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Class Information
Number: 438/254
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Stacked capacitor > Including selectively removing material to undercut and expose storage node layer
Description: Process having a step of selectively removing material (e.g., by etching, etc.) to undercut and expose the capacitor electrode which serves as the storage node layer of the stacked capacitor.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703556 Method of making a FinFET device Apr. 22, 2014
8614471 Collections of laterally crystallized semiconductor islands for use in thin film transistors Dec. 24, 2013
8569817 Semiconductor device and method for fabricating the same Oct. 29, 2013
8530324 Methods of fabricating microelectronic memory devices having flat stopper layers Sep. 10, 2013
8518773 Method of fabricating semiconductor capacitor Aug. 27, 2013
8460996 Semiconductor devices with different dielectric thicknesses Jun. 11, 2013
8440525 Method for obtaining extreme selectivity of metal nitrides and metal oxides May. 14, 2013
8343803 Lightweight and compact through-silicon via stack package with excellent electrical connections and method for manufacturing the same Jan. 1, 2013
8324049 Semiconductor device and method for fabricating the same Dec. 4, 2012
8324069 Method of fabricating high-performance capacitors in integrated MOS technologies Dec. 4, 2012
8191217 Complimentary metal-insulator-metal (MIM) capacitors and method of manufacture Jun. 5, 2012
8187934 Reverse construction memory cell May. 29, 2012
8183101 Multiple gate transistor having fins with a length defined by the gate electrode May. 22, 2012
8178405 Resistor random access memory cell device May. 15, 2012
8163613 Methods of forming a plurality of capacitors Apr. 24, 2012
8163646 Interconnection wiring structure of a semiconductor device and method for manufacturing same Apr. 24, 2012
8153486 Method for fabricating capacitor Apr. 10, 2012
8148223 1T MIM memory for embedded ram application in soc Apr. 3, 2012
8138042 Capacitor, method of increasing a capacitance area of same, and system containing same Mar. 20, 2012
8129251 Metal-insulator-metal-structured capacitor formed with polysilicon Mar. 6, 2012
8114732 Method for manufacturing twin bit structure cell with Al.sub.2O.sub.3/nano-crystalline Si layer Feb. 14, 2012
8084323 Stack capacitor of memory device and fabrication method thereof Dec. 27, 2011
8053308 Method of forming a pattern and method of manufacturing a capacitor Nov. 8, 2011
8048757 Method for fabricating capacitor utilizes a sacrificial pattern enclosing the upper outer walls of the storage nodes Nov. 1, 2011
8048758 Method for fabricating a capacitor utilizes the sacrificial pattern covering the cell region Nov. 1, 2011
8021948 Scalable interpoly dielectric stacks with improved immunity to program saturation Sep. 20, 2011
8017475 Process to improve high-performance capacitors in integrated MOS technologies Sep. 13, 2011
7985645 Semiconductor device having a high aspect cylindrical capacitor and method for fabricating the same Jul. 26, 2011
7956386 Wiring structure in a semiconductor device, method of forming the wiring structure, semiconductor device including the wiring structure and method of manufacturing the semiconductor device Jun. 7, 2011
7919386 Methods of forming pluralities of capacitors Apr. 5, 2011
7910452 Method for fabricating a cylinder-type capacitor utilizing a connected ring structure Mar. 22, 2011
7897454 Metal-insulator-metal capacitor and fabrication method thereof Mar. 1, 2011
7892919 Method of forming isolation layer in semiconductor device Feb. 22, 2011
7892920 Method for manufacturing semiconductor device including implanting through a hole patterned from a first photoresist an oxide and a second photoresist Feb. 22, 2011
7879671 Method for manufacturing a semiconductor device that is less prone to DC failures brought about by unwanted defects on capacitors therein Feb. 1, 2011
7858483 Method for fabricating capacitor of semiconductor device Dec. 28, 2010
7846795 Bit line of a semiconductor device and method for fabricating the same Dec. 7, 2010
7846809 Method for forming capacitor of semiconductor device Dec. 7, 2010
7847379 Lightweight and compact through-silicon via stack package with excellent electrical connections and method for manufacturing the same Dec. 7, 2010
7824998 Method of forming a semiconductor capacitor using amorphous carbon Nov. 2, 2010
7816222 Method for manufacturing semiconductor device having a capacitor Oct. 19, 2010
7799591 Semiconductor device and method for manufacturing the same Sep. 21, 2010
7790546 Method for forming storage node of capacitor in semiconductor device Sep. 7, 2010
7759193 Methods of forming a plurality of capacitors Jul. 20, 2010
7741215 Semiconductor device and method for manufacturing the same Jun. 22, 2010
7736972 Method for forming storage electrode of semiconductor memory device Jun. 15, 2010
7727849 Method for manufacturing semiconductor device having a capacitor Jun. 1, 2010
7723183 Capacitor having tapered cylindrical storage node and method for manufacturing the same May. 25, 2010
7709367 Method for fabricating storage node contact in semiconductor device May. 4, 2010
7704828 Method of fabricating a semiconductor device Apr. 27, 2010

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