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Class Information
Number: 438/255
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Stacked capacitor > Including texturizing storage node layer
Description: Process having a step of roughening the surface of the capacitor plate which serves as the storage node layer of the stacked capacitor.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Patent Number Title Of Patent Date Issued
8710673 Wiring structure in a semiconductor device, method of forming the wiring structure, semiconductor device including the wiring structure and method of manufacturing the semiconductor device Apr. 29, 2014
8674371 Display device Mar. 18, 2014
8610249 Non-planar capacitor and method of forming the non-planar capacitor Dec. 17, 2013
8481396 Memory cell that includes a carbon-based reversible resistance switching element compatible with a steering element, and methods of forming the same Jul. 9, 2013
8426286 Method and device for a DRAM capacitor having low depletion ratio Apr. 23, 2013
8426269 Method for fabricating semiconductor device Apr. 23, 2013
8389375 Memory cell formed using a recess and methods for forming the same Mar. 5, 2013
8384143 Semiconductor device and manufacturing method therefor Feb. 26, 2013
8361863 Embedded DRAM with multiple gate oxide thicknesses Jan. 29, 2013
8334540 Display device Dec. 18, 2012
8318561 Semiconductor device and method of manufacturing the same Nov. 27, 2012
8309415 Methods and apparatus for increasing memory density using diode layer sharing Nov. 13, 2012
8236645 Integrated circuits having place-efficient capacitors and methods for fabricating the same Aug. 7, 2012
8232166 Method for fabricating semiconductor device with recess gate Jul. 31, 2012
8187934 Reverse construction memory cell May. 29, 2012
8169015 Semiconductor device and manufacturing method therefor May. 1, 2012
8164131 Nonvolatile semiconductor memory device and method of manufacturing the same Apr. 24, 2012
8148214 Stressed field effect transistor and methods for its fabrication Apr. 3, 2012
8129251 Metal-insulator-metal-structured capacitor formed with polysilicon Mar. 6, 2012
8129244 Method for fabricating semiconductor device Mar. 6, 2012
8093123 Integration methods for carbon films in two- and three-dimensional memories formed therefrom Jan. 10, 2012
8080474 Method for making electrode Dec. 20, 2011
8076711 Semiconductor device and method of manufacturing the same Dec. 13, 2011
8039344 Methods of forming a capacitor structure and methods of manufacturing a semiconductor device using the same Oct. 18, 2011
8021970 Method of annealing a dielectric layer Sep. 20, 2011
8003481 Method for fabricating a capacitor Aug. 23, 2011
7989815 Display device Aug. 2, 2011
7964471 Methods of forming capacitors Jun. 21, 2011
7960230 Semiconductor device and method of manufacturing the same Jun. 14, 2011
7906393 Methods for forming small-scale capacitor structures Mar. 15, 2011
7868338 Liquid crystal display array board and method of fabricating the same Jan. 11, 2011
7863149 Method for fabricating a capacitor Jan. 4, 2011
7858483 Method for fabricating capacitor of semiconductor device Dec. 28, 2010
7846809 Method for forming capacitor of semiconductor device Dec. 7, 2010
7846795 Bit line of a semiconductor device and method for fabricating the same Dec. 7, 2010
7825043 Method for fabricating capacitor in semiconductor device Nov. 2, 2010
7812450 Electrode with nano-sized structures Oct. 12, 2010
7781819 Semiconductor devices having a contact plug and fabrication methods thereof Aug. 24, 2010
7781298 Methods for fabricating a capacitor Aug. 24, 2010
7781820 Semiconductor memory device and method of manufacturing the same Aug. 24, 2010
7741176 Method for fabricating a cylindrical capacitor including implanting impurities into the upper sections of the lower electrode to prevent the formation of hemispherical grain silicon on the upp Jun. 22, 2010
7736972 Method for forming storage electrode of semiconductor memory device Jun. 15, 2010
7709367 Method for fabricating storage node contact in semiconductor device May. 4, 2010
7705391 Semiconductor device and method of manufacturing the same Apr. 27, 2010
7700433 MIM type capacitor Apr. 20, 2010
7700454 Methods of forming integrated circuit electrodes and capacitors by wrinkling a layer that includes a high percentage of impurities Apr. 20, 2010
7696042 Semiconductor capacitor structure and method to form same Apr. 13, 2010
7670900 Method and structure for fabricating capacitor devices for integrated circuits Mar. 2, 2010
7666738 Method for fabricating capacitor of semiconductor device Feb. 23, 2010
7659210 Nano-crystal etch process Feb. 9, 2010

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