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Class Information
Number: 438/255
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Stacked capacitor > Including texturizing storage node layer
Description: Process having a step of roughening the surface of the capacitor plate which serves as the storage node layer of the stacked capacitor.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7579237 |
Nonvolatile memory device and method of manufacturing the same |
Aug. 25, 2009 |
| 7566611 |
Manufacturing method for an integrated semiconductor structure |
Jul. 28, 2009 |
| 7560351 |
Integrated circuit arrangement with low-resistance contacts and method for production thereof |
Jul. 14, 2009 |
| 7547607 |
Methods of fabricating integrated circuit capacitors using a dry etching process |
Jun. 16, 2009 |
| 7531421 |
Semiconductor capacitor structure and method to form same |
May. 12, 2009 |
| 7517753 |
Methods of forming pluralities of capacitors |
Apr. 14, 2009 |
| 7511297 |
Phase change memory device and method of fabricating the same |
Mar. 31, 2009 |
| 7504301 |
Stressed field effect transistor and methods for its fabrication |
Mar. 17, 2009 |
| 7482221 |
Memory device and method of manufacturing a memory device |
Jan. 27, 2009 |
| 7456065 |
Fabricating method of DRAM cylindrical capacitor |
Nov. 25, 2008 |
| 7432152 |
Methods of forming HSG layers and devices |
Oct. 7, 2008 |
| 7427545 |
Trench memory cells with buried isolation collars, and methods of fabricating same |
Sep. 23, 2008 |
| 7414297 |
Capacitor constructions |
Aug. 19, 2008 |
| 7413950 |
Methods of forming capacitors having storage electrodes including cylindrical conductive patterns |
Aug. 19, 2008 |
| 7407854 |
Method for fabricating capacitor of semiconductor device |
Aug. 5, 2008 |
| 7405122 |
Methods for fabricating a capacitor |
Jul. 29, 2008 |
| 7393742 |
Semiconductor device having a capacitor and a fabrication method thereof |
Jul. 1, 2008 |
| 7387929 |
Capacitor in semiconductor device and method of manufacturing the same |
Jun. 17, 2008 |
| 7378313 |
Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules |
May. 27, 2008 |
| 7374992 |
Manufacturing method for an integrated semiconductor structure |
May. 20, 2008 |
| 7364968 |
Capacitor in semiconductor device and manufacturing method |
Apr. 29, 2008 |
| 7335554 |
Method for fabricating semiconductor |
Feb. 26, 2008 |
| 7332391 |
Method for forming storage node contacts in semiconductor device |
Feb. 19, 2008 |
| 7312120 |
Method for obtaining extreme selectivity of metal nitrides and metal oxides |
Dec. 25, 2007 |
| 7309627 |
Method for fabricating a gate mask of a semiconductor device |
Dec. 18, 2007 |
| 7276412 |
MIM capacitor of semiconductor device and manufacturing method thereof |
Oct. 2, 2007 |
| 7273778 |
Method of electroplating a substance over a semiconductor substrate |
Sep. 25, 2007 |
| 7274061 |
Capacitor constructions |
Sep. 25, 2007 |
| 7274059 |
Capacitor constructions |
Sep. 25, 2007 |
| 7259061 |
Method for forming a capacitor for an integrated circuit and integrated circuit |
Aug. 21, 2007 |
| 7229890 |
Forming integrated circuits using selective deposition of undoped silicon film seeded in chlorine and hydride gas |
Jun. 12, 2007 |
| 7226829 |
Method for fabricating semiconductor device |
Jun. 5, 2007 |
| 7183153 |
Method of manufacturing self aligned non-volatile memory cells |
Feb. 27, 2007 |
| 7160785 |
Container capacitor structure and method of formation thereof |
Jan. 9, 2007 |
| 7153740 |
Fabrication of lean-free stacked capacitors |
Dec. 26, 2006 |
| 7153751 |
Method of forming a capacitor |
Dec. 26, 2006 |
| 7144773 |
Method for preventing trenching in fabricating split gate flash devices |
Dec. 5, 2006 |
| 7141847 |
DRAM constructions, memory arrays and semiconductor constructions |
Nov. 28, 2006 |
| 7112503 |
Enhanced surface area capacitor fabrication methods |
Sep. 26, 2006 |
| 7109081 |
Capacitor for semiconductor device and method of forming the same |
Sep. 19, 2006 |
| 7105405 |
Rugged metal electrodes for metal-insulator-metal capacitors |
Sep. 12, 2006 |
| 7101756 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity |
Sep. 5, 2006 |
| 7094657 |
Method for protecting against oxidation of a conductive layer in said device |
Aug. 22, 2006 |
| 7091084 |
Ultra-high capacitance device based on nanostructures |
Aug. 15, 2006 |
| 7091101 |
Method of forming a device |
Aug. 15, 2006 |
| 7087482 |
Method of forming material using atomic layer deposition and method of forming capacitor of semiconductor device using the same |
Aug. 8, 2006 |
| 7081384 |
Method of forming a silicon dioxide layer |
Jul. 25, 2006 |
| 7074669 |
Semiconductor integrated circuit device with capacitor of crown structure and method of manufacturing the same |
Jul. 11, 2006 |
| 7071056 |
Method of forming a dual-sided capacitor |
Jul. 4, 2006 |
| 7071058 |
Methods of forming capacitors, and methods of forming DRAM circuitry |
Jul. 4, 2006 |
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