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Class Information
Number: 438/254
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Stacked capacitor > Including selectively removing material to undercut and expose storage node layer
Description: Process having a step of selectively removing material (e.g., by etching, etc.) to undercut and expose the capacitor electrode which serves as the storage node layer of the stacked capacitor.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7452769 |
Semiconductor device including an improved capacitor and method for manufacturing the same |
Nov. 18, 2008 |
| 7449383 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same |
Nov. 11, 2008 |
| 7449391 |
Methods of forming plurality of capacitor devices |
Nov. 11, 2008 |
| 7445991 |
Methods of forming a plurality of capacitors |
Nov. 4, 2008 |
| 7435644 |
Method of manufacturing capacitor of semiconductor device |
Oct. 14, 2008 |
| 7435677 |
Method for fabricating semiconductor device |
Oct. 14, 2008 |
| 7416954 |
Enhanced on-chip decoupling capacitors and method of making same |
Aug. 26, 2008 |
| 7413951 |
Stacked capacitor and method for producing stacked capacitors for dynamic memory cells |
Aug. 19, 2008 |
| 7410866 |
Method for forming storage node of capacitor in semiconductor device |
Aug. 12, 2008 |
| 7411240 |
Integrated circuits including spacers that extend beneath a conductive line |
Aug. 12, 2008 |
| 7402486 |
Cylinder-type capacitor and storage device, and method(s) for fabricating the same |
Jul. 22, 2008 |
| 7397078 |
Non-volatile semiconductor memory |
Jul. 8, 2008 |
| 7393742 |
Semiconductor device having a capacitor and a fabrication method thereof |
Jul. 1, 2008 |
| 7393743 |
Methods of forming a plurality of capacitors |
Jul. 1, 2008 |
| 7385240 |
Storage cell capacitor compatible with high dielectric constant materials |
Jun. 10, 2008 |
| 7374992 |
Manufacturing method for an integrated semiconductor structure |
May. 20, 2008 |
| 7371636 |
Method for fabricating storage node contact hole of semiconductor device |
May. 13, 2008 |
| 7364967 |
Methods of forming storage capacitors for semiconductor devices |
Apr. 29, 2008 |
| 7361550 |
Methods of fabricating semiconductor memory devices including electrode contact structures having reduced contact resistance |
Apr. 22, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7335554 |
Method for fabricating semiconductor |
Feb. 26, 2008 |
| 7329576 |
Double-sided container capacitors using a sacrificial layer |
Feb. 12, 2008 |
| 7312131 |
Method for forming multilayer electrode capacitor |
Dec. 25, 2007 |
| 7312130 |
Methods of forming capacitor structures including L-shaped cavities |
Dec. 25, 2007 |
| 7312118 |
Semiconductor device and method of manufacturing the same |
Dec. 25, 2007 |
| 7309627 |
Method for fabricating a gate mask of a semiconductor device |
Dec. 18, 2007 |
| 7300841 |
Capacitor and method of manufacturing the same |
Nov. 27, 2007 |
| 7279382 |
Methods of manufacturing semiconductor devices having capacitors |
Oct. 9, 2007 |
| 7279383 |
Liquid crystal display device and method of fabricating the same |
Oct. 9, 2007 |
| 7274061 |
Capacitor constructions |
Sep. 25, 2007 |
| 7273778 |
Method of electroplating a substance over a semiconductor substrate |
Sep. 25, 2007 |
| 7268058 |
Tri-gate transistors and methods to fabricate same |
Sep. 11, 2007 |
| 7265013 |
Sidewall image transfer (SIT) technologies |
Sep. 4, 2007 |
| 7253052 |
Method for forming a storage cell capacitor compatible with high dielectric constant materials |
Aug. 7, 2007 |
| 7247537 |
Semiconductor device including an improved capacitor and method for manufacturing the same |
Jul. 24, 2007 |
| 7244650 |
Transistor and method for manufacturing the same |
Jul. 17, 2007 |
| 7235452 |
Method for fabricating capacitor in semiconductor device |
Jun. 26, 2007 |
| 7226837 |
Semiconductor device and method for fabricating the same |
Jun. 5, 2007 |
| 7217618 |
Semiconductor device and method for fabricating the same using damascene process |
May. 15, 2007 |
| 7214584 |
Method for forming semiconductor device capable of preventing bunker defect |
May. 8, 2007 |
| 7183171 |
Pyramid-shaped capacitor structure |
Feb. 27, 2007 |
| 7169665 |
Capacitance process by using passivation film scheme |
Jan. 30, 2007 |
| 7170127 |
Semiconductor device and fabricating method thereof |
Jan. 30, 2007 |
| 7166537 |
Miniaturized imaging device with integrated circuit connector system |
Jan. 23, 2007 |
| 7161205 |
Semiconductor memory device with cylindrical storage electrode and method of manufacturing the same |
Jan. 9, 2007 |
| 7153740 |
Fabrication of lean-free stacked capacitors |
Dec. 26, 2006 |
| 7125766 |
Method of forming capacitor for semiconductor device |
Oct. 24, 2006 |
| 7122420 |
Methods of recessing conductive material and methods of forming capacitor constructions |
Oct. 17, 2006 |
| 7112487 |
Method for fabricating a stacked capacitor array having a regular arrangement of a plurality of stacked capacitors |
Sep. 26, 2006 |
| 7109090 |
Pyramid-shaped capacitor structure |
Sep. 19, 2006 |
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