 7316954 |
Methods of fabricating integrated circuit devices that utilize doped poly-Si.sub.1-xGe.sub.x conductive plugs as interconnects |
Jan. 8, 2008 |
| 7312121 |
Method of manufacturing a semiconductor memory device |
Dec. 25, 2007 |
| 7294545 |
Selective polysilicon stud growth |
Nov. 13, 2007 |
| 7291532 |
Low resistance contact in a semiconductor device |
Nov. 6, 2007 |
| 7282406 |
Method of forming an MOS transistor and structure therefor |
Oct. 16, 2007 |
| 7253052 |
Method for forming a storage cell capacitor compatible with high dielectric constant materials |
Aug. 7, 2007 |
| 7229904 |
Method for forming landing plug contacts in semiconductor device |
Jun. 12, 2007 |
| 7214584 |
Method for forming semiconductor device capable of preventing bunker defect |
May. 8, 2007 |
| 7214621 |
Methods of forming devices associated with semiconductor constructions |
May. 8, 2007 |
| 7205190 |
Semiconductor device fabrication method |
Apr. 17, 2007 |
| 7199051 |
Method for fabricating semiconductor device capable of preventing damages to conductive structure |
Apr. 3, 2007 |
| 7195975 |
Method of forming bit line contact via |
Mar. 27, 2007 |
| 7153740 |
Fabrication of lean-free stacked capacitors |
Dec. 26, 2006 |
| 7144798 |
Semiconductor memory devices having extending contact pads and related methods |
Dec. 5, 2006 |
| 7118955 |
Method for the production of a semiconductor substrate comprising a plurality of gate stacks on a semiconductor substrate, and corresponding semiconductor structure |
Oct. 10, 2006 |
| 7118960 |
Selective polysilicon stud growth |
Oct. 10, 2006 |
| 7112485 |
Systems and methods for forming zirconium and/or hafnium-containing layers |
Sep. 26, 2006 |
| 7109080 |
Method of forming capacitor over bitline contact |
Sep. 19, 2006 |
| 7091085 |
Reduced cell-to-cell shorting for memory arrays |
Aug. 15, 2006 |
| 7087479 |
Method of forming integrated circuit contacts |
Aug. 8, 2006 |
| 7084027 |
Method for producing an integrated circuit |
Aug. 1, 2006 |
| 7074667 |
Semiconductor memory device including storage nodes and resistors and method of manufacturing the same |
Jul. 11, 2006 |
| 7071071 |
Method of manufacturing semiconductor device |
Jul. 4, 2006 |
| 7060555 |
Semiconductor device and method of manufacturing the same |
Jun. 13, 2006 |
| 7029970 |
Method for fabricating semiconductor device |
Apr. 18, 2006 |
| 7015533 |
Capacitor constructions, semiconductor constructions, and methods of forming electrical contacts and semiconductor constructions |
Mar. 21, 2006 |
| 6972228 |
Method of forming an element of a microelectronic circuit |
Dec. 6, 2005 |
| 6969649 |
Method of manufacturing semiconductor integrated circuit devices having a memory device with a reduced bit line stray capacity and such semiconductor integrated circuit devices |
Nov. 29, 2005 |
| 6967134 |
Methods of forming nitrogen-containing masses, silicon nitride layers, and capacitor constructions |
Nov. 22, 2005 |
| 6953744 |
Methods of fabricating integrated circuit devices providing improved short prevention |
Oct. 11, 2005 |
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