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Class Information
Number: 438/255
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Stacked capacitor > Including texturizing storage node layer
Description: Process having a step of roughening the surface of the capacitor plate which serves as the storage node layer of the stacked capacitor.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8426269 |
Method for fabricating semiconductor device |
Apr. 23, 2013 |
| 8426286 |
Method and device for a DRAM capacitor having low depletion ratio |
Apr. 23, 2013 |
| 8389375 |
Memory cell formed using a recess and methods for forming the same |
Mar. 5, 2013 |
| 8384143 |
Semiconductor device and manufacturing method therefor |
Feb. 26, 2013 |
| 8361863 |
Embedded DRAM with multiple gate oxide thicknesses |
Jan. 29, 2013 |
| 8334540 |
Display device |
Dec. 18, 2012 |
| 8318561 |
Semiconductor device and method of manufacturing the same |
Nov. 27, 2012 |
| 8309415 |
Methods and apparatus for increasing memory density using diode layer sharing |
Nov. 13, 2012 |
| 8236645 |
Integrated circuits having place-efficient capacitors and methods for fabricating the same |
Aug. 7, 2012 |
| 8232166 |
Method for fabricating semiconductor device with recess gate |
Jul. 31, 2012 |
| 8187934 |
Reverse construction memory cell |
May. 29, 2012 |
| 8169015 |
Semiconductor device and manufacturing method therefor |
May. 1, 2012 |
| 8164131 |
Nonvolatile semiconductor memory device and method of manufacturing the same |
Apr. 24, 2012 |
| 8148214 |
Stressed field effect transistor and methods for its fabrication |
Apr. 3, 2012 |
| 8129244 |
Method for fabricating semiconductor device |
Mar. 6, 2012 |
| 8129251 |
Metal-insulator-metal-structured capacitor formed with polysilicon |
Mar. 6, 2012 |
| 8093123 |
Integration methods for carbon films in two- and three-dimensional memories formed therefrom |
Jan. 10, 2012 |
| 8080474 |
Method for making electrode |
Dec. 20, 2011 |
| 8076711 |
Semiconductor device and method of manufacturing the same |
Dec. 13, 2011 |
| 8039344 |
Methods of forming a capacitor structure and methods of manufacturing a semiconductor device using the same |
Oct. 18, 2011 |
| 8021970 |
Method of annealing a dielectric layer |
Sep. 20, 2011 |
| 8003481 |
Method for fabricating a capacitor |
Aug. 23, 2011 |
| 7989815 |
Display device |
Aug. 2, 2011 |
| 7964471 |
Methods of forming capacitors |
Jun. 21, 2011 |
| 7960230 |
Semiconductor device and method of manufacturing the same |
Jun. 14, 2011 |
| 7906393 |
Methods for forming small-scale capacitor structures |
Mar. 15, 2011 |
| 7868338 |
Liquid crystal display array board and method of fabricating the same |
Jan. 11, 2011 |
| 7863149 |
Method for fabricating a capacitor |
Jan. 4, 2011 |
| 7858483 |
Method for fabricating capacitor of semiconductor device |
Dec. 28, 2010 |
| 7846795 |
Bit line of a semiconductor device and method for fabricating the same |
Dec. 7, 2010 |
| 7846809 |
Method for forming capacitor of semiconductor device |
Dec. 7, 2010 |
| 7825043 |
Method for fabricating capacitor in semiconductor device |
Nov. 2, 2010 |
| 7812450 |
Electrode with nano-sized structures |
Oct. 12, 2010 |
| 7781298 |
Methods for fabricating a capacitor |
Aug. 24, 2010 |
| 7781820 |
Semiconductor memory device and method of manufacturing the same |
Aug. 24, 2010 |
| 7781819 |
Semiconductor devices having a contact plug and fabrication methods thereof |
Aug. 24, 2010 |
| 7741176 |
Method for fabricating a cylindrical capacitor including implanting impurities into the upper sections of the lower electrode to prevent the formation of hemispherical grain silicon on the upp |
Jun. 22, 2010 |
| 7736972 |
Method for forming storage electrode of semiconductor memory device |
Jun. 15, 2010 |
| 7709367 |
Method for fabricating storage node contact in semiconductor device |
May. 4, 2010 |
| 7705391 |
Semiconductor device and method of manufacturing the same |
Apr. 27, 2010 |
| 7700433 |
MIM type capacitor |
Apr. 20, 2010 |
| 7700454 |
Methods of forming integrated circuit electrodes and capacitors by wrinkling a layer that includes a high percentage of impurities |
Apr. 20, 2010 |
| 7696042 |
Semiconductor capacitor structure and method to form same |
Apr. 13, 2010 |
| 7670900 |
Method and structure for fabricating capacitor devices for integrated circuits |
Mar. 2, 2010 |
| 7666738 |
Method for fabricating capacitor of semiconductor device |
Feb. 23, 2010 |
| 7659210 |
Nano-crystal etch process |
Feb. 9, 2010 |
| 7651907 |
Method for fabricating semiconductor device |
Jan. 26, 2010 |
| 7642157 |
Method for enhancing electrode surface area in DRAM cell capacitors |
Jan. 5, 2010 |
| 7579237 |
Nonvolatile memory device and method of manufacturing the same |
Aug. 25, 2009 |
| 7566611 |
Manufacturing method for an integrated semiconductor structure |
Jul. 28, 2009 |
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