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Class Information
Number: 438/254
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Stacked capacitor > Including selectively removing material to undercut and expose storage node layer
Description: Process having a step of selectively removing material (e.g., by etching, etc.) to undercut and expose the capacitor electrode which serves as the storage node layer of the stacked capacitor.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625795 |
Container capacitor structure and method of formation thereof |
Dec. 1, 2009 |
| 7611945 |
Method and resulting structure for fabricating DRAM capacitor structure |
Nov. 3, 2009 |
| 7592220 |
Capacitance process using passivation film scheme |
Sep. 22, 2009 |
| 7585723 |
Method for fabricating capacitor |
Sep. 8, 2009 |
| 7579235 |
Container capacitor structure and method of formation thereof |
Aug. 25, 2009 |
| 7566611 |
Manufacturing method for an integrated semiconductor structure |
Jul. 28, 2009 |
| 7557015 |
Methods of forming pluralities of capacitors |
Jul. 7, 2009 |
| 7544563 |
Methods of forming a plurality of capacitors |
Jun. 9, 2009 |
| 7541254 |
Method of manufacturing thin film capacitor |
Jun. 2, 2009 |
| 7514320 |
Semiconductor device having increased capacitance of capacitor for data storage and method of manufacturing semiconductor device |
Apr. 7, 2009 |
| 7504300 |
Method for fabricating semiconductor memory device having cylinder type storage node |
Mar. 17, 2009 |
| 7494871 |
Semiconductor memory devices and methods for forming the same |
Feb. 24, 2009 |
| 7491606 |
Semiconductor device and method for fabricating the same |
Feb. 17, 2009 |
| 7465657 |
Method of manufacturing a semiconductor device having a capacitor |
Dec. 16, 2008 |
| 7452769 |
Semiconductor device including an improved capacitor and method for manufacturing the same |
Nov. 18, 2008 |
| 7449391 |
Methods of forming plurality of capacitor devices |
Nov. 11, 2008 |
| 7449383 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same |
Nov. 11, 2008 |
| 7445991 |
Methods of forming a plurality of capacitors |
Nov. 4, 2008 |
| 7435644 |
Method of manufacturing capacitor of semiconductor device |
Oct. 14, 2008 |
| 7435677 |
Method for fabricating semiconductor device |
Oct. 14, 2008 |
| 7416954 |
Enhanced on-chip decoupling capacitors and method of making same |
Aug. 26, 2008 |
| 7413951 |
Stacked capacitor and method for producing stacked capacitors for dynamic memory cells |
Aug. 19, 2008 |
| 7410866 |
Method for forming storage node of capacitor in semiconductor device |
Aug. 12, 2008 |
| 7411240 |
Integrated circuits including spacers that extend beneath a conductive line |
Aug. 12, 2008 |
| 7402486 |
Cylinder-type capacitor and storage device, and method(s) for fabricating the same |
Jul. 22, 2008 |
| 7397078 |
Non-volatile semiconductor memory |
Jul. 8, 2008 |
| 7393743 |
Methods of forming a plurality of capacitors |
Jul. 1, 2008 |
| 7393742 |
Semiconductor device having a capacitor and a fabrication method thereof |
Jul. 1, 2008 |
| 7385240 |
Storage cell capacitor compatible with high dielectric constant materials |
Jun. 10, 2008 |
| 7374992 |
Manufacturing method for an integrated semiconductor structure |
May. 20, 2008 |
| 7371636 |
Method for fabricating storage node contact hole of semiconductor device |
May. 13, 2008 |
| 7364967 |
Methods of forming storage capacitors for semiconductor devices |
Apr. 29, 2008 |
| 7361550 |
Methods of fabricating semiconductor memory devices including electrode contact structures having reduced contact resistance |
Apr. 22, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7335554 |
Method for fabricating semiconductor |
Feb. 26, 2008 |
| 7329576 |
Double-sided container capacitors using a sacrificial layer |
Feb. 12, 2008 |
| 7312118 |
Semiconductor device and method of manufacturing the same |
Dec. 25, 2007 |
| 7312130 |
Methods of forming capacitor structures including L-shaped cavities |
Dec. 25, 2007 |
| 7312131 |
Method for forming multilayer electrode capacitor |
Dec. 25, 2007 |
| 7309627 |
Method for fabricating a gate mask of a semiconductor device |
Dec. 18, 2007 |
| 7300841 |
Capacitor and method of manufacturing the same |
Nov. 27, 2007 |
| 7279382 |
Methods of manufacturing semiconductor devices having capacitors |
Oct. 9, 2007 |
| 7279383 |
Liquid crystal display device and method of fabricating the same |
Oct. 9, 2007 |
| 7273778 |
Method of electroplating a substance over a semiconductor substrate |
Sep. 25, 2007 |
| 7274061 |
Capacitor constructions |
Sep. 25, 2007 |
| 7268058 |
Tri-gate transistors and methods to fabricate same |
Sep. 11, 2007 |
| 7265013 |
Sidewall image transfer (SIT) technologies |
Sep. 4, 2007 |
| 7253052 |
Method for forming a storage cell capacitor compatible with high dielectric constant materials |
Aug. 7, 2007 |
| 7247537 |
Semiconductor device including an improved capacitor and method for manufacturing the same |
Jul. 24, 2007 |
| 7244650 |
Transistor and method for manufacturing the same |
Jul. 17, 2007 |
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